7/28/2011	9:11:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2011	9:11:54 AM	Recipe started at 9:11 AM
7/28/2011	9:11:54 AM	Helium valve closed
7/28/2011	9:11:54 AM	H2 valve closed
7/28/2011	9:11:54 AM	BCl3 valve closed
7/28/2011	9:11:54 AM	PH3 valve closed
7/28/2011	9:11:54 AM	SiCl4 pre valve closed
7/28/2011	9:11:54 AM	SiCl4 post valve closed
7/28/2011	9:11:54 AM	Main Vac valve closed
7/28/2011	9:11:54 AM	Bypass valve closed
7/28/2011	9:11:54 AM	Bubbler valve closed
7/28/2011	9:11:54 AM	Helium MFC set to  0.000000
7/28/2011	9:11:54 AM	H2 MFC set to  0.000000
7/28/2011	9:11:54 AM	BCl3 MFC set to  0.000000
7/28/2011	9:11:54 AM	PHl3 MFC set to  0.000000
7/28/2011	9:11:54 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:11:54 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:11:54 AM	Tube furnace set to 0
7/28/2011	9:11:57 AM	H2 valve closed
7/28/2011	9:11:57 AM	BCl3 valve closed
7/28/2011	9:11:57 AM	PH3 valve closed
7/28/2011	9:11:57 AM	SiCl4 pre valve closed
7/28/2011	9:11:57 AM	SiCl4 post valve closed
7/28/2011	9:11:57 AM	Main Vac valve closed
7/28/2011	9:11:57 AM	Bypass valve closed
7/28/2011	9:11:57 AM	Bubbler valve closed
7/28/2011	9:11:57 AM	Helium valve opened
7/28/2011	9:11:57 AM	Helium MFC set to  500.000000
7/28/2011	9:11:57 AM	H2 MFC set to  0.000000
7/28/2011	9:11:57 AM	BCl3 MFC set to  0.000000
7/28/2011	9:11:57 AM	PHl3 MFC set to  0.000000
7/28/2011	9:11:57 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:11:57 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:11:57 AM	Tube furnace set to 0
7/28/2011	9:13:03 AM	Helium valve closed
7/28/2011	9:13:03 AM	H2 valve closed
7/28/2011	9:13:03 AM	BCl3 valve closed
7/28/2011	9:13:03 AM	PH3 valve closed
7/28/2011	9:13:03 AM	SiCl4 pre valve closed
7/28/2011	9:13:03 AM	SiCl4 post valve closed
7/28/2011	9:13:03 AM	Main Vac valve closed
7/28/2011	9:13:03 AM	Bypass valve closed
7/28/2011	9:13:03 AM	Bubbler valve closed
7/28/2011	9:13:03 AM	Helium MFC set to  0.000000
7/28/2011	9:13:03 AM	H2 MFC set to  0.000000
7/28/2011	9:13:03 AM	BCl3 MFC set to  0.000000
7/28/2011	9:13:03 AM	PHl3 MFC set to  0.000000
7/28/2011	9:13:03 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:13:03 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:13:03 AM	Tube furnace set to 0
7/28/2011	9:13:04 AM	Run finished at 9:13 AM
7/28/2011	9:13:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2011	9:40:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	9:40:41 AM	Recipe started at 9:40 AM
7/28/2011	9:40:41 AM	Helium valve closed
7/28/2011	9:40:41 AM	H2 valve closed
7/28/2011	9:40:41 AM	BCl3 valve closed
7/28/2011	9:40:41 AM	PH3 valve closed
7/28/2011	9:40:41 AM	SiCl4 pre valve closed
7/28/2011	9:40:41 AM	SiCl4 post valve closed
7/28/2011	9:40:41 AM	Main Vac valve closed
7/28/2011	9:40:41 AM	Bubbler valve closed
7/28/2011	9:40:41 AM	Bypass valve opened
7/28/2011	9:40:41 AM	Helium MFC set to  0.000000
7/28/2011	9:40:41 AM	H2 MFC set to  0.000000
7/28/2011	9:40:41 AM	BCl3 MFC set to  0.000000
7/28/2011	9:40:41 AM	PHl3 MFC set to  0.000000
7/28/2011	9:40:41 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:40:41 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:40:42 AM	Tube furnace set to 0
7/28/2011	9:41:56 AM	Helium valve closed
7/28/2011	9:41:56 AM	H2 valve closed
7/28/2011	9:41:56 AM	BCl3 valve closed
7/28/2011	9:41:56 AM	PH3 valve closed
7/28/2011	9:41:56 AM	SiCl4 pre valve closed
7/28/2011	9:41:56 AM	SiCl4 post valve closed
7/28/2011	9:41:56 AM	Main Vac valve closed
7/28/2011	9:41:56 AM	Bubbler valve closed
7/28/2011	9:41:56 AM	Bypass valve opened
7/28/2011	9:41:56 AM	Helium MFC set to  0.000000
7/28/2011	9:41:56 AM	H2 MFC set to  0.000000
7/28/2011	9:41:56 AM	BCl3 MFC set to  0.000000
7/28/2011	9:41:56 AM	PHl3 MFC set to  0.000000
7/28/2011	9:41:56 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:41:56 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:41:56 AM	Tube furnace set to 0
7/28/2011	9:42:56 AM	Helium valve closed
7/28/2011	9:42:56 AM	H2 valve closed
7/28/2011	9:42:56 AM	BCl3 valve closed
7/28/2011	9:42:56 AM	PH3 valve closed
7/28/2011	9:42:56 AM	SiCl4 pre valve closed
7/28/2011	9:42:56 AM	SiCl4 post valve closed
7/28/2011	9:42:56 AM	Bypass valve closed
7/28/2011	9:42:56 AM	Bubbler valve closed
7/28/2011	9:42:56 AM	Main Vac valve opened
7/28/2011	9:42:57 AM	Helium MFC set to  0.000000
7/28/2011	9:42:57 AM	H2 MFC set to  0.000000
7/28/2011	9:42:57 AM	BCl3 MFC set to  0.000000
7/28/2011	9:42:57 AM	PHl3 MFC set to  0.000000
7/28/2011	9:42:57 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:42:57 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:42:57 AM	Tube furnace set to 0
7/28/2011	9:42:58 AM	Run finished at 9:42 AM
7/28/2011	9:42:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	9:48:32 AM	Program exited cleanly
7/28/2011	9:52:44 AM	Program started normally
7/28/2011	9:52:45 AM	Helium valve closed
7/28/2011	9:52:45 AM	H2 valve closed
7/28/2011	9:52:45 AM	BCl3 valve closed
7/28/2011	9:52:45 AM	PH3 valve closed
7/28/2011	9:52:45 AM	SiCl4 pre valve closed
7/28/2011	9:52:45 AM	SiCl4 post valve closed
7/28/2011	9:52:45 AM	Main Vac valve closed
7/28/2011	9:52:45 AM	Bypass valve closed
7/28/2011	9:52:45 AM	Bubbler valve closed
7/28/2011	9:52:45 AM	Helium MFC set to  0.000000
7/28/2011	9:52:45 AM	H2 MFC set to  0.000000
7/28/2011	9:52:45 AM	BCl3 MFC set to  0.000000
7/28/2011	9:52:45 AM	PHl3 MFC set to  0.000000
7/28/2011	9:52:45 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:52:45 AM	Bypass solenoid MFC set to  760.000000
7/28/2011	9:52:46 AM	Tube furnace set to 0
7/28/2011	9:53:20 AM	Main Vac valve opened
7/28/2011	9:53:27 AM	Tube furnace set to 350
7/28/2011	9:57:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/28/2011	9:57:32 AM	Recipe started at 9:57 AM
7/28/2011	9:57:32 AM	Helium valve closed
7/28/2011	9:57:32 AM	H2 valve closed
7/28/2011	9:57:32 AM	BCl3 valve closed
7/28/2011	9:57:32 AM	PH3 valve closed
7/28/2011	9:57:32 AM	SiCl4 pre valve closed
7/28/2011	9:57:32 AM	SiCl4 post valve closed
7/28/2011	9:57:32 AM	Main Vac valve closed
7/28/2011	9:57:32 AM	Bubbler valve closed
7/28/2011	9:57:32 AM	Bypass valve opened
7/28/2011	9:57:32 AM	Helium MFC set to  0.000000
7/28/2011	9:57:32 AM	H2 MFC set to  0.000000
7/28/2011	9:57:32 AM	BCl3 MFC set to  0.000000
7/28/2011	9:57:32 AM	PHl3 MFC set to  0.000000
7/28/2011	9:57:32 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:57:32 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:57:32 AM	Tube furnace set to 0
7/28/2011	9:57:32 AM	Helium valve closed
7/28/2011	9:57:32 AM	H2 valve closed
7/28/2011	9:57:32 AM	BCl3 valve closed
7/28/2011	9:57:32 AM	PH3 valve closed
7/28/2011	9:57:32 AM	SiCl4 pre valve closed
7/28/2011	9:57:32 AM	SiCl4 post valve closed
7/28/2011	9:57:32 AM	Main Vac valve closed
7/28/2011	9:57:32 AM	Bubbler valve closed
7/28/2011	9:57:32 AM	Bypass valve opened
7/28/2011	9:57:32 AM	Helium MFC set to  0.000000
7/28/2011	9:57:32 AM	H2 MFC set to  0.000000
7/28/2011	9:57:32 AM	BCl3 MFC set to  0.000000
7/28/2011	9:57:32 AM	PHl3 MFC set to  0.000000
7/28/2011	9:57:32 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:57:32 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:57:33 AM	Tube furnace set to 0
7/28/2011	9:58:03 AM	Helium valve closed
7/28/2011	9:58:03 AM	H2 valve closed
7/28/2011	9:58:03 AM	BCl3 valve closed
7/28/2011	9:58:03 AM	PH3 valve closed
7/28/2011	9:58:03 AM	SiCl4 pre valve closed
7/28/2011	9:58:03 AM	SiCl4 post valve closed
7/28/2011	9:58:03 AM	Bypass valve closed
7/28/2011	9:58:03 AM	Bubbler valve closed
7/28/2011	9:58:03 AM	Main Vac valve opened
7/28/2011	9:58:03 AM	Helium MFC set to  0.000000
7/28/2011	9:58:03 AM	H2 MFC set to  0.000000
7/28/2011	9:58:03 AM	BCl3 MFC set to  0.000000
7/28/2011	9:58:03 AM	PHl3 MFC set to  0.000000
7/28/2011	9:58:03 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:58:03 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:58:03 AM	Tube furnace set to 0
7/28/2011	9:58:33 AM	H2 valve closed
7/28/2011	9:58:33 AM	BCl3 valve closed
7/28/2011	9:58:33 AM	PH3 valve closed
7/28/2011	9:58:33 AM	SiCl4 pre valve closed
7/28/2011	9:58:33 AM	SiCl4 post valve closed
7/28/2011	9:58:33 AM	Bypass valve closed
7/28/2011	9:58:33 AM	Bubbler valve closed
7/28/2011	9:58:33 AM	Helium valve opened
7/28/2011	9:58:33 AM	Main Vac valve opened
7/28/2011	9:58:33 AM	Helium MFC set to  20.000000
7/28/2011	9:58:33 AM	H2 MFC set to  0.000000
7/28/2011	9:58:33 AM	BCl3 MFC set to  0.000000
7/28/2011	9:58:33 AM	PHl3 MFC set to  0.000000
7/28/2011	9:58:33 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:58:33 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:58:33 AM	Tube furnace set to 0
7/28/2011	9:59:03 AM	Helium valve closed
7/28/2011	9:59:03 AM	H2 valve closed
7/28/2011	9:59:03 AM	BCl3 valve closed
7/28/2011	9:59:03 AM	PH3 valve closed
7/28/2011	9:59:03 AM	SiCl4 pre valve closed
7/28/2011	9:59:03 AM	SiCl4 post valve closed
7/28/2011	9:59:03 AM	Bypass valve closed
7/28/2011	9:59:03 AM	Bubbler valve closed
7/28/2011	9:59:03 AM	Main Vac valve opened
7/28/2011	9:59:03 AM	Helium MFC set to  0.000000
7/28/2011	9:59:03 AM	H2 MFC set to  0.000000
7/28/2011	9:59:03 AM	BCl3 MFC set to  0.000000
7/28/2011	9:59:03 AM	PHl3 MFC set to  0.000000
7/28/2011	9:59:03 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:59:03 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:59:03 AM	Tube furnace set to 0
7/28/2011	9:59:33 AM	H2 valve closed
7/28/2011	9:59:33 AM	BCl3 valve closed
7/28/2011	9:59:33 AM	PH3 valve closed
7/28/2011	9:59:33 AM	SiCl4 pre valve closed
7/28/2011	9:59:33 AM	SiCl4 post valve closed
7/28/2011	9:59:33 AM	Bypass valve closed
7/28/2011	9:59:33 AM	Bubbler valve closed
7/28/2011	9:59:33 AM	Helium valve opened
7/28/2011	9:59:33 AM	Main Vac valve opened
7/28/2011	9:59:33 AM	Helium MFC set to  20.000000
7/28/2011	9:59:33 AM	H2 MFC set to  0.000000
7/28/2011	9:59:33 AM	BCl3 MFC set to  0.000000
7/28/2011	9:59:33 AM	PHl3 MFC set to  0.000000
7/28/2011	9:59:33 AM	SiCl4 MFC set to  0.000000
7/28/2011	9:59:33 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:59:33 AM	Tube furnace set to 0
7/28/2011	10:00:03 AM	Helium valve closed
7/28/2011	10:00:03 AM	H2 valve closed
7/28/2011	10:00:03 AM	BCl3 valve closed
7/28/2011	10:00:03 AM	PH3 valve closed
7/28/2011	10:00:03 AM	SiCl4 pre valve closed
7/28/2011	10:00:03 AM	SiCl4 post valve closed
7/28/2011	10:00:03 AM	Bypass valve closed
7/28/2011	10:00:03 AM	Bubbler valve closed
7/28/2011	10:00:03 AM	Main Vac valve opened
7/28/2011	10:00:03 AM	Helium MFC set to  0.000000
7/28/2011	10:00:03 AM	H2 MFC set to  0.000000
7/28/2011	10:00:03 AM	BCl3 MFC set to  0.000000
7/28/2011	10:00:03 AM	PHl3 MFC set to  0.000000
7/28/2011	10:00:03 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:00:03 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:00:04 AM	Tube furnace set to 0
7/28/2011	10:00:34 AM	H2 valve closed
7/28/2011	10:00:34 AM	BCl3 valve closed
7/28/2011	10:00:34 AM	PH3 valve closed
7/28/2011	10:00:34 AM	SiCl4 pre valve closed
7/28/2011	10:00:34 AM	SiCl4 post valve closed
7/28/2011	10:00:34 AM	Bypass valve closed
7/28/2011	10:00:34 AM	Bubbler valve closed
7/28/2011	10:00:34 AM	Helium valve opened
7/28/2011	10:00:34 AM	Main Vac valve opened
7/28/2011	10:00:34 AM	Helium MFC set to  20.000000
7/28/2011	10:00:34 AM	H2 MFC set to  0.000000
7/28/2011	10:00:34 AM	BCl3 MFC set to  0.000000
7/28/2011	10:00:34 AM	PHl3 MFC set to  0.000000
7/28/2011	10:00:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:00:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:00:34 AM	Tube furnace set to 0
7/28/2011	10:01:04 AM	Helium valve closed
7/28/2011	10:01:04 AM	H2 valve closed
7/28/2011	10:01:04 AM	BCl3 valve closed
7/28/2011	10:01:04 AM	PH3 valve closed
7/28/2011	10:01:04 AM	SiCl4 pre valve closed
7/28/2011	10:01:04 AM	SiCl4 post valve closed
7/28/2011	10:01:04 AM	Bypass valve closed
7/28/2011	10:01:04 AM	Bubbler valve closed
7/28/2011	10:01:04 AM	Main Vac valve opened
7/28/2011	10:01:04 AM	Helium MFC set to  0.000000
7/28/2011	10:01:04 AM	H2 MFC set to  0.000000
7/28/2011	10:01:04 AM	BCl3 MFC set to  0.000000
7/28/2011	10:01:04 AM	PHl3 MFC set to  0.000000
7/28/2011	10:01:04 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:01:04 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:01:04 AM	Tube furnace set to 0
7/28/2011	10:01:34 AM	H2 valve closed
7/28/2011	10:01:34 AM	BCl3 valve closed
7/28/2011	10:01:34 AM	PH3 valve closed
7/28/2011	10:01:34 AM	SiCl4 pre valve closed
7/28/2011	10:01:34 AM	SiCl4 post valve closed
7/28/2011	10:01:34 AM	Bypass valve closed
7/28/2011	10:01:34 AM	Bubbler valve closed
7/28/2011	10:01:34 AM	Helium valve opened
7/28/2011	10:01:34 AM	Main Vac valve opened
7/28/2011	10:01:34 AM	Helium MFC set to  20.000000
7/28/2011	10:01:34 AM	H2 MFC set to  0.000000
7/28/2011	10:01:34 AM	BCl3 MFC set to  0.000000
7/28/2011	10:01:34 AM	PHl3 MFC set to  0.000000
7/28/2011	10:01:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:01:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:01:34 AM	Tube furnace set to 0
7/28/2011	10:02:04 AM	Helium valve closed
7/28/2011	10:02:04 AM	H2 valve closed
7/28/2011	10:02:04 AM	BCl3 valve closed
7/28/2011	10:02:04 AM	PH3 valve closed
7/28/2011	10:02:04 AM	SiCl4 pre valve closed
7/28/2011	10:02:04 AM	SiCl4 post valve closed
7/28/2011	10:02:04 AM	Bypass valve closed
7/28/2011	10:02:04 AM	Bubbler valve closed
7/28/2011	10:02:04 AM	Main Vac valve opened
7/28/2011	10:02:04 AM	Helium MFC set to  0.000000
7/28/2011	10:02:04 AM	H2 MFC set to  0.000000
7/28/2011	10:02:04 AM	BCl3 MFC set to  0.000000
7/28/2011	10:02:04 AM	PHl3 MFC set to  0.000000
7/28/2011	10:02:04 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:02:04 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:02:04 AM	Tube furnace set to 0
7/28/2011	10:02:34 AM	H2 valve closed
7/28/2011	10:02:34 AM	BCl3 valve closed
7/28/2011	10:02:34 AM	PH3 valve closed
7/28/2011	10:02:34 AM	SiCl4 pre valve closed
7/28/2011	10:02:34 AM	SiCl4 post valve closed
7/28/2011	10:02:34 AM	Bypass valve closed
7/28/2011	10:02:34 AM	Bubbler valve closed
7/28/2011	10:02:34 AM	Helium valve opened
7/28/2011	10:02:34 AM	Main Vac valve opened
7/28/2011	10:02:34 AM	Helium MFC set to  20.000000
7/28/2011	10:02:34 AM	H2 MFC set to  0.000000
7/28/2011	10:02:34 AM	BCl3 MFC set to  0.000000
7/28/2011	10:02:34 AM	PHl3 MFC set to  0.000000
7/28/2011	10:02:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:02:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:02:35 AM	Tube furnace set to 0
7/28/2011	10:03:05 AM	Helium valve closed
7/28/2011	10:03:05 AM	H2 valve closed
7/28/2011	10:03:05 AM	BCl3 valve closed
7/28/2011	10:03:05 AM	PH3 valve closed
7/28/2011	10:03:05 AM	SiCl4 pre valve closed
7/28/2011	10:03:05 AM	SiCl4 post valve closed
7/28/2011	10:03:05 AM	Bypass valve closed
7/28/2011	10:03:05 AM	Bubbler valve closed
7/28/2011	10:03:05 AM	Main Vac valve opened
7/28/2011	10:03:05 AM	Helium MFC set to  0.000000
7/28/2011	10:03:05 AM	H2 MFC set to  0.000000
7/28/2011	10:03:05 AM	BCl3 MFC set to  0.000000
7/28/2011	10:03:05 AM	PHl3 MFC set to  0.000000
7/28/2011	10:03:05 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:03:05 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:03:05 AM	Tube furnace set to 0
7/28/2011	10:03:35 AM	H2 valve closed
7/28/2011	10:03:35 AM	BCl3 valve closed
7/28/2011	10:03:35 AM	PH3 valve closed
7/28/2011	10:03:35 AM	SiCl4 pre valve closed
7/28/2011	10:03:35 AM	SiCl4 post valve closed
7/28/2011	10:03:35 AM	Bypass valve closed
7/28/2011	10:03:35 AM	Bubbler valve closed
7/28/2011	10:03:35 AM	Helium valve opened
7/28/2011	10:03:35 AM	Main Vac valve opened
7/28/2011	10:03:35 AM	Helium MFC set to  20.000000
7/28/2011	10:03:35 AM	H2 MFC set to  0.000000
7/28/2011	10:03:35 AM	BCl3 MFC set to  0.000000
7/28/2011	10:03:35 AM	PHl3 MFC set to  0.000000
7/28/2011	10:03:35 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:03:35 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:03:35 AM	Tube furnace set to 0
7/28/2011	10:04:05 AM	Helium valve closed
7/28/2011	10:04:05 AM	H2 valve closed
7/28/2011	10:04:05 AM	BCl3 valve closed
7/28/2011	10:04:05 AM	PH3 valve closed
7/28/2011	10:04:05 AM	SiCl4 pre valve closed
7/28/2011	10:04:05 AM	SiCl4 post valve closed
7/28/2011	10:04:05 AM	Bypass valve closed
7/28/2011	10:04:05 AM	Bubbler valve closed
7/28/2011	10:04:05 AM	Main Vac valve opened
7/28/2011	10:04:05 AM	Helium MFC set to  0.000000
7/28/2011	10:04:05 AM	H2 MFC set to  0.000000
7/28/2011	10:04:05 AM	BCl3 MFC set to  0.000000
7/28/2011	10:04:05 AM	PHl3 MFC set to  0.000000
7/28/2011	10:04:05 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:04:05 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:04:05 AM	Tube furnace set to 0
7/28/2011	10:04:35 AM	H2 valve closed
7/28/2011	10:04:35 AM	BCl3 valve closed
7/28/2011	10:04:35 AM	PH3 valve closed
7/28/2011	10:04:35 AM	SiCl4 pre valve closed
7/28/2011	10:04:35 AM	SiCl4 post valve closed
7/28/2011	10:04:35 AM	Bypass valve closed
7/28/2011	10:04:35 AM	Bubbler valve closed
7/28/2011	10:04:35 AM	Helium valve opened
7/28/2011	10:04:35 AM	Main Vac valve opened
7/28/2011	10:04:35 AM	Helium MFC set to  20.000000
7/28/2011	10:04:35 AM	H2 MFC set to  0.000000
7/28/2011	10:04:35 AM	BCl3 MFC set to  0.000000
7/28/2011	10:04:35 AM	PHl3 MFC set to  0.000000
7/28/2011	10:04:35 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:04:35 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:04:35 AM	Tube furnace set to 0
7/28/2011	10:05:05 AM	Helium valve closed
7/28/2011	10:05:05 AM	H2 valve closed
7/28/2011	10:05:05 AM	BCl3 valve closed
7/28/2011	10:05:05 AM	PH3 valve closed
7/28/2011	10:05:05 AM	SiCl4 pre valve closed
7/28/2011	10:05:05 AM	SiCl4 post valve closed
7/28/2011	10:05:05 AM	Bypass valve closed
7/28/2011	10:05:05 AM	Bubbler valve closed
7/28/2011	10:05:05 AM	Main Vac valve opened
7/28/2011	10:05:05 AM	Helium MFC set to  0.000000
7/28/2011	10:05:05 AM	H2 MFC set to  0.000000
7/28/2011	10:05:05 AM	BCl3 MFC set to  0.000000
7/28/2011	10:05:05 AM	PHl3 MFC set to  0.000000
7/28/2011	10:05:05 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:05:05 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:05:06 AM	Tube furnace set to 0
7/28/2011	10:05:36 AM	H2 valve closed
7/28/2011	10:05:36 AM	BCl3 valve closed
7/28/2011	10:05:36 AM	PH3 valve closed
7/28/2011	10:05:36 AM	SiCl4 pre valve closed
7/28/2011	10:05:36 AM	SiCl4 post valve closed
7/28/2011	10:05:36 AM	Bypass valve closed
7/28/2011	10:05:36 AM	Bubbler valve closed
7/28/2011	10:05:36 AM	Helium valve opened
7/28/2011	10:05:36 AM	Main Vac valve opened
7/28/2011	10:05:36 AM	Helium MFC set to  20.000000
7/28/2011	10:05:36 AM	H2 MFC set to  0.000000
7/28/2011	10:05:36 AM	BCl3 MFC set to  0.000000
7/28/2011	10:05:36 AM	PHl3 MFC set to  0.000000
7/28/2011	10:05:36 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:05:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:05:36 AM	Tube furnace set to 0
7/28/2011	10:06:06 AM	Helium valve closed
7/28/2011	10:06:06 AM	H2 valve closed
7/28/2011	10:06:06 AM	BCl3 valve closed
7/28/2011	10:06:06 AM	PH3 valve closed
7/28/2011	10:06:06 AM	SiCl4 pre valve closed
7/28/2011	10:06:06 AM	SiCl4 post valve closed
7/28/2011	10:06:06 AM	Bypass valve closed
7/28/2011	10:06:06 AM	Bubbler valve closed
7/28/2011	10:06:06 AM	Main Vac valve opened
7/28/2011	10:06:06 AM	Helium MFC set to  0.000000
7/28/2011	10:06:06 AM	H2 MFC set to  0.000000
7/28/2011	10:06:06 AM	BCl3 MFC set to  0.000000
7/28/2011	10:06:06 AM	PHl3 MFC set to  0.000000
7/28/2011	10:06:06 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:06:06 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:06:06 AM	Tube furnace set to 0
7/28/2011	10:06:36 AM	H2 valve closed
7/28/2011	10:06:36 AM	BCl3 valve closed
7/28/2011	10:06:36 AM	PH3 valve closed
7/28/2011	10:06:36 AM	SiCl4 pre valve closed
7/28/2011	10:06:36 AM	SiCl4 post valve closed
7/28/2011	10:06:36 AM	Bypass valve closed
7/28/2011	10:06:36 AM	Bubbler valve closed
7/28/2011	10:06:36 AM	Helium valve opened
7/28/2011	10:06:36 AM	Main Vac valve opened
7/28/2011	10:06:36 AM	Helium MFC set to  20.000000
7/28/2011	10:06:36 AM	H2 MFC set to  0.000000
7/28/2011	10:06:36 AM	BCl3 MFC set to  0.000000
7/28/2011	10:06:36 AM	PHl3 MFC set to  0.000000
7/28/2011	10:06:36 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:06:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:06:36 AM	Tube furnace set to 0
7/28/2011	10:07:06 AM	Helium valve closed
7/28/2011	10:07:06 AM	H2 valve closed
7/28/2011	10:07:06 AM	BCl3 valve closed
7/28/2011	10:07:06 AM	PH3 valve closed
7/28/2011	10:07:06 AM	SiCl4 pre valve closed
7/28/2011	10:07:06 AM	SiCl4 post valve closed
7/28/2011	10:07:06 AM	Bypass valve closed
7/28/2011	10:07:06 AM	Bubbler valve closed
7/28/2011	10:07:06 AM	Main Vac valve opened
7/28/2011	10:07:06 AM	Helium MFC set to  0.000000
7/28/2011	10:07:06 AM	H2 MFC set to  0.000000
7/28/2011	10:07:06 AM	BCl3 MFC set to  0.000000
7/28/2011	10:07:06 AM	PHl3 MFC set to  0.000000
7/28/2011	10:07:06 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:07:06 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:07:07 AM	Tube furnace set to 0
7/28/2011	10:07:37 AM	H2 valve closed
7/28/2011	10:07:37 AM	BCl3 valve closed
7/28/2011	10:07:37 AM	PH3 valve closed
7/28/2011	10:07:37 AM	SiCl4 pre valve closed
7/28/2011	10:07:37 AM	SiCl4 post valve closed
7/28/2011	10:07:37 AM	Bypass valve closed
7/28/2011	10:07:37 AM	Bubbler valve closed
7/28/2011	10:07:37 AM	Helium valve opened
7/28/2011	10:07:37 AM	Main Vac valve opened
7/28/2011	10:07:37 AM	Helium MFC set to  20.000000
7/28/2011	10:07:37 AM	H2 MFC set to  0.000000
7/28/2011	10:07:37 AM	BCl3 MFC set to  0.000000
7/28/2011	10:07:37 AM	PHl3 MFC set to  0.000000
7/28/2011	10:07:37 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:07:37 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:07:37 AM	Tube furnace set to 0
7/28/2011	10:08:07 AM	Helium valve closed
7/28/2011	10:08:07 AM	H2 valve closed
7/28/2011	10:08:07 AM	BCl3 valve closed
7/28/2011	10:08:07 AM	PH3 valve closed
7/28/2011	10:08:07 AM	SiCl4 pre valve closed
7/28/2011	10:08:07 AM	SiCl4 post valve closed
7/28/2011	10:08:07 AM	Bypass valve closed
7/28/2011	10:08:07 AM	Bubbler valve closed
7/28/2011	10:08:07 AM	Main Vac valve opened
7/28/2011	10:08:07 AM	Helium MFC set to  0.000000
7/28/2011	10:08:07 AM	H2 MFC set to  0.000000
7/28/2011	10:08:07 AM	BCl3 MFC set to  0.000000
7/28/2011	10:08:07 AM	PHl3 MFC set to  0.000000
7/28/2011	10:08:07 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:08:07 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:08:07 AM	Tube furnace set to 0
7/28/2011	10:08:08 AM	Run finished at 10:08 AM
7/28/2011	10:08:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/28/2011	10:09:31 AM	Main Vac valve closed
7/28/2011	10:09:47 AM	Main Vac valve opened
7/28/2011	10:10:17 AM	Main Vac valve closed
7/28/2011	10:10:27 AM	Main Vac valve opened
7/28/2011	10:10:56 AM	Main Vac valve closed
7/28/2011	10:11:12 AM	Main Vac valve opened
7/28/2011	10:12:26 AM	Recipe started at 10:12 AM
7/28/2011	10:12:26 AM	Helium valve closed
7/28/2011	10:12:26 AM	H2 valve closed
7/28/2011	10:12:26 AM	BCl3 valve closed
7/28/2011	10:12:26 AM	PH3 valve closed
7/28/2011	10:12:26 AM	SiCl4 pre valve closed
7/28/2011	10:12:26 AM	SiCl4 post valve closed
7/28/2011	10:12:26 AM	Main Vac valve closed
7/28/2011	10:12:26 AM	Bypass valve closed
7/28/2011	10:12:26 AM	Bubbler valve closed
7/28/2011	10:12:26 AM	Helium MFC set to  0.000000
7/28/2011	10:12:26 AM	H2 MFC set to  0.000000
7/28/2011	10:12:26 AM	BCl3 MFC set to  0.000000
7/28/2011	10:12:26 AM	PHl3 MFC set to  0.000000
7/28/2011	10:12:26 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:12:26 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:12:26 AM	Tube furnace set to 0
7/28/2011	10:12:29 AM	Helium valve closed
7/28/2011	10:12:29 AM	BCl3 valve closed
7/28/2011	10:12:29 AM	PH3 valve closed
7/28/2011	10:12:29 AM	SiCl4 pre valve closed
7/28/2011	10:12:29 AM	SiCl4 post valve closed
7/28/2011	10:12:29 AM	Main Vac valve closed
7/28/2011	10:12:29 AM	Bypass valve closed
7/28/2011	10:12:29 AM	Bubbler valve closed
7/28/2011	10:12:29 AM	H2 valve opened
7/28/2011	10:12:29 AM	Helium MFC set to  0.000000
7/28/2011	10:12:29 AM	H2 MFC set to  500.000000
7/28/2011	10:12:29 AM	BCl3 MFC set to  0.000000
7/28/2011	10:12:29 AM	PHl3 MFC set to  0.000000
7/28/2011	10:12:29 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:12:29 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:12:29 AM	Tube furnace set to 0
7/28/2011	10:13:32 AM	Helium valve closed
7/28/2011	10:13:32 AM	BCl3 valve closed
7/28/2011	10:13:32 AM	PH3 valve closed
7/28/2011	10:13:32 AM	SiCl4 pre valve closed
7/28/2011	10:13:32 AM	SiCl4 post valve closed
7/28/2011	10:13:32 AM	Main Vac valve closed
7/28/2011	10:13:32 AM	Bypass valve closed
7/28/2011	10:13:32 AM	H2 valve opened
7/28/2011	10:13:32 AM	Bubbler valve opened
7/28/2011	10:13:32 AM	Helium MFC set to  0.000000
7/28/2011	10:13:32 AM	H2 MFC set to  500.000000
7/28/2011	10:13:32 AM	BCl3 MFC set to  0.000000
7/28/2011	10:13:32 AM	PHl3 MFC set to  0.000000
7/28/2011	10:13:32 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:13:32 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:13:33 AM	Tube furnace set to 0
7/28/2011	10:13:34 AM	Helium valve closed
7/28/2011	10:13:34 AM	BCl3 valve closed
7/28/2011	10:13:34 AM	PH3 valve closed
7/28/2011	10:13:34 AM	SiCl4 pre valve closed
7/28/2011	10:13:34 AM	SiCl4 post valve closed
7/28/2011	10:13:34 AM	Main Vac valve closed
7/28/2011	10:13:34 AM	Bypass valve closed
7/28/2011	10:13:34 AM	H2 valve opened
7/28/2011	10:13:34 AM	Bubbler valve opened
7/28/2011	10:13:34 AM	Helium MFC set to  0.000000
7/28/2011	10:13:34 AM	H2 MFC set to  500.000000
7/28/2011	10:13:34 AM	BCl3 MFC set to  0.000000
7/28/2011	10:13:34 AM	PHl3 MFC set to  0.000000
7/28/2011	10:13:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:13:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:13:34 AM	Tube furnace set to 1000
7/28/2011	10:33:34 AM	Helium valve closed
7/28/2011	10:33:34 AM	BCl3 valve closed
7/28/2011	10:33:34 AM	PH3 valve closed
7/28/2011	10:33:34 AM	Main Vac valve closed
7/28/2011	10:33:34 AM	Bypass valve closed
7/28/2011	10:33:34 AM	H2 valve opened
7/28/2011	10:33:34 AM	SiCl4 pre valve opened
7/28/2011	10:33:34 AM	SiCl4 post valve opened
7/28/2011	10:33:34 AM	Bubbler valve opened
7/28/2011	10:33:34 AM	Helium MFC set to  0.000000
7/28/2011	10:33:34 AM	H2 MFC set to  500.000000
7/28/2011	10:33:34 AM	BCl3 MFC set to  0.000000
7/28/2011	10:33:34 AM	PHl3 MFC set to  0.000000
7/28/2011	10:33:34 AM	SiCl4 MFC set to  50.000000
7/28/2011	10:33:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:33:34 AM	Tube furnace set to 1000
7/28/2011	10:49:34 AM	Helium valve closed
7/28/2011	10:49:34 AM	BCl3 valve closed
7/28/2011	10:49:34 AM	PH3 valve closed
7/28/2011	10:49:34 AM	SiCl4 pre valve closed
7/28/2011	10:49:34 AM	SiCl4 post valve closed
7/28/2011	10:49:34 AM	Main Vac valve closed
7/28/2011	10:49:34 AM	Bypass valve closed
7/28/2011	10:49:34 AM	H2 valve opened
7/28/2011	10:49:34 AM	Bubbler valve opened
7/28/2011	10:49:34 AM	Helium MFC set to  0.000000
7/28/2011	10:49:34 AM	H2 MFC set to  500.000000
7/28/2011	10:49:34 AM	BCl3 MFC set to  0.000000
7/28/2011	10:49:34 AM	PHl3 MFC set to  0.000000
7/28/2011	10:49:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:49:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:49:34 AM	Tube furnace set to 750
7/28/2011	10:54:34 AM	H2 valve closed
7/28/2011	10:54:34 AM	BCl3 valve closed
7/28/2011	10:54:34 AM	PH3 valve closed
7/28/2011	10:54:34 AM	SiCl4 pre valve closed
7/28/2011	10:54:34 AM	SiCl4 post valve closed
7/28/2011	10:54:34 AM	Main Vac valve closed
7/28/2011	10:54:34 AM	Bypass valve closed
7/28/2011	10:54:34 AM	Helium valve opened
7/28/2011	10:54:34 AM	Bubbler valve opened
7/28/2011	10:54:34 AM	Helium MFC set to  500.000000
7/28/2011	10:54:34 AM	H2 MFC set to  0.000000
7/28/2011	10:54:34 AM	BCl3 MFC set to  0.000000
7/28/2011	10:54:34 AM	PHl3 MFC set to  0.000000
7/28/2011	10:54:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	10:54:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:54:34 AM	Tube furnace set to 0
7/28/2011	11:14:34 AM	Helium valve closed
7/28/2011	11:14:34 AM	H2 valve closed
7/28/2011	11:14:34 AM	BCl3 valve closed
7/28/2011	11:14:34 AM	PH3 valve closed
7/28/2011	11:14:34 AM	SiCl4 pre valve closed
7/28/2011	11:14:34 AM	SiCl4 post valve closed
7/28/2011	11:14:34 AM	Main Vac valve closed
7/28/2011	11:14:34 AM	Bypass valve closed
7/28/2011	11:14:34 AM	Bubbler valve closed
7/28/2011	11:14:34 AM	Helium MFC set to  0.000000
7/28/2011	11:14:34 AM	H2 MFC set to  0.000000
7/28/2011	11:14:34 AM	BCl3 MFC set to  0.000000
7/28/2011	11:14:34 AM	PHl3 MFC set to  0.000000
7/28/2011	11:14:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:14:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:14:34 AM	Tube furnace set to 0
7/28/2011	11:14:35 AM	Run finished at 11:14 AM
7/28/2011	11:32:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	11:32:09 AM	Recipe started at 11:32 AM
7/28/2011	11:32:09 AM	Helium valve closed
7/28/2011	11:32:09 AM	H2 valve closed
7/28/2011	11:32:09 AM	BCl3 valve closed
7/28/2011	11:32:09 AM	PH3 valve closed
7/28/2011	11:32:09 AM	SiCl4 pre valve closed
7/28/2011	11:32:09 AM	SiCl4 post valve closed
7/28/2011	11:32:09 AM	Main Vac valve closed
7/28/2011	11:32:09 AM	Bubbler valve closed
7/28/2011	11:32:09 AM	Bypass valve opened
7/28/2011	11:32:09 AM	Helium MFC set to  0.000000
7/28/2011	11:32:09 AM	H2 MFC set to  0.000000
7/28/2011	11:32:09 AM	BCl3 MFC set to  0.000000
7/28/2011	11:32:09 AM	PHl3 MFC set to  0.000000
7/28/2011	11:32:09 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:32:09 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:32:09 AM	Tube furnace set to 0
7/28/2011	11:33:18 AM	Helium valve closed
7/28/2011	11:33:18 AM	H2 valve closed
7/28/2011	11:33:18 AM	BCl3 valve closed
7/28/2011	11:33:18 AM	PH3 valve closed
7/28/2011	11:33:18 AM	SiCl4 pre valve closed
7/28/2011	11:33:18 AM	SiCl4 post valve closed
7/28/2011	11:33:18 AM	Main Vac valve closed
7/28/2011	11:33:18 AM	Bubbler valve closed
7/28/2011	11:33:18 AM	Bypass valve opened
7/28/2011	11:33:18 AM	Helium MFC set to  0.000000
7/28/2011	11:33:18 AM	H2 MFC set to  0.000000
7/28/2011	11:33:18 AM	BCl3 MFC set to  0.000000
7/28/2011	11:33:18 AM	PHl3 MFC set to  0.000000
7/28/2011	11:33:18 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:33:18 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:33:18 AM	Tube furnace set to 0
7/28/2011	11:34:18 AM	Helium valve closed
7/28/2011	11:34:18 AM	H2 valve closed
7/28/2011	11:34:18 AM	BCl3 valve closed
7/28/2011	11:34:18 AM	PH3 valve closed
7/28/2011	11:34:18 AM	SiCl4 pre valve closed
7/28/2011	11:34:18 AM	SiCl4 post valve closed
7/28/2011	11:34:18 AM	Bypass valve closed
7/28/2011	11:34:18 AM	Bubbler valve closed
7/28/2011	11:34:18 AM	Main Vac valve opened
7/28/2011	11:34:18 AM	Helium MFC set to  0.000000
7/28/2011	11:34:18 AM	H2 MFC set to  0.000000
7/28/2011	11:34:18 AM	BCl3 MFC set to  0.000000
7/28/2011	11:34:18 AM	PHl3 MFC set to  0.000000
7/28/2011	11:34:18 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:34:18 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:34:18 AM	Tube furnace set to 0
7/28/2011	11:34:19 AM	Run finished at 11:34 AM
7/28/2011	11:34:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	11:34:38 AM	Tube furnace set to 250
7/28/2011	11:36:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/28/2011	11:37:03 AM	Recipe started at 11:36 AM
7/28/2011	11:37:03 AM	Helium valve closed
7/28/2011	11:37:03 AM	H2 valve closed
7/28/2011	11:37:03 AM	BCl3 valve closed
7/28/2011	11:37:03 AM	PH3 valve closed
7/28/2011	11:37:03 AM	SiCl4 pre valve closed
7/28/2011	11:37:03 AM	SiCl4 post valve closed
7/28/2011	11:37:03 AM	Main Vac valve closed
7/28/2011	11:37:03 AM	Bubbler valve closed
7/28/2011	11:37:03 AM	Bypass valve opened
7/28/2011	11:37:03 AM	Helium MFC set to  0.000000
7/28/2011	11:37:03 AM	H2 MFC set to  0.000000
7/28/2011	11:37:03 AM	BCl3 MFC set to  0.000000
7/28/2011	11:37:03 AM	PHl3 MFC set to  0.000000
7/28/2011	11:37:03 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:37:03 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:37:03 AM	Tube furnace set to 0
7/28/2011	11:37:03 AM	Helium valve closed
7/28/2011	11:37:03 AM	H2 valve closed
7/28/2011	11:37:03 AM	BCl3 valve closed
7/28/2011	11:37:03 AM	PH3 valve closed
7/28/2011	11:37:03 AM	SiCl4 pre valve closed
7/28/2011	11:37:03 AM	SiCl4 post valve closed
7/28/2011	11:37:03 AM	Main Vac valve closed
7/28/2011	11:37:03 AM	Bubbler valve closed
7/28/2011	11:37:03 AM	Bypass valve opened
7/28/2011	11:37:03 AM	Helium MFC set to  0.000000
7/28/2011	11:37:03 AM	H2 MFC set to  0.000000
7/28/2011	11:37:03 AM	BCl3 MFC set to  0.000000
7/28/2011	11:37:03 AM	PHl3 MFC set to  0.000000
7/28/2011	11:37:03 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:37:03 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:37:03 AM	Tube furnace set to 0
7/28/2011	11:37:33 AM	Helium valve closed
7/28/2011	11:37:33 AM	H2 valve closed
7/28/2011	11:37:33 AM	BCl3 valve closed
7/28/2011	11:37:33 AM	PH3 valve closed
7/28/2011	11:37:33 AM	SiCl4 pre valve closed
7/28/2011	11:37:33 AM	SiCl4 post valve closed
7/28/2011	11:37:33 AM	Bypass valve closed
7/28/2011	11:37:33 AM	Bubbler valve closed
7/28/2011	11:37:33 AM	Main Vac valve opened
7/28/2011	11:37:33 AM	Helium MFC set to  0.000000
7/28/2011	11:37:33 AM	H2 MFC set to  0.000000
7/28/2011	11:37:33 AM	BCl3 MFC set to  0.000000
7/28/2011	11:37:33 AM	PHl3 MFC set to  0.000000
7/28/2011	11:37:33 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:37:33 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:37:33 AM	Tube furnace set to 0
7/28/2011	11:38:03 AM	H2 valve closed
7/28/2011	11:38:03 AM	BCl3 valve closed
7/28/2011	11:38:03 AM	PH3 valve closed
7/28/2011	11:38:03 AM	SiCl4 pre valve closed
7/28/2011	11:38:03 AM	SiCl4 post valve closed
7/28/2011	11:38:03 AM	Bypass valve closed
7/28/2011	11:38:03 AM	Bubbler valve closed
7/28/2011	11:38:03 AM	Helium valve opened
7/28/2011	11:38:03 AM	Main Vac valve opened
7/28/2011	11:38:04 AM	Helium MFC set to  20.000000
7/28/2011	11:38:04 AM	H2 MFC set to  0.000000
7/28/2011	11:38:04 AM	BCl3 MFC set to  0.000000
7/28/2011	11:38:04 AM	PHl3 MFC set to  0.000000
7/28/2011	11:38:04 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:38:04 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:38:04 AM	Tube furnace set to 0
7/28/2011	11:38:34 AM	Helium valve closed
7/28/2011	11:38:34 AM	H2 valve closed
7/28/2011	11:38:34 AM	BCl3 valve closed
7/28/2011	11:38:34 AM	PH3 valve closed
7/28/2011	11:38:34 AM	SiCl4 pre valve closed
7/28/2011	11:38:34 AM	SiCl4 post valve closed
7/28/2011	11:38:34 AM	Bypass valve closed
7/28/2011	11:38:34 AM	Bubbler valve closed
7/28/2011	11:38:34 AM	Main Vac valve opened
7/28/2011	11:38:34 AM	Helium MFC set to  0.000000
7/28/2011	11:38:34 AM	H2 MFC set to  0.000000
7/28/2011	11:38:34 AM	BCl3 MFC set to  0.000000
7/28/2011	11:38:34 AM	PHl3 MFC set to  0.000000
7/28/2011	11:38:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:38:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:38:34 AM	Tube furnace set to 0
7/28/2011	11:39:04 AM	H2 valve closed
7/28/2011	11:39:04 AM	BCl3 valve closed
7/28/2011	11:39:04 AM	PH3 valve closed
7/28/2011	11:39:04 AM	SiCl4 pre valve closed
7/28/2011	11:39:04 AM	SiCl4 post valve closed
7/28/2011	11:39:04 AM	Bypass valve closed
7/28/2011	11:39:04 AM	Bubbler valve closed
7/28/2011	11:39:04 AM	Helium valve opened
7/28/2011	11:39:04 AM	Main Vac valve opened
7/28/2011	11:39:04 AM	Helium MFC set to  20.000000
7/28/2011	11:39:04 AM	H2 MFC set to  0.000000
7/28/2011	11:39:04 AM	BCl3 MFC set to  0.000000
7/28/2011	11:39:04 AM	PHl3 MFC set to  0.000000
7/28/2011	11:39:04 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:39:04 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:39:04 AM	Tube furnace set to 0
7/28/2011	11:39:34 AM	Helium valve closed
7/28/2011	11:39:34 AM	H2 valve closed
7/28/2011	11:39:34 AM	BCl3 valve closed
7/28/2011	11:39:34 AM	PH3 valve closed
7/28/2011	11:39:34 AM	SiCl4 pre valve closed
7/28/2011	11:39:34 AM	SiCl4 post valve closed
7/28/2011	11:39:34 AM	Bypass valve closed
7/28/2011	11:39:34 AM	Bubbler valve closed
7/28/2011	11:39:34 AM	Main Vac valve opened
7/28/2011	11:39:34 AM	Helium MFC set to  0.000000
7/28/2011	11:39:34 AM	H2 MFC set to  0.000000
7/28/2011	11:39:34 AM	BCl3 MFC set to  0.000000
7/28/2011	11:39:34 AM	PHl3 MFC set to  0.000000
7/28/2011	11:39:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:39:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:39:34 AM	Tube furnace set to 0
7/28/2011	11:40:04 AM	H2 valve closed
7/28/2011	11:40:04 AM	BCl3 valve closed
7/28/2011	11:40:04 AM	PH3 valve closed
7/28/2011	11:40:04 AM	SiCl4 pre valve closed
7/28/2011	11:40:04 AM	SiCl4 post valve closed
7/28/2011	11:40:04 AM	Bypass valve closed
7/28/2011	11:40:04 AM	Bubbler valve closed
7/28/2011	11:40:04 AM	Helium valve opened
7/28/2011	11:40:04 AM	Main Vac valve opened
7/28/2011	11:40:04 AM	Helium MFC set to  20.000000
7/28/2011	11:40:04 AM	H2 MFC set to  0.000000
7/28/2011	11:40:04 AM	BCl3 MFC set to  0.000000
7/28/2011	11:40:04 AM	PHl3 MFC set to  0.000000
7/28/2011	11:40:04 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:40:04 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:40:04 AM	Tube furnace set to 0
7/28/2011	11:40:34 AM	Helium valve closed
7/28/2011	11:40:34 AM	H2 valve closed
7/28/2011	11:40:34 AM	BCl3 valve closed
7/28/2011	11:40:34 AM	PH3 valve closed
7/28/2011	11:40:34 AM	SiCl4 pre valve closed
7/28/2011	11:40:34 AM	SiCl4 post valve closed
7/28/2011	11:40:34 AM	Bypass valve closed
7/28/2011	11:40:34 AM	Bubbler valve closed
7/28/2011	11:40:34 AM	Main Vac valve opened
7/28/2011	11:40:34 AM	Helium MFC set to  0.000000
7/28/2011	11:40:34 AM	H2 MFC set to  0.000000
7/28/2011	11:40:34 AM	BCl3 MFC set to  0.000000
7/28/2011	11:40:34 AM	PHl3 MFC set to  0.000000
7/28/2011	11:40:34 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:40:34 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:40:35 AM	Tube furnace set to 0
7/28/2011	11:41:05 AM	H2 valve closed
7/28/2011	11:41:05 AM	BCl3 valve closed
7/28/2011	11:41:05 AM	PH3 valve closed
7/28/2011	11:41:05 AM	SiCl4 pre valve closed
7/28/2011	11:41:05 AM	SiCl4 post valve closed
7/28/2011	11:41:05 AM	Bypass valve closed
7/28/2011	11:41:05 AM	Bubbler valve closed
7/28/2011	11:41:05 AM	Helium valve opened
7/28/2011	11:41:05 AM	Main Vac valve opened
7/28/2011	11:41:05 AM	Helium MFC set to  20.000000
7/28/2011	11:41:05 AM	H2 MFC set to  0.000000
7/28/2011	11:41:05 AM	BCl3 MFC set to  0.000000
7/28/2011	11:41:05 AM	PHl3 MFC set to  0.000000
7/28/2011	11:41:05 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:41:05 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:41:05 AM	Tube furnace set to 0
7/28/2011	11:41:35 AM	Helium valve closed
7/28/2011	11:41:35 AM	H2 valve closed
7/28/2011	11:41:35 AM	BCl3 valve closed
7/28/2011	11:41:35 AM	PH3 valve closed
7/28/2011	11:41:35 AM	SiCl4 pre valve closed
7/28/2011	11:41:35 AM	SiCl4 post valve closed
7/28/2011	11:41:35 AM	Bypass valve closed
7/28/2011	11:41:35 AM	Bubbler valve closed
7/28/2011	11:41:35 AM	Main Vac valve opened
7/28/2011	11:41:35 AM	Helium MFC set to  0.000000
7/28/2011	11:41:35 AM	H2 MFC set to  0.000000
7/28/2011	11:41:35 AM	BCl3 MFC set to  0.000000
7/28/2011	11:41:35 AM	PHl3 MFC set to  0.000000
7/28/2011	11:41:35 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:41:35 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:41:35 AM	Tube furnace set to 0
7/28/2011	11:42:05 AM	H2 valve closed
7/28/2011	11:42:05 AM	BCl3 valve closed
7/28/2011	11:42:05 AM	PH3 valve closed
7/28/2011	11:42:05 AM	SiCl4 pre valve closed
7/28/2011	11:42:05 AM	SiCl4 post valve closed
7/28/2011	11:42:05 AM	Bypass valve closed
7/28/2011	11:42:05 AM	Bubbler valve closed
7/28/2011	11:42:05 AM	Helium valve opened
7/28/2011	11:42:05 AM	Main Vac valve opened
7/28/2011	11:42:05 AM	Helium MFC set to  20.000000
7/28/2011	11:42:05 AM	H2 MFC set to  0.000000
7/28/2011	11:42:05 AM	BCl3 MFC set to  0.000000
7/28/2011	11:42:05 AM	PHl3 MFC set to  0.000000
7/28/2011	11:42:05 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:42:05 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:42:05 AM	Tube furnace set to 0
7/28/2011	11:42:35 AM	Helium valve closed
7/28/2011	11:42:35 AM	H2 valve closed
7/28/2011	11:42:35 AM	BCl3 valve closed
7/28/2011	11:42:35 AM	PH3 valve closed
7/28/2011	11:42:35 AM	SiCl4 pre valve closed
7/28/2011	11:42:35 AM	SiCl4 post valve closed
7/28/2011	11:42:35 AM	Bypass valve closed
7/28/2011	11:42:35 AM	Bubbler valve closed
7/28/2011	11:42:35 AM	Main Vac valve opened
7/28/2011	11:42:35 AM	Helium MFC set to  0.000000
7/28/2011	11:42:35 AM	H2 MFC set to  0.000000
7/28/2011	11:42:35 AM	BCl3 MFC set to  0.000000
7/28/2011	11:42:35 AM	PHl3 MFC set to  0.000000
7/28/2011	11:42:35 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:42:35 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:42:35 AM	Tube furnace set to 0
7/28/2011	11:43:05 AM	H2 valve closed
7/28/2011	11:43:05 AM	BCl3 valve closed
7/28/2011	11:43:05 AM	PH3 valve closed
7/28/2011	11:43:05 AM	SiCl4 pre valve closed
7/28/2011	11:43:05 AM	SiCl4 post valve closed
7/28/2011	11:43:05 AM	Bypass valve closed
7/28/2011	11:43:05 AM	Bubbler valve closed
7/28/2011	11:43:05 AM	Helium valve opened
7/28/2011	11:43:05 AM	Main Vac valve opened
7/28/2011	11:43:05 AM	Helium MFC set to  20.000000
7/28/2011	11:43:05 AM	H2 MFC set to  0.000000
7/28/2011	11:43:05 AM	BCl3 MFC set to  0.000000
7/28/2011	11:43:05 AM	PHl3 MFC set to  0.000000
7/28/2011	11:43:05 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:43:05 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:43:06 AM	Tube furnace set to 0
7/28/2011	11:43:36 AM	Helium valve closed
7/28/2011	11:43:36 AM	H2 valve closed
7/28/2011	11:43:36 AM	BCl3 valve closed
7/28/2011	11:43:36 AM	PH3 valve closed
7/28/2011	11:43:36 AM	SiCl4 pre valve closed
7/28/2011	11:43:36 AM	SiCl4 post valve closed
7/28/2011	11:43:36 AM	Bypass valve closed
7/28/2011	11:43:36 AM	Bubbler valve closed
7/28/2011	11:43:36 AM	Main Vac valve opened
7/28/2011	11:43:36 AM	Helium MFC set to  0.000000
7/28/2011	11:43:36 AM	H2 MFC set to  0.000000
7/28/2011	11:43:36 AM	BCl3 MFC set to  0.000000
7/28/2011	11:43:36 AM	PHl3 MFC set to  0.000000
7/28/2011	11:43:36 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:43:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:43:36 AM	Tube furnace set to 0
7/28/2011	11:44:06 AM	H2 valve closed
7/28/2011	11:44:06 AM	BCl3 valve closed
7/28/2011	11:44:06 AM	PH3 valve closed
7/28/2011	11:44:06 AM	SiCl4 pre valve closed
7/28/2011	11:44:06 AM	SiCl4 post valve closed
7/28/2011	11:44:06 AM	Bypass valve closed
7/28/2011	11:44:06 AM	Bubbler valve closed
7/28/2011	11:44:06 AM	Helium valve opened
7/28/2011	11:44:06 AM	Main Vac valve opened
7/28/2011	11:44:06 AM	Helium MFC set to  20.000000
7/28/2011	11:44:06 AM	H2 MFC set to  0.000000
7/28/2011	11:44:06 AM	BCl3 MFC set to  0.000000
7/28/2011	11:44:06 AM	PHl3 MFC set to  0.000000
7/28/2011	11:44:06 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:44:06 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:44:06 AM	Tube furnace set to 0
7/28/2011	11:44:36 AM	Helium valve closed
7/28/2011	11:44:36 AM	H2 valve closed
7/28/2011	11:44:36 AM	BCl3 valve closed
7/28/2011	11:44:36 AM	PH3 valve closed
7/28/2011	11:44:36 AM	SiCl4 pre valve closed
7/28/2011	11:44:36 AM	SiCl4 post valve closed
7/28/2011	11:44:36 AM	Bypass valve closed
7/28/2011	11:44:36 AM	Bubbler valve closed
7/28/2011	11:44:36 AM	Main Vac valve opened
7/28/2011	11:44:36 AM	Helium MFC set to  0.000000
7/28/2011	11:44:36 AM	H2 MFC set to  0.000000
7/28/2011	11:44:36 AM	BCl3 MFC set to  0.000000
7/28/2011	11:44:36 AM	PHl3 MFC set to  0.000000
7/28/2011	11:44:36 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:44:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:44:36 AM	Tube furnace set to 0
7/28/2011	11:45:06 AM	H2 valve closed
7/28/2011	11:45:06 AM	BCl3 valve closed
7/28/2011	11:45:06 AM	PH3 valve closed
7/28/2011	11:45:06 AM	SiCl4 pre valve closed
7/28/2011	11:45:06 AM	SiCl4 post valve closed
7/28/2011	11:45:06 AM	Bypass valve closed
7/28/2011	11:45:06 AM	Bubbler valve closed
7/28/2011	11:45:06 AM	Helium valve opened
7/28/2011	11:45:06 AM	Main Vac valve opened
7/28/2011	11:45:06 AM	Helium MFC set to  20.000000
7/28/2011	11:45:06 AM	H2 MFC set to  0.000000
7/28/2011	11:45:06 AM	BCl3 MFC set to  0.000000
7/28/2011	11:45:06 AM	PHl3 MFC set to  0.000000
7/28/2011	11:45:06 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:45:06 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:45:06 AM	Tube furnace set to 0
7/28/2011	11:45:36 AM	Helium valve closed
7/28/2011	11:45:36 AM	H2 valve closed
7/28/2011	11:45:36 AM	BCl3 valve closed
7/28/2011	11:45:36 AM	PH3 valve closed
7/28/2011	11:45:36 AM	SiCl4 pre valve closed
7/28/2011	11:45:36 AM	SiCl4 post valve closed
7/28/2011	11:45:36 AM	Bypass valve closed
7/28/2011	11:45:36 AM	Bubbler valve closed
7/28/2011	11:45:36 AM	Main Vac valve opened
7/28/2011	11:45:36 AM	Helium MFC set to  0.000000
7/28/2011	11:45:36 AM	H2 MFC set to  0.000000
7/28/2011	11:45:36 AM	BCl3 MFC set to  0.000000
7/28/2011	11:45:36 AM	PHl3 MFC set to  0.000000
7/28/2011	11:45:36 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:45:36 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:45:37 AM	Tube furnace set to 0
7/28/2011	11:46:07 AM	H2 valve closed
7/28/2011	11:46:07 AM	BCl3 valve closed
7/28/2011	11:46:07 AM	PH3 valve closed
7/28/2011	11:46:07 AM	SiCl4 pre valve closed
7/28/2011	11:46:07 AM	SiCl4 post valve closed
7/28/2011	11:46:07 AM	Bypass valve closed
7/28/2011	11:46:07 AM	Bubbler valve closed
7/28/2011	11:46:07 AM	Helium valve opened
7/28/2011	11:46:07 AM	Main Vac valve opened
7/28/2011	11:46:07 AM	Helium MFC set to  20.000000
7/28/2011	11:46:07 AM	H2 MFC set to  0.000000
7/28/2011	11:46:07 AM	BCl3 MFC set to  0.000000
7/28/2011	11:46:07 AM	PHl3 MFC set to  0.000000
7/28/2011	11:46:07 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:46:07 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:46:07 AM	Tube furnace set to 0
7/28/2011	11:46:37 AM	Helium valve closed
7/28/2011	11:46:37 AM	H2 valve closed
7/28/2011	11:46:37 AM	BCl3 valve closed
7/28/2011	11:46:37 AM	PH3 valve closed
7/28/2011	11:46:37 AM	SiCl4 pre valve closed
7/28/2011	11:46:37 AM	SiCl4 post valve closed
7/28/2011	11:46:37 AM	Bypass valve closed
7/28/2011	11:46:37 AM	Bubbler valve closed
7/28/2011	11:46:37 AM	Main Vac valve opened
7/28/2011	11:46:37 AM	Helium MFC set to  0.000000
7/28/2011	11:46:37 AM	H2 MFC set to  0.000000
7/28/2011	11:46:37 AM	BCl3 MFC set to  0.000000
7/28/2011	11:46:37 AM	PHl3 MFC set to  0.000000
7/28/2011	11:46:37 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:46:37 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:46:37 AM	Tube furnace set to 0
7/28/2011	11:47:07 AM	H2 valve closed
7/28/2011	11:47:07 AM	BCl3 valve closed
7/28/2011	11:47:07 AM	PH3 valve closed
7/28/2011	11:47:07 AM	SiCl4 pre valve closed
7/28/2011	11:47:07 AM	SiCl4 post valve closed
7/28/2011	11:47:07 AM	Bypass valve closed
7/28/2011	11:47:07 AM	Bubbler valve closed
7/28/2011	11:47:07 AM	Helium valve opened
7/28/2011	11:47:07 AM	Main Vac valve opened
7/28/2011	11:47:07 AM	Helium MFC set to  20.000000
7/28/2011	11:47:07 AM	H2 MFC set to  0.000000
7/28/2011	11:47:07 AM	BCl3 MFC set to  0.000000
7/28/2011	11:47:07 AM	PHl3 MFC set to  0.000000
7/28/2011	11:47:07 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:47:07 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:47:07 AM	Tube furnace set to 0
7/28/2011	11:47:37 AM	Helium valve closed
7/28/2011	11:47:37 AM	H2 valve closed
7/28/2011	11:47:37 AM	BCl3 valve closed
7/28/2011	11:47:37 AM	PH3 valve closed
7/28/2011	11:47:37 AM	SiCl4 pre valve closed
7/28/2011	11:47:37 AM	SiCl4 post valve closed
7/28/2011	11:47:37 AM	Bypass valve closed
7/28/2011	11:47:37 AM	Bubbler valve closed
7/28/2011	11:47:37 AM	Main Vac valve opened
7/28/2011	11:47:37 AM	Helium MFC set to  0.000000
7/28/2011	11:47:37 AM	H2 MFC set to  0.000000
7/28/2011	11:47:37 AM	BCl3 MFC set to  0.000000
7/28/2011	11:47:37 AM	PHl3 MFC set to  0.000000
7/28/2011	11:47:37 AM	SiCl4 MFC set to  0.000000
7/28/2011	11:47:37 AM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:47:37 AM	Tube furnace set to 0
7/28/2011	11:47:38 AM	Run finished at 11:47 AM
7/28/2011	11:47:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/28/2011	11:51:59 AM	Main Vac valve closed
7/28/2011	11:52:04 AM	Main Vac valve opened
7/28/2011	11:52:27 AM	Main Vac valve closed
7/28/2011	11:52:34 AM	Main Vac valve opened
7/28/2011	11:58:19 AM	Main Vac valve closed
7/28/2011	11:58:26 AM	Main Vac valve opened
7/28/2011	12:10:24 PM	Recipe started at 12:10 PM
7/28/2011	12:10:24 PM	Helium valve closed
7/28/2011	12:10:24 PM	H2 valve closed
7/28/2011	12:10:24 PM	BCl3 valve closed
7/28/2011	12:10:24 PM	PH3 valve closed
7/28/2011	12:10:24 PM	SiCl4 pre valve closed
7/28/2011	12:10:24 PM	SiCl4 post valve closed
7/28/2011	12:10:24 PM	Main Vac valve closed
7/28/2011	12:10:24 PM	Bypass valve closed
7/28/2011	12:10:24 PM	Bubbler valve closed
7/28/2011	12:10:24 PM	Helium MFC set to  0.000000
7/28/2011	12:10:24 PM	H2 MFC set to  0.000000
7/28/2011	12:10:24 PM	BCl3 MFC set to  0.000000
7/28/2011	12:10:24 PM	PHl3 MFC set to  0.000000
7/28/2011	12:10:24 PM	SiCl4 MFC set to  0.000000
7/28/2011	12:10:24 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	12:10:24 PM	Tube furnace set to 0
7/28/2011	12:10:27 PM	Helium valve closed
7/28/2011	12:10:27 PM	BCl3 valve closed
7/28/2011	12:10:27 PM	PH3 valve closed
7/28/2011	12:10:27 PM	SiCl4 pre valve closed
7/28/2011	12:10:27 PM	SiCl4 post valve closed
7/28/2011	12:10:27 PM	Main Vac valve closed
7/28/2011	12:10:27 PM	Bypass valve closed
7/28/2011	12:10:27 PM	Bubbler valve closed
7/28/2011	12:10:27 PM	H2 valve opened
7/28/2011	12:10:27 PM	Helium MFC set to  0.000000
7/28/2011	12:10:27 PM	H2 MFC set to  500.000000
7/28/2011	12:10:27 PM	BCl3 MFC set to  0.000000
7/28/2011	12:10:27 PM	PHl3 MFC set to  0.000000
7/28/2011	12:10:27 PM	SiCl4 MFC set to  0.000000
7/28/2011	12:10:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	12:10:27 PM	Tube furnace set to 0
7/28/2011	12:11:33 PM	Helium valve closed
7/28/2011	12:11:33 PM	BCl3 valve closed
7/28/2011	12:11:33 PM	PH3 valve closed
7/28/2011	12:11:33 PM	SiCl4 pre valve closed
7/28/2011	12:11:33 PM	SiCl4 post valve closed
7/28/2011	12:11:33 PM	Main Vac valve closed
7/28/2011	12:11:33 PM	Bypass valve closed
7/28/2011	12:11:33 PM	H2 valve opened
7/28/2011	12:11:33 PM	Bubbler valve opened
7/28/2011	12:11:33 PM	Helium MFC set to  0.000000
7/28/2011	12:11:33 PM	H2 MFC set to  500.000000
7/28/2011	12:11:33 PM	BCl3 MFC set to  0.000000
7/28/2011	12:11:33 PM	PHl3 MFC set to  0.000000
7/28/2011	12:11:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	12:11:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	12:11:33 PM	Tube furnace set to 0
7/28/2011	12:11:34 PM	Helium valve closed
7/28/2011	12:11:34 PM	BCl3 valve closed
7/28/2011	12:11:34 PM	PH3 valve closed
7/28/2011	12:11:34 PM	SiCl4 pre valve closed
7/28/2011	12:11:34 PM	SiCl4 post valve closed
7/28/2011	12:11:34 PM	Main Vac valve closed
7/28/2011	12:11:34 PM	Bypass valve closed
7/28/2011	12:11:34 PM	H2 valve opened
7/28/2011	12:11:34 PM	Bubbler valve opened
7/28/2011	12:11:34 PM	Helium MFC set to  0.000000
7/28/2011	12:11:34 PM	H2 MFC set to  500.000000
7/28/2011	12:11:34 PM	BCl3 MFC set to  0.000000
7/28/2011	12:11:34 PM	PHl3 MFC set to  0.000000
7/28/2011	12:11:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	12:11:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	12:11:34 PM	Tube furnace set to 1050
7/28/2011	12:31:34 PM	Helium valve closed
7/28/2011	12:31:34 PM	PH3 valve closed
7/28/2011	12:31:34 PM	Main Vac valve closed
7/28/2011	12:31:34 PM	Bypass valve closed
7/28/2011	12:31:34 PM	H2 valve opened
7/28/2011	12:31:34 PM	BCl3 valve opened
7/28/2011	12:31:34 PM	SiCl4 pre valve opened
7/28/2011	12:31:34 PM	SiCl4 post valve opened
7/28/2011	12:31:34 PM	Bubbler valve opened
7/28/2011	12:31:34 PM	Helium MFC set to  0.000000
7/28/2011	12:31:34 PM	H2 MFC set to  500.000000
7/28/2011	12:31:34 PM	BCl3 MFC set to  2.500000
7/28/2011	12:31:34 PM	PHl3 MFC set to  0.000000
7/28/2011	12:31:34 PM	SiCl4 MFC set to  50.000000
7/28/2011	12:31:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	12:31:34 PM	Tube furnace set to 1050
7/28/2011	12:47:34 PM	Helium valve closed
7/28/2011	12:47:34 PM	BCl3 valve closed
7/28/2011	12:47:34 PM	PH3 valve closed
7/28/2011	12:47:34 PM	SiCl4 pre valve closed
7/28/2011	12:47:34 PM	SiCl4 post valve closed
7/28/2011	12:47:34 PM	Main Vac valve closed
7/28/2011	12:47:34 PM	Bypass valve closed
7/28/2011	12:47:34 PM	H2 valve opened
7/28/2011	12:47:34 PM	Bubbler valve opened
7/28/2011	12:47:34 PM	Helium MFC set to  0.000000
7/28/2011	12:47:34 PM	H2 MFC set to  500.000000
7/28/2011	12:47:34 PM	BCl3 MFC set to  0.000000
7/28/2011	12:47:34 PM	PHl3 MFC set to  0.000000
7/28/2011	12:47:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	12:47:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	12:47:34 PM	Tube furnace set to 750
7/28/2011	12:52:34 PM	H2 valve closed
7/28/2011	12:52:34 PM	BCl3 valve closed
7/28/2011	12:52:34 PM	PH3 valve closed
7/28/2011	12:52:34 PM	SiCl4 pre valve closed
7/28/2011	12:52:34 PM	SiCl4 post valve closed
7/28/2011	12:52:34 PM	Main Vac valve closed
7/28/2011	12:52:34 PM	Bypass valve closed
7/28/2011	12:52:34 PM	Helium valve opened
7/28/2011	12:52:34 PM	Bubbler valve opened
7/28/2011	12:52:34 PM	Helium MFC set to  500.000000
7/28/2011	12:52:34 PM	H2 MFC set to  0.000000
7/28/2011	12:52:34 PM	BCl3 MFC set to  0.000000
7/28/2011	12:52:34 PM	PHl3 MFC set to  0.000000
7/28/2011	12:52:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	12:52:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	12:52:35 PM	Tube furnace set to 0
7/28/2011	1:12:34 PM	Helium valve closed
7/28/2011	1:12:34 PM	H2 valve closed
7/28/2011	1:12:35 PM	BCl3 valve closed
7/28/2011	1:12:35 PM	PH3 valve closed
7/28/2011	1:12:35 PM	SiCl4 pre valve closed
7/28/2011	1:12:35 PM	SiCl4 post valve closed
7/28/2011	1:12:35 PM	Main Vac valve closed
7/28/2011	1:12:35 PM	Bypass valve closed
7/28/2011	1:12:35 PM	Bubbler valve closed
7/28/2011	1:12:35 PM	Helium MFC set to  0.000000
7/28/2011	1:12:35 PM	H2 MFC set to  0.000000
7/28/2011	1:12:35 PM	BCl3 MFC set to  0.000000
7/28/2011	1:12:35 PM	PHl3 MFC set to  0.000000
7/28/2011	1:12:35 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:12:35 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:12:35 PM	Tube furnace set to 0
7/28/2011	1:12:36 PM	Run finished at 1:12 PM
7/28/2011	1:15:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	1:15:36 PM	Recipe started at 1:15 PM
7/28/2011	1:15:36 PM	Helium valve closed
7/28/2011	1:15:36 PM	H2 valve closed
7/28/2011	1:15:36 PM	BCl3 valve closed
7/28/2011	1:15:36 PM	PH3 valve closed
7/28/2011	1:15:36 PM	SiCl4 pre valve closed
7/28/2011	1:15:36 PM	SiCl4 post valve closed
7/28/2011	1:15:36 PM	Main Vac valve closed
7/28/2011	1:15:36 PM	Bubbler valve closed
7/28/2011	1:15:36 PM	Bypass valve opened
7/28/2011	1:15:36 PM	Helium MFC set to  0.000000
7/28/2011	1:15:36 PM	H2 MFC set to  0.000000
7/28/2011	1:15:36 PM	BCl3 MFC set to  0.000000
7/28/2011	1:15:36 PM	PHl3 MFC set to  0.000000
7/28/2011	1:15:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:15:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:15:36 PM	Tube furnace set to 0
7/28/2011	1:16:39 PM	Helium valve closed
7/28/2011	1:16:39 PM	H2 valve closed
7/28/2011	1:16:39 PM	BCl3 valve closed
7/28/2011	1:16:39 PM	PH3 valve closed
7/28/2011	1:16:39 PM	SiCl4 pre valve closed
7/28/2011	1:16:39 PM	SiCl4 post valve closed
7/28/2011	1:16:39 PM	Main Vac valve closed
7/28/2011	1:16:39 PM	Bubbler valve closed
7/28/2011	1:16:39 PM	Bypass valve opened
7/28/2011	1:16:39 PM	Helium MFC set to  0.000000
7/28/2011	1:16:39 PM	H2 MFC set to  0.000000
7/28/2011	1:16:39 PM	BCl3 MFC set to  0.000000
7/28/2011	1:16:39 PM	PHl3 MFC set to  0.000000
7/28/2011	1:16:39 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:16:39 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:16:39 PM	Tube furnace set to 0
7/28/2011	1:17:39 PM	Helium valve closed
7/28/2011	1:17:39 PM	H2 valve closed
7/28/2011	1:17:39 PM	BCl3 valve closed
7/28/2011	1:17:39 PM	PH3 valve closed
7/28/2011	1:17:39 PM	SiCl4 pre valve closed
7/28/2011	1:17:39 PM	SiCl4 post valve closed
7/28/2011	1:17:39 PM	Bypass valve closed
7/28/2011	1:17:39 PM	Bubbler valve closed
7/28/2011	1:17:39 PM	Main Vac valve opened
7/28/2011	1:17:39 PM	Helium MFC set to  0.000000
7/28/2011	1:17:39 PM	H2 MFC set to  0.000000
7/28/2011	1:17:39 PM	BCl3 MFC set to  0.000000
7/28/2011	1:17:39 PM	PHl3 MFC set to  0.000000
7/28/2011	1:17:39 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:17:39 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:17:40 PM	Tube furnace set to 0
7/28/2011	1:17:41 PM	Run finished at 1:17 PM
7/28/2011	1:17:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	1:24:32 PM	Recipe started at 1:24 PM
7/28/2011	1:24:32 PM	Helium valve closed
7/28/2011	1:24:32 PM	H2 valve closed
7/28/2011	1:24:32 PM	BCl3 valve closed
7/28/2011	1:24:32 PM	PH3 valve closed
7/28/2011	1:24:32 PM	SiCl4 pre valve closed
7/28/2011	1:24:32 PM	SiCl4 post valve closed
7/28/2011	1:24:32 PM	Bypass valve closed
7/28/2011	1:24:32 PM	Bubbler valve closed
7/28/2011	1:24:32 PM	Main Vac valve opened
7/28/2011	1:24:32 PM	Helium MFC set to  0.000000
7/28/2011	1:24:32 PM	H2 MFC set to  0.000000
7/28/2011	1:24:32 PM	BCl3 MFC set to  0.000000
7/28/2011	1:24:32 PM	PHl3 MFC set to  0.000000
7/28/2011	1:24:32 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:24:32 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:24:32 PM	Tube furnace set to 0
7/28/2011	1:25:02 PM	H2 valve closed
7/28/2011	1:25:02 PM	BCl3 valve closed
7/28/2011	1:25:02 PM	PH3 valve closed
7/28/2011	1:25:02 PM	SiCl4 pre valve closed
7/28/2011	1:25:02 PM	SiCl4 post valve closed
7/28/2011	1:25:02 PM	Bypass valve closed
7/28/2011	1:25:02 PM	Bubbler valve closed
7/28/2011	1:25:02 PM	Helium valve opened
7/28/2011	1:25:02 PM	Main Vac valve opened
7/28/2011	1:25:02 PM	Helium MFC set to  20.000000
7/28/2011	1:25:02 PM	H2 MFC set to  0.000000
7/28/2011	1:25:02 PM	BCl3 MFC set to  0.000000
7/28/2011	1:25:02 PM	PHl3 MFC set to  0.000000
7/28/2011	1:25:02 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:25:02 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:25:02 PM	Tube furnace set to 0
7/28/2011	1:25:32 PM	Helium valve closed
7/28/2011	1:25:32 PM	H2 valve closed
7/28/2011	1:25:32 PM	BCl3 valve closed
7/28/2011	1:25:32 PM	PH3 valve closed
7/28/2011	1:25:32 PM	SiCl4 pre valve closed
7/28/2011	1:25:32 PM	SiCl4 post valve closed
7/28/2011	1:25:32 PM	Bypass valve closed
7/28/2011	1:25:32 PM	Bubbler valve closed
7/28/2011	1:25:32 PM	Main Vac valve opened
7/28/2011	1:25:32 PM	Helium MFC set to  0.000000
7/28/2011	1:25:32 PM	H2 MFC set to  0.000000
7/28/2011	1:25:32 PM	BCl3 MFC set to  0.000000
7/28/2011	1:25:32 PM	PHl3 MFC set to  0.000000
7/28/2011	1:25:32 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:25:32 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:25:32 PM	Tube furnace set to 0
7/28/2011	1:26:02 PM	H2 valve closed
7/28/2011	1:26:02 PM	BCl3 valve closed
7/28/2011	1:26:02 PM	PH3 valve closed
7/28/2011	1:26:02 PM	SiCl4 pre valve closed
7/28/2011	1:26:02 PM	SiCl4 post valve closed
7/28/2011	1:26:02 PM	Bypass valve closed
7/28/2011	1:26:02 PM	Bubbler valve closed
7/28/2011	1:26:02 PM	Helium valve opened
7/28/2011	1:26:02 PM	Main Vac valve opened
7/28/2011	1:26:02 PM	Helium MFC set to  20.000000
7/28/2011	1:26:02 PM	H2 MFC set to  0.000000
7/28/2011	1:26:02 PM	BCl3 MFC set to  0.000000
7/28/2011	1:26:02 PM	PHl3 MFC set to  0.000000
7/28/2011	1:26:02 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:26:02 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:26:02 PM	Tube furnace set to 0
7/28/2011	1:26:32 PM	Helium valve closed
7/28/2011	1:26:32 PM	H2 valve closed
7/28/2011	1:26:32 PM	BCl3 valve closed
7/28/2011	1:26:32 PM	PH3 valve closed
7/28/2011	1:26:32 PM	SiCl4 pre valve closed
7/28/2011	1:26:32 PM	SiCl4 post valve closed
7/28/2011	1:26:32 PM	Bypass valve closed
7/28/2011	1:26:32 PM	Bubbler valve closed
7/28/2011	1:26:32 PM	Main Vac valve opened
7/28/2011	1:26:33 PM	Helium MFC set to  0.000000
7/28/2011	1:26:33 PM	H2 MFC set to  0.000000
7/28/2011	1:26:33 PM	BCl3 MFC set to  0.000000
7/28/2011	1:26:33 PM	PHl3 MFC set to  0.000000
7/28/2011	1:26:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:26:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:26:33 PM	Tube furnace set to 0
7/28/2011	1:27:03 PM	H2 valve closed
7/28/2011	1:27:03 PM	BCl3 valve closed
7/28/2011	1:27:03 PM	PH3 valve closed
7/28/2011	1:27:03 PM	SiCl4 pre valve closed
7/28/2011	1:27:03 PM	SiCl4 post valve closed
7/28/2011	1:27:03 PM	Bypass valve closed
7/28/2011	1:27:03 PM	Bubbler valve closed
7/28/2011	1:27:03 PM	Helium valve opened
7/28/2011	1:27:03 PM	Main Vac valve opened
7/28/2011	1:27:03 PM	Helium MFC set to  20.000000
7/28/2011	1:27:03 PM	H2 MFC set to  0.000000
7/28/2011	1:27:03 PM	BCl3 MFC set to  0.000000
7/28/2011	1:27:03 PM	PHl3 MFC set to  0.000000
7/28/2011	1:27:03 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:27:03 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:27:03 PM	Tube furnace set to 0
7/28/2011	1:27:33 PM	Helium valve closed
7/28/2011	1:27:33 PM	H2 valve closed
7/28/2011	1:27:33 PM	BCl3 valve closed
7/28/2011	1:27:33 PM	PH3 valve closed
7/28/2011	1:27:33 PM	SiCl4 pre valve closed
7/28/2011	1:27:33 PM	SiCl4 post valve closed
7/28/2011	1:27:33 PM	Bypass valve closed
7/28/2011	1:27:33 PM	Bubbler valve closed
7/28/2011	1:27:33 PM	Main Vac valve opened
7/28/2011	1:27:33 PM	Helium MFC set to  0.000000
7/28/2011	1:27:33 PM	H2 MFC set to  0.000000
7/28/2011	1:27:33 PM	BCl3 MFC set to  0.000000
7/28/2011	1:27:33 PM	PHl3 MFC set to  0.000000
7/28/2011	1:27:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:27:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:27:33 PM	Tube furnace set to 0
7/28/2011	1:28:03 PM	H2 valve closed
7/28/2011	1:28:03 PM	BCl3 valve closed
7/28/2011	1:28:03 PM	PH3 valve closed
7/28/2011	1:28:03 PM	SiCl4 pre valve closed
7/28/2011	1:28:03 PM	SiCl4 post valve closed
7/28/2011	1:28:03 PM	Bypass valve closed
7/28/2011	1:28:03 PM	Bubbler valve closed
7/28/2011	1:28:03 PM	Helium valve opened
7/28/2011	1:28:03 PM	Main Vac valve opened
7/28/2011	1:28:03 PM	Helium MFC set to  20.000000
7/28/2011	1:28:03 PM	H2 MFC set to  0.000000
7/28/2011	1:28:03 PM	BCl3 MFC set to  0.000000
7/28/2011	1:28:03 PM	PHl3 MFC set to  0.000000
7/28/2011	1:28:03 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:28:03 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:28:03 PM	Tube furnace set to 0
7/28/2011	1:28:33 PM	Helium valve closed
7/28/2011	1:28:33 PM	H2 valve closed
7/28/2011	1:28:33 PM	BCl3 valve closed
7/28/2011	1:28:33 PM	PH3 valve closed
7/28/2011	1:28:33 PM	SiCl4 pre valve closed
7/28/2011	1:28:33 PM	SiCl4 post valve closed
7/28/2011	1:28:33 PM	Bypass valve closed
7/28/2011	1:28:33 PM	Bubbler valve closed
7/28/2011	1:28:33 PM	Main Vac valve opened
7/28/2011	1:28:33 PM	Helium MFC set to  0.000000
7/28/2011	1:28:33 PM	H2 MFC set to  0.000000
7/28/2011	1:28:33 PM	BCl3 MFC set to  0.000000
7/28/2011	1:28:33 PM	PHl3 MFC set to  0.000000
7/28/2011	1:28:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:28:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:28:34 PM	Tube furnace set to 0
7/28/2011	1:29:04 PM	H2 valve closed
7/28/2011	1:29:04 PM	BCl3 valve closed
7/28/2011	1:29:04 PM	PH3 valve closed
7/28/2011	1:29:04 PM	SiCl4 pre valve closed
7/28/2011	1:29:04 PM	SiCl4 post valve closed
7/28/2011	1:29:04 PM	Bypass valve closed
7/28/2011	1:29:04 PM	Bubbler valve closed
7/28/2011	1:29:04 PM	Helium valve opened
7/28/2011	1:29:04 PM	Main Vac valve opened
7/28/2011	1:29:04 PM	Helium MFC set to  20.000000
7/28/2011	1:29:04 PM	H2 MFC set to  0.000000
7/28/2011	1:29:04 PM	BCl3 MFC set to  0.000000
7/28/2011	1:29:04 PM	PHl3 MFC set to  0.000000
7/28/2011	1:29:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:29:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:29:04 PM	Tube furnace set to 0
7/28/2011	1:29:34 PM	Helium valve closed
7/28/2011	1:29:34 PM	H2 valve closed
7/28/2011	1:29:34 PM	BCl3 valve closed
7/28/2011	1:29:34 PM	PH3 valve closed
7/28/2011	1:29:34 PM	SiCl4 pre valve closed
7/28/2011	1:29:34 PM	SiCl4 post valve closed
7/28/2011	1:29:34 PM	Bypass valve closed
7/28/2011	1:29:34 PM	Bubbler valve closed
7/28/2011	1:29:34 PM	Main Vac valve opened
7/28/2011	1:29:34 PM	Helium MFC set to  0.000000
7/28/2011	1:29:34 PM	H2 MFC set to  0.000000
7/28/2011	1:29:34 PM	BCl3 MFC set to  0.000000
7/28/2011	1:29:34 PM	PHl3 MFC set to  0.000000
7/28/2011	1:29:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:29:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:29:34 PM	Tube furnace set to 0
7/28/2011	1:30:04 PM	H2 valve closed
7/28/2011	1:30:04 PM	BCl3 valve closed
7/28/2011	1:30:04 PM	PH3 valve closed
7/28/2011	1:30:04 PM	SiCl4 pre valve closed
7/28/2011	1:30:04 PM	SiCl4 post valve closed
7/28/2011	1:30:04 PM	Bypass valve closed
7/28/2011	1:30:04 PM	Bubbler valve closed
7/28/2011	1:30:04 PM	Helium valve opened
7/28/2011	1:30:04 PM	Main Vac valve opened
7/28/2011	1:30:04 PM	Helium MFC set to  20.000000
7/28/2011	1:30:04 PM	H2 MFC set to  0.000000
7/28/2011	1:30:04 PM	BCl3 MFC set to  0.000000
7/28/2011	1:30:04 PM	PHl3 MFC set to  0.000000
7/28/2011	1:30:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:30:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:30:04 PM	Tube furnace set to 0
7/28/2011	1:30:34 PM	Helium valve closed
7/28/2011	1:30:34 PM	H2 valve closed
7/28/2011	1:30:34 PM	BCl3 valve closed
7/28/2011	1:30:34 PM	PH3 valve closed
7/28/2011	1:30:34 PM	SiCl4 pre valve closed
7/28/2011	1:30:34 PM	SiCl4 post valve closed
7/28/2011	1:30:34 PM	Bypass valve closed
7/28/2011	1:30:34 PM	Bubbler valve closed
7/28/2011	1:30:34 PM	Main Vac valve opened
7/28/2011	1:30:34 PM	Helium MFC set to  0.000000
7/28/2011	1:30:34 PM	H2 MFC set to  0.000000
7/28/2011	1:30:34 PM	BCl3 MFC set to  0.000000
7/28/2011	1:30:34 PM	PHl3 MFC set to  0.000000
7/28/2011	1:30:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:30:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:30:34 PM	Tube furnace set to 0
7/28/2011	1:31:04 PM	H2 valve closed
7/28/2011	1:31:04 PM	BCl3 valve closed
7/28/2011	1:31:04 PM	PH3 valve closed
7/28/2011	1:31:04 PM	SiCl4 pre valve closed
7/28/2011	1:31:04 PM	SiCl4 post valve closed
7/28/2011	1:31:04 PM	Bypass valve closed
7/28/2011	1:31:04 PM	Bubbler valve closed
7/28/2011	1:31:04 PM	Helium valve opened
7/28/2011	1:31:04 PM	Main Vac valve opened
7/28/2011	1:31:04 PM	Helium MFC set to  20.000000
7/28/2011	1:31:04 PM	H2 MFC set to  0.000000
7/28/2011	1:31:04 PM	BCl3 MFC set to  0.000000
7/28/2011	1:31:04 PM	PHl3 MFC set to  0.000000
7/28/2011	1:31:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:31:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:31:05 PM	Tube furnace set to 0
7/28/2011	1:31:35 PM	Helium valve closed
7/28/2011	1:31:35 PM	H2 valve closed
7/28/2011	1:31:35 PM	BCl3 valve closed
7/28/2011	1:31:35 PM	PH3 valve closed
7/28/2011	1:31:35 PM	SiCl4 pre valve closed
7/28/2011	1:31:35 PM	SiCl4 post valve closed
7/28/2011	1:31:35 PM	Bypass valve closed
7/28/2011	1:31:35 PM	Bubbler valve closed
7/28/2011	1:31:35 PM	Main Vac valve opened
7/28/2011	1:31:35 PM	Helium MFC set to  0.000000
7/28/2011	1:31:35 PM	H2 MFC set to  0.000000
7/28/2011	1:31:35 PM	BCl3 MFC set to  0.000000
7/28/2011	1:31:35 PM	PHl3 MFC set to  0.000000
7/28/2011	1:31:35 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:31:35 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:31:35 PM	Tube furnace set to 0
7/28/2011	1:32:05 PM	H2 valve closed
7/28/2011	1:32:05 PM	BCl3 valve closed
7/28/2011	1:32:05 PM	PH3 valve closed
7/28/2011	1:32:05 PM	SiCl4 pre valve closed
7/28/2011	1:32:05 PM	SiCl4 post valve closed
7/28/2011	1:32:05 PM	Bypass valve closed
7/28/2011	1:32:05 PM	Bubbler valve closed
7/28/2011	1:32:05 PM	Helium valve opened
7/28/2011	1:32:05 PM	Main Vac valve opened
7/28/2011	1:32:05 PM	Helium MFC set to  20.000000
7/28/2011	1:32:05 PM	H2 MFC set to  0.000000
7/28/2011	1:32:05 PM	BCl3 MFC set to  0.000000
7/28/2011	1:32:05 PM	PHl3 MFC set to  0.000000
7/28/2011	1:32:05 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:32:05 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:32:05 PM	Tube furnace set to 0
7/28/2011	1:32:35 PM	Helium valve closed
7/28/2011	1:32:35 PM	H2 valve closed
7/28/2011	1:32:35 PM	BCl3 valve closed
7/28/2011	1:32:35 PM	PH3 valve closed
7/28/2011	1:32:35 PM	SiCl4 pre valve closed
7/28/2011	1:32:35 PM	SiCl4 post valve closed
7/28/2011	1:32:35 PM	Bypass valve closed
7/28/2011	1:32:35 PM	Bubbler valve closed
7/28/2011	1:32:35 PM	Main Vac valve opened
7/28/2011	1:32:35 PM	Helium MFC set to  0.000000
7/28/2011	1:32:35 PM	H2 MFC set to  0.000000
7/28/2011	1:32:35 PM	BCl3 MFC set to  0.000000
7/28/2011	1:32:35 PM	PHl3 MFC set to  0.000000
7/28/2011	1:32:35 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:32:35 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:32:35 PM	Tube furnace set to 0
7/28/2011	1:33:05 PM	H2 valve closed
7/28/2011	1:33:05 PM	BCl3 valve closed
7/28/2011	1:33:05 PM	PH3 valve closed
7/28/2011	1:33:05 PM	SiCl4 pre valve closed
7/28/2011	1:33:05 PM	SiCl4 post valve closed
7/28/2011	1:33:05 PM	Bypass valve closed
7/28/2011	1:33:05 PM	Bubbler valve closed
7/28/2011	1:33:05 PM	Helium valve opened
7/28/2011	1:33:05 PM	Main Vac valve opened
7/28/2011	1:33:05 PM	Helium MFC set to  20.000000
7/28/2011	1:33:05 PM	H2 MFC set to  0.000000
7/28/2011	1:33:05 PM	BCl3 MFC set to  0.000000
7/28/2011	1:33:05 PM	PHl3 MFC set to  0.000000
7/28/2011	1:33:05 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:33:05 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:33:05 PM	Tube furnace set to 0
7/28/2011	1:33:36 PM	Helium valve closed
7/28/2011	1:33:36 PM	H2 valve closed
7/28/2011	1:33:36 PM	BCl3 valve closed
7/28/2011	1:33:36 PM	PH3 valve closed
7/28/2011	1:33:36 PM	SiCl4 pre valve closed
7/28/2011	1:33:36 PM	SiCl4 post valve closed
7/28/2011	1:33:36 PM	Bypass valve closed
7/28/2011	1:33:36 PM	Bubbler valve closed
7/28/2011	1:33:36 PM	Main Vac valve opened
7/28/2011	1:33:36 PM	Helium MFC set to  0.000000
7/28/2011	1:33:36 PM	H2 MFC set to  0.000000
7/28/2011	1:33:36 PM	BCl3 MFC set to  0.000000
7/28/2011	1:33:36 PM	PHl3 MFC set to  0.000000
7/28/2011	1:33:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:33:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:33:36 PM	Tube furnace set to 200
7/28/2011	1:34:06 PM	H2 valve closed
7/28/2011	1:34:06 PM	BCl3 valve closed
7/28/2011	1:34:06 PM	PH3 valve closed
7/28/2011	1:34:06 PM	SiCl4 pre valve closed
7/28/2011	1:34:06 PM	SiCl4 post valve closed
7/28/2011	1:34:06 PM	Bypass valve closed
7/28/2011	1:34:06 PM	Bubbler valve closed
7/28/2011	1:34:06 PM	Helium valve opened
7/28/2011	1:34:06 PM	Main Vac valve opened
7/28/2011	1:34:06 PM	Helium MFC set to  20.000000
7/28/2011	1:34:06 PM	H2 MFC set to  0.000000
7/28/2011	1:34:06 PM	BCl3 MFC set to  0.000000
7/28/2011	1:34:06 PM	PHl3 MFC set to  0.000000
7/28/2011	1:34:06 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:34:06 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:34:06 PM	Tube furnace set to 200
7/28/2011	1:34:36 PM	Helium valve closed
7/28/2011	1:34:36 PM	H2 valve closed
7/28/2011	1:34:36 PM	BCl3 valve closed
7/28/2011	1:34:36 PM	PH3 valve closed
7/28/2011	1:34:36 PM	SiCl4 pre valve closed
7/28/2011	1:34:36 PM	SiCl4 post valve closed
7/28/2011	1:34:36 PM	Bypass valve closed
7/28/2011	1:34:36 PM	Bubbler valve closed
7/28/2011	1:34:36 PM	Main Vac valve opened
7/28/2011	1:34:36 PM	Helium MFC set to  0.000000
7/28/2011	1:34:36 PM	H2 MFC set to  0.000000
7/28/2011	1:34:36 PM	BCl3 MFC set to  0.000000
7/28/2011	1:34:36 PM	PHl3 MFC set to  0.000000
7/28/2011	1:34:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:34:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:34:36 PM	Tube furnace set to 200
7/28/2011	1:35:06 PM	H2 valve closed
7/28/2011	1:35:06 PM	BCl3 valve closed
7/28/2011	1:35:06 PM	PH3 valve closed
7/28/2011	1:35:06 PM	SiCl4 pre valve closed
7/28/2011	1:35:06 PM	SiCl4 post valve closed
7/28/2011	1:35:06 PM	Bypass valve closed
7/28/2011	1:35:06 PM	Bubbler valve closed
7/28/2011	1:35:06 PM	Helium valve opened
7/28/2011	1:35:06 PM	Main Vac valve opened
7/28/2011	1:35:06 PM	Helium MFC set to  20.000000
7/28/2011	1:35:06 PM	H2 MFC set to  0.000000
7/28/2011	1:35:06 PM	BCl3 MFC set to  0.000000
7/28/2011	1:35:06 PM	PHl3 MFC set to  0.000000
7/28/2011	1:35:06 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:35:06 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:35:06 PM	Tube furnace set to 200
7/28/2011	1:35:36 PM	Helium valve closed
7/28/2011	1:35:36 PM	H2 valve closed
7/28/2011	1:35:36 PM	BCl3 valve closed
7/28/2011	1:35:36 PM	PH3 valve closed
7/28/2011	1:35:36 PM	SiCl4 pre valve closed
7/28/2011	1:35:36 PM	SiCl4 post valve closed
7/28/2011	1:35:36 PM	Bypass valve closed
7/28/2011	1:35:36 PM	Bubbler valve closed
7/28/2011	1:35:36 PM	Main Vac valve opened
7/28/2011	1:35:36 PM	Helium MFC set to  0.000000
7/28/2011	1:35:36 PM	H2 MFC set to  0.000000
7/28/2011	1:35:36 PM	BCl3 MFC set to  0.000000
7/28/2011	1:35:36 PM	PHl3 MFC set to  0.000000
7/28/2011	1:35:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:35:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:35:37 PM	Tube furnace set to 200
7/28/2011	1:36:07 PM	H2 valve closed
7/28/2011	1:36:07 PM	BCl3 valve closed
7/28/2011	1:36:07 PM	PH3 valve closed
7/28/2011	1:36:07 PM	SiCl4 pre valve closed
7/28/2011	1:36:07 PM	SiCl4 post valve closed
7/28/2011	1:36:07 PM	Bypass valve closed
7/28/2011	1:36:07 PM	Bubbler valve closed
7/28/2011	1:36:07 PM	Helium valve opened
7/28/2011	1:36:07 PM	Main Vac valve opened
7/28/2011	1:36:07 PM	Helium MFC set to  20.000000
7/28/2011	1:36:07 PM	H2 MFC set to  0.000000
7/28/2011	1:36:07 PM	BCl3 MFC set to  0.000000
7/28/2011	1:36:07 PM	PHl3 MFC set to  0.000000
7/28/2011	1:36:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:36:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:36:07 PM	Tube furnace set to 200
7/28/2011	1:36:37 PM	Helium valve closed
7/28/2011	1:36:37 PM	H2 valve closed
7/28/2011	1:36:37 PM	BCl3 valve closed
7/28/2011	1:36:37 PM	PH3 valve closed
7/28/2011	1:36:37 PM	SiCl4 pre valve closed
7/28/2011	1:36:37 PM	SiCl4 post valve closed
7/28/2011	1:36:37 PM	Bypass valve closed
7/28/2011	1:36:37 PM	Bubbler valve closed
7/28/2011	1:36:37 PM	Main Vac valve opened
7/28/2011	1:36:37 PM	Helium MFC set to  0.000000
7/28/2011	1:36:37 PM	H2 MFC set to  0.000000
7/28/2011	1:36:37 PM	BCl3 MFC set to  0.000000
7/28/2011	1:36:37 PM	PHl3 MFC set to  0.000000
7/28/2011	1:36:37 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:36:37 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:36:37 PM	Tube furnace set to 200
7/28/2011	1:37:07 PM	H2 valve closed
7/28/2011	1:37:07 PM	BCl3 valve closed
7/28/2011	1:37:07 PM	PH3 valve closed
7/28/2011	1:37:07 PM	SiCl4 pre valve closed
7/28/2011	1:37:07 PM	SiCl4 post valve closed
7/28/2011	1:37:07 PM	Bypass valve closed
7/28/2011	1:37:07 PM	Bubbler valve closed
7/28/2011	1:37:07 PM	Helium valve opened
7/28/2011	1:37:07 PM	Main Vac valve opened
7/28/2011	1:37:07 PM	Helium MFC set to  20.000000
7/28/2011	1:37:07 PM	H2 MFC set to  0.000000
7/28/2011	1:37:07 PM	BCl3 MFC set to  0.000000
7/28/2011	1:37:07 PM	PHl3 MFC set to  0.000000
7/28/2011	1:37:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:37:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:37:07 PM	Tube furnace set to 200
7/28/2011	1:37:37 PM	Helium valve closed
7/28/2011	1:37:37 PM	H2 valve closed
7/28/2011	1:37:37 PM	BCl3 valve closed
7/28/2011	1:37:37 PM	PH3 valve closed
7/28/2011	1:37:37 PM	SiCl4 pre valve closed
7/28/2011	1:37:37 PM	SiCl4 post valve closed
7/28/2011	1:37:37 PM	Bypass valve closed
7/28/2011	1:37:37 PM	Bubbler valve closed
7/28/2011	1:37:37 PM	Main Vac valve opened
7/28/2011	1:37:37 PM	Helium MFC set to  0.000000
7/28/2011	1:37:37 PM	H2 MFC set to  0.000000
7/28/2011	1:37:37 PM	BCl3 MFC set to  0.000000
7/28/2011	1:37:37 PM	PHl3 MFC set to  0.000000
7/28/2011	1:37:37 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:37:37 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:37:37 PM	Tube furnace set to 200
7/28/2011	1:38:07 PM	H2 valve closed
7/28/2011	1:38:07 PM	BCl3 valve closed
7/28/2011	1:38:07 PM	PH3 valve closed
7/28/2011	1:38:07 PM	SiCl4 pre valve closed
7/28/2011	1:38:07 PM	SiCl4 post valve closed
7/28/2011	1:38:07 PM	Bypass valve closed
7/28/2011	1:38:07 PM	Bubbler valve closed
7/28/2011	1:38:07 PM	Helium valve opened
7/28/2011	1:38:07 PM	Main Vac valve opened
7/28/2011	1:38:07 PM	Helium MFC set to  20.000000
7/28/2011	1:38:07 PM	H2 MFC set to  0.000000
7/28/2011	1:38:07 PM	BCl3 MFC set to  0.000000
7/28/2011	1:38:07 PM	PHl3 MFC set to  0.000000
7/28/2011	1:38:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:38:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:38:08 PM	Tube furnace set to 200
7/28/2011	1:38:38 PM	Helium valve closed
7/28/2011	1:38:38 PM	H2 valve closed
7/28/2011	1:38:38 PM	BCl3 valve closed
7/28/2011	1:38:38 PM	PH3 valve closed
7/28/2011	1:38:38 PM	SiCl4 pre valve closed
7/28/2011	1:38:38 PM	SiCl4 post valve closed
7/28/2011	1:38:38 PM	Bypass valve closed
7/28/2011	1:38:38 PM	Bubbler valve closed
7/28/2011	1:38:38 PM	Main Vac valve opened
7/28/2011	1:38:38 PM	Helium MFC set to  0.000000
7/28/2011	1:38:38 PM	H2 MFC set to  0.000000
7/28/2011	1:38:38 PM	BCl3 MFC set to  0.000000
7/28/2011	1:38:38 PM	PHl3 MFC set to  0.000000
7/28/2011	1:38:38 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:38:38 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:38:38 PM	Tube furnace set to 200
7/28/2011	1:39:08 PM	H2 valve closed
7/28/2011	1:39:08 PM	BCl3 valve closed
7/28/2011	1:39:08 PM	PH3 valve closed
7/28/2011	1:39:08 PM	SiCl4 pre valve closed
7/28/2011	1:39:08 PM	SiCl4 post valve closed
7/28/2011	1:39:08 PM	Bypass valve closed
7/28/2011	1:39:08 PM	Bubbler valve closed
7/28/2011	1:39:08 PM	Helium valve opened
7/28/2011	1:39:08 PM	Main Vac valve opened
7/28/2011	1:39:08 PM	Helium MFC set to  20.000000
7/28/2011	1:39:08 PM	H2 MFC set to  0.000000
7/28/2011	1:39:08 PM	BCl3 MFC set to  0.000000
7/28/2011	1:39:08 PM	PHl3 MFC set to  0.000000
7/28/2011	1:39:08 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:39:08 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:39:08 PM	Tube furnace set to 200
7/28/2011	1:39:38 PM	Helium valve closed
7/28/2011	1:39:38 PM	H2 valve closed
7/28/2011	1:39:38 PM	BCl3 valve closed
7/28/2011	1:39:38 PM	PH3 valve closed
7/28/2011	1:39:38 PM	SiCl4 pre valve closed
7/28/2011	1:39:38 PM	SiCl4 post valve closed
7/28/2011	1:39:38 PM	Bypass valve closed
7/28/2011	1:39:38 PM	Bubbler valve closed
7/28/2011	1:39:38 PM	Main Vac valve opened
7/28/2011	1:39:38 PM	Helium MFC set to  0.000000
7/28/2011	1:39:38 PM	H2 MFC set to  0.000000
7/28/2011	1:39:38 PM	BCl3 MFC set to  0.000000
7/28/2011	1:39:38 PM	PHl3 MFC set to  0.000000
7/28/2011	1:39:38 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:39:38 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:39:38 PM	Tube furnace set to 0
7/28/2011	1:39:39 PM	Run finished at 1:39 PM
7/28/2011	1:50:56 PM	Recipe started at 1:50 PM
7/28/2011	1:50:56 PM	Helium valve closed
7/28/2011	1:50:56 PM	H2 valve closed
7/28/2011	1:50:56 PM	BCl3 valve closed
7/28/2011	1:50:56 PM	PH3 valve closed
7/28/2011	1:50:56 PM	SiCl4 pre valve closed
7/28/2011	1:50:56 PM	SiCl4 post valve closed
7/28/2011	1:50:56 PM	Main Vac valve closed
7/28/2011	1:50:56 PM	Bypass valve closed
7/28/2011	1:50:56 PM	Bubbler valve closed
7/28/2011	1:50:56 PM	Helium MFC set to  0.000000
7/28/2011	1:50:56 PM	H2 MFC set to  0.000000
7/28/2011	1:50:56 PM	BCl3 MFC set to  0.000000
7/28/2011	1:50:56 PM	PHl3 MFC set to  0.000000
7/28/2011	1:50:56 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:50:56 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:50:56 PM	Tube furnace set to 0
7/28/2011	1:50:59 PM	Helium valve closed
7/28/2011	1:50:59 PM	BCl3 valve closed
7/28/2011	1:50:59 PM	PH3 valve closed
7/28/2011	1:50:59 PM	SiCl4 pre valve closed
7/28/2011	1:50:59 PM	SiCl4 post valve closed
7/28/2011	1:50:59 PM	Main Vac valve closed
7/28/2011	1:50:59 PM	Bypass valve closed
7/28/2011	1:50:59 PM	Bubbler valve closed
7/28/2011	1:50:59 PM	H2 valve opened
7/28/2011	1:50:59 PM	Helium MFC set to  0.000000
7/28/2011	1:50:59 PM	H2 MFC set to  500.000000
7/28/2011	1:50:59 PM	BCl3 MFC set to  0.000000
7/28/2011	1:50:59 PM	PHl3 MFC set to  0.000000
7/28/2011	1:50:59 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:50:59 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:50:59 PM	Tube furnace set to 0
7/28/2011	1:52:03 PM	Helium valve closed
7/28/2011	1:52:03 PM	BCl3 valve closed
7/28/2011	1:52:03 PM	PH3 valve closed
7/28/2011	1:52:03 PM	SiCl4 pre valve closed
7/28/2011	1:52:03 PM	SiCl4 post valve closed
7/28/2011	1:52:03 PM	Main Vac valve closed
7/28/2011	1:52:03 PM	Bypass valve closed
7/28/2011	1:52:03 PM	H2 valve opened
7/28/2011	1:52:03 PM	Bubbler valve opened
7/28/2011	1:52:03 PM	Helium MFC set to  0.000000
7/28/2011	1:52:03 PM	H2 MFC set to  500.000000
7/28/2011	1:52:03 PM	BCl3 MFC set to  0.000000
7/28/2011	1:52:03 PM	PHl3 MFC set to  0.000000
7/28/2011	1:52:03 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:52:03 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:52:03 PM	Tube furnace set to 0
7/28/2011	1:52:04 PM	Helium valve closed
7/28/2011	1:52:04 PM	BCl3 valve closed
7/28/2011	1:52:04 PM	PH3 valve closed
7/28/2011	1:52:04 PM	SiCl4 pre valve closed
7/28/2011	1:52:04 PM	SiCl4 post valve closed
7/28/2011	1:52:04 PM	Main Vac valve closed
7/28/2011	1:52:04 PM	Bypass valve closed
7/28/2011	1:52:04 PM	H2 valve opened
7/28/2011	1:52:04 PM	Bubbler valve opened
7/28/2011	1:52:04 PM	Helium MFC set to  0.000000
7/28/2011	1:52:04 PM	H2 MFC set to  500.000000
7/28/2011	1:52:04 PM	BCl3 MFC set to  0.000000
7/28/2011	1:52:04 PM	PHl3 MFC set to  0.000000
7/28/2011	1:52:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	1:52:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	1:52:04 PM	Tube furnace set to 1045
7/28/2011	2:12:04 PM	Helium valve closed
7/28/2011	2:12:04 PM	PH3 valve closed
7/28/2011	2:12:04 PM	Main Vac valve closed
7/28/2011	2:12:04 PM	Bypass valve closed
7/28/2011	2:12:04 PM	H2 valve opened
7/28/2011	2:12:04 PM	BCl3 valve opened
7/28/2011	2:12:04 PM	SiCl4 pre valve opened
7/28/2011	2:12:04 PM	SiCl4 post valve opened
7/28/2011	2:12:04 PM	Bubbler valve opened
7/28/2011	2:12:04 PM	Helium MFC set to  0.000000
7/28/2011	2:12:04 PM	H2 MFC set to  500.000000
7/28/2011	2:12:04 PM	BCl3 MFC set to  2.500000
7/28/2011	2:12:04 PM	PHl3 MFC set to  0.000000
7/28/2011	2:12:04 PM	SiCl4 MFC set to  50.000000
7/28/2011	2:12:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	2:12:04 PM	Tube furnace set to 1045
7/28/2011	2:28:04 PM	Helium valve closed
7/28/2011	2:28:04 PM	BCl3 valve closed
7/28/2011	2:28:04 PM	PH3 valve closed
7/28/2011	2:28:04 PM	SiCl4 pre valve closed
7/28/2011	2:28:04 PM	SiCl4 post valve closed
7/28/2011	2:28:04 PM	Main Vac valve closed
7/28/2011	2:28:04 PM	Bypass valve closed
7/28/2011	2:28:04 PM	H2 valve opened
7/28/2011	2:28:04 PM	Bubbler valve opened
7/28/2011	2:28:04 PM	Helium MFC set to  0.000000
7/28/2011	2:28:04 PM	H2 MFC set to  500.000000
7/28/2011	2:28:04 PM	BCl3 MFC set to  0.000000
7/28/2011	2:28:04 PM	PHl3 MFC set to  0.000000
7/28/2011	2:28:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	2:28:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	2:28:04 PM	Tube furnace set to 750
7/28/2011	2:33:04 PM	H2 valve closed
7/28/2011	2:33:04 PM	BCl3 valve closed
7/28/2011	2:33:04 PM	PH3 valve closed
7/28/2011	2:33:04 PM	SiCl4 pre valve closed
7/28/2011	2:33:04 PM	SiCl4 post valve closed
7/28/2011	2:33:04 PM	Main Vac valve closed
7/28/2011	2:33:04 PM	Bypass valve closed
7/28/2011	2:33:04 PM	Helium valve opened
7/28/2011	2:33:04 PM	Bubbler valve opened
7/28/2011	2:33:04 PM	Helium MFC set to  500.000000
7/28/2011	2:33:04 PM	H2 MFC set to  0.000000
7/28/2011	2:33:04 PM	BCl3 MFC set to  0.000000
7/28/2011	2:33:04 PM	PHl3 MFC set to  0.000000
7/28/2011	2:33:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	2:33:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	2:33:05 PM	Tube furnace set to 0
7/28/2011	2:53:05 PM	Helium valve closed
7/28/2011	2:53:05 PM	H2 valve closed
7/28/2011	2:53:05 PM	BCl3 valve closed
7/28/2011	2:53:05 PM	PH3 valve closed
7/28/2011	2:53:05 PM	SiCl4 pre valve closed
7/28/2011	2:53:05 PM	SiCl4 post valve closed
7/28/2011	2:53:05 PM	Main Vac valve closed
7/28/2011	2:53:05 PM	Bypass valve closed
7/28/2011	2:53:05 PM	Bubbler valve closed
7/28/2011	2:53:05 PM	Helium MFC set to  0.000000
7/28/2011	2:53:05 PM	H2 MFC set to  0.000000
7/28/2011	2:53:05 PM	BCl3 MFC set to  0.000000
7/28/2011	2:53:05 PM	PHl3 MFC set to  0.000000
7/28/2011	2:53:05 PM	SiCl4 MFC set to  0.000000
7/28/2011	2:53:05 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	2:53:05 PM	Tube furnace set to 0
7/28/2011	2:53:06 PM	Run finished at 2:53 PM
7/28/2011	3:01:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	3:01:06 PM	Recipe started at 3:01 PM
7/28/2011	3:01:06 PM	Helium valve closed
7/28/2011	3:01:06 PM	H2 valve closed
7/28/2011	3:01:06 PM	BCl3 valve closed
7/28/2011	3:01:06 PM	PH3 valve closed
7/28/2011	3:01:06 PM	SiCl4 pre valve closed
7/28/2011	3:01:06 PM	SiCl4 post valve closed
7/28/2011	3:01:06 PM	Main Vac valve closed
7/28/2011	3:01:06 PM	Bubbler valve closed
7/28/2011	3:01:06 PM	Bypass valve opened
7/28/2011	3:01:06 PM	Helium MFC set to  0.000000
7/28/2011	3:01:06 PM	H2 MFC set to  0.000000
7/28/2011	3:01:06 PM	BCl3 MFC set to  0.000000
7/28/2011	3:01:06 PM	PHl3 MFC set to  0.000000
7/28/2011	3:01:06 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:01:06 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:01:06 PM	Tube furnace set to 0
7/28/2011	3:02:10 PM	Helium valve closed
7/28/2011	3:02:10 PM	H2 valve closed
7/28/2011	3:02:10 PM	BCl3 valve closed
7/28/2011	3:02:10 PM	PH3 valve closed
7/28/2011	3:02:10 PM	SiCl4 pre valve closed
7/28/2011	3:02:10 PM	SiCl4 post valve closed
7/28/2011	3:02:10 PM	Main Vac valve closed
7/28/2011	3:02:10 PM	Bubbler valve closed
7/28/2011	3:02:10 PM	Bypass valve opened
7/28/2011	3:02:10 PM	Helium MFC set to  0.000000
7/28/2011	3:02:10 PM	H2 MFC set to  0.000000
7/28/2011	3:02:10 PM	BCl3 MFC set to  0.000000
7/28/2011	3:02:10 PM	PHl3 MFC set to  0.000000
7/28/2011	3:02:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:02:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:02:10 PM	Tube furnace set to 0
7/28/2011	3:03:10 PM	Helium valve closed
7/28/2011	3:03:10 PM	H2 valve closed
7/28/2011	3:03:10 PM	BCl3 valve closed
7/28/2011	3:03:10 PM	PH3 valve closed
7/28/2011	3:03:10 PM	SiCl4 pre valve closed
7/28/2011	3:03:10 PM	SiCl4 post valve closed
7/28/2011	3:03:10 PM	Bypass valve closed
7/28/2011	3:03:10 PM	Bubbler valve closed
7/28/2011	3:03:10 PM	Main Vac valve opened
7/28/2011	3:03:10 PM	Helium MFC set to  0.000000
7/28/2011	3:03:10 PM	H2 MFC set to  0.000000
7/28/2011	3:03:10 PM	BCl3 MFC set to  0.000000
7/28/2011	3:03:10 PM	PHl3 MFC set to  0.000000
7/28/2011	3:03:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:03:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:03:10 PM	Tube furnace set to 0
7/28/2011	3:03:11 PM	Run finished at 3:03 PM
7/28/2011	3:03:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	3:17:35 PM	Recipe started at 3:17 PM
7/28/2011	3:17:36 PM	Helium valve closed
7/28/2011	3:17:36 PM	H2 valve closed
7/28/2011	3:17:36 PM	BCl3 valve closed
7/28/2011	3:17:36 PM	PH3 valve closed
7/28/2011	3:17:36 PM	SiCl4 pre valve closed
7/28/2011	3:17:36 PM	SiCl4 post valve closed
7/28/2011	3:17:36 PM	Bypass valve closed
7/28/2011	3:17:36 PM	Bubbler valve closed
7/28/2011	3:17:36 PM	Main Vac valve opened
7/28/2011	3:17:36 PM	Helium MFC set to  0.000000
7/28/2011	3:17:36 PM	H2 MFC set to  0.000000
7/28/2011	3:17:36 PM	BCl3 MFC set to  0.000000
7/28/2011	3:17:36 PM	PHl3 MFC set to  0.000000
7/28/2011	3:17:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:17:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:17:36 PM	Tube furnace set to 0
7/28/2011	3:18:06 PM	H2 valve closed
7/28/2011	3:18:06 PM	BCl3 valve closed
7/28/2011	3:18:06 PM	PH3 valve closed
7/28/2011	3:18:06 PM	SiCl4 pre valve closed
7/28/2011	3:18:06 PM	SiCl4 post valve closed
7/28/2011	3:18:06 PM	Bypass valve closed
7/28/2011	3:18:06 PM	Bubbler valve closed
7/28/2011	3:18:06 PM	Helium valve opened
7/28/2011	3:18:06 PM	Main Vac valve opened
7/28/2011	3:18:06 PM	Helium MFC set to  20.000000
7/28/2011	3:18:06 PM	H2 MFC set to  0.000000
7/28/2011	3:18:06 PM	BCl3 MFC set to  0.000000
7/28/2011	3:18:06 PM	PHl3 MFC set to  0.000000
7/28/2011	3:18:06 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:18:06 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:18:06 PM	Tube furnace set to 0
7/28/2011	3:18:36 PM	Helium valve closed
7/28/2011	3:18:36 PM	H2 valve closed
7/28/2011	3:18:36 PM	BCl3 valve closed
7/28/2011	3:18:36 PM	PH3 valve closed
7/28/2011	3:18:36 PM	SiCl4 pre valve closed
7/28/2011	3:18:36 PM	SiCl4 post valve closed
7/28/2011	3:18:36 PM	Bypass valve closed
7/28/2011	3:18:36 PM	Bubbler valve closed
7/28/2011	3:18:36 PM	Main Vac valve opened
7/28/2011	3:18:36 PM	Helium MFC set to  0.000000
7/28/2011	3:18:36 PM	H2 MFC set to  0.000000
7/28/2011	3:18:36 PM	BCl3 MFC set to  0.000000
7/28/2011	3:18:36 PM	PHl3 MFC set to  0.000000
7/28/2011	3:18:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:18:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:18:36 PM	Tube furnace set to 0
7/28/2011	3:19:06 PM	H2 valve closed
7/28/2011	3:19:06 PM	BCl3 valve closed
7/28/2011	3:19:06 PM	PH3 valve closed
7/28/2011	3:19:06 PM	SiCl4 pre valve closed
7/28/2011	3:19:06 PM	SiCl4 post valve closed
7/28/2011	3:19:06 PM	Bypass valve closed
7/28/2011	3:19:06 PM	Bubbler valve closed
7/28/2011	3:19:06 PM	Helium valve opened
7/28/2011	3:19:06 PM	Main Vac valve opened
7/28/2011	3:19:06 PM	Helium MFC set to  20.000000
7/28/2011	3:19:06 PM	H2 MFC set to  0.000000
7/28/2011	3:19:06 PM	BCl3 MFC set to  0.000000
7/28/2011	3:19:06 PM	PHl3 MFC set to  0.000000
7/28/2011	3:19:06 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:19:06 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:19:06 PM	Tube furnace set to 0
7/28/2011	3:19:36 PM	Helium valve closed
7/28/2011	3:19:36 PM	H2 valve closed
7/28/2011	3:19:36 PM	BCl3 valve closed
7/28/2011	3:19:36 PM	PH3 valve closed
7/28/2011	3:19:36 PM	SiCl4 pre valve closed
7/28/2011	3:19:36 PM	SiCl4 post valve closed
7/28/2011	3:19:36 PM	Bypass valve closed
7/28/2011	3:19:36 PM	Bubbler valve closed
7/28/2011	3:19:36 PM	Main Vac valve opened
7/28/2011	3:19:36 PM	Helium MFC set to  0.000000
7/28/2011	3:19:36 PM	H2 MFC set to  0.000000
7/28/2011	3:19:36 PM	BCl3 MFC set to  0.000000
7/28/2011	3:19:36 PM	PHl3 MFC set to  0.000000
7/28/2011	3:19:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:19:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:19:36 PM	Tube furnace set to 0
7/28/2011	3:20:06 PM	H2 valve closed
7/28/2011	3:20:07 PM	BCl3 valve closed
7/28/2011	3:20:07 PM	PH3 valve closed
7/28/2011	3:20:07 PM	SiCl4 pre valve closed
7/28/2011	3:20:07 PM	SiCl4 post valve closed
7/28/2011	3:20:07 PM	Bypass valve closed
7/28/2011	3:20:07 PM	Bubbler valve closed
7/28/2011	3:20:07 PM	Helium valve opened
7/28/2011	3:20:07 PM	Main Vac valve opened
7/28/2011	3:20:07 PM	Helium MFC set to  20.000000
7/28/2011	3:20:07 PM	H2 MFC set to  0.000000
7/28/2011	3:20:07 PM	BCl3 MFC set to  0.000000
7/28/2011	3:20:07 PM	PHl3 MFC set to  0.000000
7/28/2011	3:20:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:20:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:20:07 PM	Tube furnace set to 0
7/28/2011	3:20:37 PM	Helium valve closed
7/28/2011	3:20:37 PM	H2 valve closed
7/28/2011	3:20:37 PM	BCl3 valve closed
7/28/2011	3:20:37 PM	PH3 valve closed
7/28/2011	3:20:37 PM	SiCl4 pre valve closed
7/28/2011	3:20:37 PM	SiCl4 post valve closed
7/28/2011	3:20:37 PM	Bypass valve closed
7/28/2011	3:20:37 PM	Bubbler valve closed
7/28/2011	3:20:37 PM	Main Vac valve opened
7/28/2011	3:20:37 PM	Helium MFC set to  0.000000
7/28/2011	3:20:37 PM	H2 MFC set to  0.000000
7/28/2011	3:20:37 PM	BCl3 MFC set to  0.000000
7/28/2011	3:20:37 PM	PHl3 MFC set to  0.000000
7/28/2011	3:20:37 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:20:37 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:20:37 PM	Tube furnace set to 0
7/28/2011	3:21:07 PM	H2 valve closed
7/28/2011	3:21:07 PM	BCl3 valve closed
7/28/2011	3:21:07 PM	PH3 valve closed
7/28/2011	3:21:07 PM	SiCl4 pre valve closed
7/28/2011	3:21:07 PM	SiCl4 post valve closed
7/28/2011	3:21:07 PM	Bypass valve closed
7/28/2011	3:21:07 PM	Bubbler valve closed
7/28/2011	3:21:07 PM	Helium valve opened
7/28/2011	3:21:07 PM	Main Vac valve opened
7/28/2011	3:21:07 PM	Helium MFC set to  20.000000
7/28/2011	3:21:07 PM	H2 MFC set to  0.000000
7/28/2011	3:21:07 PM	BCl3 MFC set to  0.000000
7/28/2011	3:21:07 PM	PHl3 MFC set to  0.000000
7/28/2011	3:21:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:21:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:21:07 PM	Tube furnace set to 0
7/28/2011	3:21:37 PM	Helium valve closed
7/28/2011	3:21:37 PM	H2 valve closed
7/28/2011	3:21:37 PM	BCl3 valve closed
7/28/2011	3:21:37 PM	PH3 valve closed
7/28/2011	3:21:37 PM	SiCl4 pre valve closed
7/28/2011	3:21:37 PM	SiCl4 post valve closed
7/28/2011	3:21:37 PM	Bypass valve closed
7/28/2011	3:21:37 PM	Bubbler valve closed
7/28/2011	3:21:37 PM	Main Vac valve opened
7/28/2011	3:21:37 PM	Helium MFC set to  0.000000
7/28/2011	3:21:37 PM	H2 MFC set to  0.000000
7/28/2011	3:21:37 PM	BCl3 MFC set to  0.000000
7/28/2011	3:21:37 PM	PHl3 MFC set to  0.000000
7/28/2011	3:21:37 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:21:37 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:21:37 PM	Tube furnace set to 0
7/28/2011	3:22:07 PM	H2 valve closed
7/28/2011	3:22:07 PM	BCl3 valve closed
7/28/2011	3:22:07 PM	PH3 valve closed
7/28/2011	3:22:07 PM	SiCl4 pre valve closed
7/28/2011	3:22:07 PM	SiCl4 post valve closed
7/28/2011	3:22:07 PM	Bypass valve closed
7/28/2011	3:22:07 PM	Bubbler valve closed
7/28/2011	3:22:07 PM	Helium valve opened
7/28/2011	3:22:07 PM	Main Vac valve opened
7/28/2011	3:22:07 PM	Helium MFC set to  20.000000
7/28/2011	3:22:07 PM	H2 MFC set to  0.000000
7/28/2011	3:22:07 PM	BCl3 MFC set to  0.000000
7/28/2011	3:22:07 PM	PHl3 MFC set to  0.000000
7/28/2011	3:22:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:22:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:22:08 PM	Tube furnace set to 0
7/28/2011	3:22:38 PM	Helium valve closed
7/28/2011	3:22:38 PM	H2 valve closed
7/28/2011	3:22:38 PM	BCl3 valve closed
7/28/2011	3:22:38 PM	PH3 valve closed
7/28/2011	3:22:38 PM	SiCl4 pre valve closed
7/28/2011	3:22:38 PM	SiCl4 post valve closed
7/28/2011	3:22:38 PM	Bypass valve closed
7/28/2011	3:22:38 PM	Bubbler valve closed
7/28/2011	3:22:38 PM	Main Vac valve opened
7/28/2011	3:22:38 PM	Helium MFC set to  0.000000
7/28/2011	3:22:38 PM	H2 MFC set to  0.000000
7/28/2011	3:22:38 PM	BCl3 MFC set to  0.000000
7/28/2011	3:22:38 PM	PHl3 MFC set to  0.000000
7/28/2011	3:22:38 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:22:38 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:22:38 PM	Tube furnace set to 0
7/28/2011	3:23:08 PM	H2 valve closed
7/28/2011	3:23:08 PM	BCl3 valve closed
7/28/2011	3:23:08 PM	PH3 valve closed
7/28/2011	3:23:08 PM	SiCl4 pre valve closed
7/28/2011	3:23:08 PM	SiCl4 post valve closed
7/28/2011	3:23:08 PM	Bypass valve closed
7/28/2011	3:23:08 PM	Bubbler valve closed
7/28/2011	3:23:08 PM	Helium valve opened
7/28/2011	3:23:08 PM	Main Vac valve opened
7/28/2011	3:23:08 PM	Helium MFC set to  20.000000
7/28/2011	3:23:08 PM	H2 MFC set to  0.000000
7/28/2011	3:23:08 PM	BCl3 MFC set to  0.000000
7/28/2011	3:23:08 PM	PHl3 MFC set to  0.000000
7/28/2011	3:23:08 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:23:08 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:23:08 PM	Tube furnace set to 0
7/28/2011	3:23:38 PM	Helium valve closed
7/28/2011	3:23:38 PM	H2 valve closed
7/28/2011	3:23:38 PM	BCl3 valve closed
7/28/2011	3:23:38 PM	PH3 valve closed
7/28/2011	3:23:38 PM	SiCl4 pre valve closed
7/28/2011	3:23:38 PM	SiCl4 post valve closed
7/28/2011	3:23:38 PM	Bypass valve closed
7/28/2011	3:23:38 PM	Bubbler valve closed
7/28/2011	3:23:38 PM	Main Vac valve opened
7/28/2011	3:23:38 PM	Helium MFC set to  0.000000
7/28/2011	3:23:38 PM	H2 MFC set to  0.000000
7/28/2011	3:23:38 PM	BCl3 MFC set to  0.000000
7/28/2011	3:23:38 PM	PHl3 MFC set to  0.000000
7/28/2011	3:23:38 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:23:38 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:23:38 PM	Tube furnace set to 0
7/28/2011	3:24:08 PM	H2 valve closed
7/28/2011	3:24:08 PM	BCl3 valve closed
7/28/2011	3:24:08 PM	PH3 valve closed
7/28/2011	3:24:08 PM	SiCl4 pre valve closed
7/28/2011	3:24:08 PM	SiCl4 post valve closed
7/28/2011	3:24:08 PM	Bypass valve closed
7/28/2011	3:24:08 PM	Bubbler valve closed
7/28/2011	3:24:08 PM	Helium valve opened
7/28/2011	3:24:08 PM	Main Vac valve opened
7/28/2011	3:24:08 PM	Helium MFC set to  20.000000
7/28/2011	3:24:08 PM	H2 MFC set to  0.000000
7/28/2011	3:24:08 PM	BCl3 MFC set to  0.000000
7/28/2011	3:24:08 PM	PHl3 MFC set to  0.000000
7/28/2011	3:24:08 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:24:08 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:24:08 PM	Tube furnace set to 0
7/28/2011	3:24:38 PM	Helium valve closed
7/28/2011	3:24:38 PM	H2 valve closed
7/28/2011	3:24:38 PM	BCl3 valve closed
7/28/2011	3:24:38 PM	PH3 valve closed
7/28/2011	3:24:38 PM	SiCl4 pre valve closed
7/28/2011	3:24:38 PM	SiCl4 post valve closed
7/28/2011	3:24:38 PM	Bypass valve closed
7/28/2011	3:24:38 PM	Bubbler valve closed
7/28/2011	3:24:38 PM	Main Vac valve opened
7/28/2011	3:24:38 PM	Helium MFC set to  0.000000
7/28/2011	3:24:38 PM	H2 MFC set to  0.000000
7/28/2011	3:24:38 PM	BCl3 MFC set to  0.000000
7/28/2011	3:24:38 PM	PHl3 MFC set to  0.000000
7/28/2011	3:24:38 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:24:38 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:24:39 PM	Tube furnace set to 0
7/28/2011	3:25:09 PM	H2 valve closed
7/28/2011	3:25:09 PM	BCl3 valve closed
7/28/2011	3:25:09 PM	PH3 valve closed
7/28/2011	3:25:09 PM	SiCl4 pre valve closed
7/28/2011	3:25:09 PM	SiCl4 post valve closed
7/28/2011	3:25:09 PM	Bypass valve closed
7/28/2011	3:25:09 PM	Bubbler valve closed
7/28/2011	3:25:09 PM	Helium valve opened
7/28/2011	3:25:09 PM	Main Vac valve opened
7/28/2011	3:25:09 PM	Helium MFC set to  20.000000
7/28/2011	3:25:09 PM	H2 MFC set to  0.000000
7/28/2011	3:25:09 PM	BCl3 MFC set to  0.000000
7/28/2011	3:25:09 PM	PHl3 MFC set to  0.000000
7/28/2011	3:25:09 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:25:09 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:25:09 PM	Tube furnace set to 0
7/28/2011	3:25:39 PM	Helium valve closed
7/28/2011	3:25:39 PM	H2 valve closed
7/28/2011	3:25:39 PM	BCl3 valve closed
7/28/2011	3:25:39 PM	PH3 valve closed
7/28/2011	3:25:39 PM	SiCl4 pre valve closed
7/28/2011	3:25:39 PM	SiCl4 post valve closed
7/28/2011	3:25:39 PM	Bypass valve closed
7/28/2011	3:25:39 PM	Bubbler valve closed
7/28/2011	3:25:39 PM	Main Vac valve opened
7/28/2011	3:25:39 PM	Helium MFC set to  0.000000
7/28/2011	3:25:39 PM	H2 MFC set to  0.000000
7/28/2011	3:25:39 PM	BCl3 MFC set to  0.000000
7/28/2011	3:25:39 PM	PHl3 MFC set to  0.000000
7/28/2011	3:25:39 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:25:39 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:25:39 PM	Tube furnace set to 0
7/28/2011	3:26:09 PM	H2 valve closed
7/28/2011	3:26:09 PM	BCl3 valve closed
7/28/2011	3:26:09 PM	PH3 valve closed
7/28/2011	3:26:09 PM	SiCl4 pre valve closed
7/28/2011	3:26:09 PM	SiCl4 post valve closed
7/28/2011	3:26:09 PM	Bypass valve closed
7/28/2011	3:26:09 PM	Bubbler valve closed
7/28/2011	3:26:09 PM	Helium valve opened
7/28/2011	3:26:09 PM	Main Vac valve opened
7/28/2011	3:26:09 PM	Helium MFC set to  20.000000
7/28/2011	3:26:09 PM	H2 MFC set to  0.000000
7/28/2011	3:26:09 PM	BCl3 MFC set to  0.000000
7/28/2011	3:26:09 PM	PHl3 MFC set to  0.000000
7/28/2011	3:26:09 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:26:09 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:26:09 PM	Tube furnace set to 0
7/28/2011	3:26:39 PM	Helium valve closed
7/28/2011	3:26:39 PM	H2 valve closed
7/28/2011	3:26:39 PM	BCl3 valve closed
7/28/2011	3:26:39 PM	PH3 valve closed
7/28/2011	3:26:39 PM	SiCl4 pre valve closed
7/28/2011	3:26:39 PM	SiCl4 post valve closed
7/28/2011	3:26:39 PM	Bypass valve closed
7/28/2011	3:26:39 PM	Bubbler valve closed
7/28/2011	3:26:39 PM	Main Vac valve opened
7/28/2011	3:26:39 PM	Helium MFC set to  0.000000
7/28/2011	3:26:39 PM	H2 MFC set to  0.000000
7/28/2011	3:26:39 PM	BCl3 MFC set to  0.000000
7/28/2011	3:26:39 PM	PHl3 MFC set to  0.000000
7/28/2011	3:26:39 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:26:39 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:26:39 PM	Tube furnace set to 200
7/28/2011	3:27:10 PM	H2 valve closed
7/28/2011	3:27:10 PM	BCl3 valve closed
7/28/2011	3:27:10 PM	PH3 valve closed
7/28/2011	3:27:10 PM	SiCl4 pre valve closed
7/28/2011	3:27:10 PM	SiCl4 post valve closed
7/28/2011	3:27:10 PM	Bypass valve closed
7/28/2011	3:27:10 PM	Bubbler valve closed
7/28/2011	3:27:10 PM	Helium valve opened
7/28/2011	3:27:10 PM	Main Vac valve opened
7/28/2011	3:27:10 PM	Helium MFC set to  20.000000
7/28/2011	3:27:10 PM	H2 MFC set to  0.000000
7/28/2011	3:27:10 PM	BCl3 MFC set to  0.000000
7/28/2011	3:27:10 PM	PHl3 MFC set to  0.000000
7/28/2011	3:27:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:27:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:27:10 PM	Tube furnace set to 200
7/28/2011	3:27:40 PM	Helium valve closed
7/28/2011	3:27:40 PM	H2 valve closed
7/28/2011	3:27:40 PM	BCl3 valve closed
7/28/2011	3:27:40 PM	PH3 valve closed
7/28/2011	3:27:40 PM	SiCl4 pre valve closed
7/28/2011	3:27:40 PM	SiCl4 post valve closed
7/28/2011	3:27:40 PM	Bypass valve closed
7/28/2011	3:27:40 PM	Bubbler valve closed
7/28/2011	3:27:40 PM	Main Vac valve opened
7/28/2011	3:27:40 PM	Helium MFC set to  0.000000
7/28/2011	3:27:40 PM	H2 MFC set to  0.000000
7/28/2011	3:27:40 PM	BCl3 MFC set to  0.000000
7/28/2011	3:27:40 PM	PHl3 MFC set to  0.000000
7/28/2011	3:27:40 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:27:40 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:27:40 PM	Tube furnace set to 200
7/28/2011	3:28:10 PM	H2 valve closed
7/28/2011	3:28:10 PM	BCl3 valve closed
7/28/2011	3:28:10 PM	PH3 valve closed
7/28/2011	3:28:10 PM	SiCl4 pre valve closed
7/28/2011	3:28:10 PM	SiCl4 post valve closed
7/28/2011	3:28:10 PM	Bypass valve closed
7/28/2011	3:28:10 PM	Bubbler valve closed
7/28/2011	3:28:10 PM	Helium valve opened
7/28/2011	3:28:10 PM	Main Vac valve opened
7/28/2011	3:28:10 PM	Helium MFC set to  20.000000
7/28/2011	3:28:10 PM	H2 MFC set to  0.000000
7/28/2011	3:28:10 PM	BCl3 MFC set to  0.000000
7/28/2011	3:28:10 PM	PHl3 MFC set to  0.000000
7/28/2011	3:28:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:28:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:28:10 PM	Tube furnace set to 200
7/28/2011	3:28:40 PM	Helium valve closed
7/28/2011	3:28:40 PM	H2 valve closed
7/28/2011	3:28:40 PM	BCl3 valve closed
7/28/2011	3:28:40 PM	PH3 valve closed
7/28/2011	3:28:40 PM	SiCl4 pre valve closed
7/28/2011	3:28:40 PM	SiCl4 post valve closed
7/28/2011	3:28:40 PM	Bypass valve closed
7/28/2011	3:28:40 PM	Bubbler valve closed
7/28/2011	3:28:40 PM	Main Vac valve opened
7/28/2011	3:28:40 PM	Helium MFC set to  0.000000
7/28/2011	3:28:40 PM	H2 MFC set to  0.000000
7/28/2011	3:28:40 PM	BCl3 MFC set to  0.000000
7/28/2011	3:28:40 PM	PHl3 MFC set to  0.000000
7/28/2011	3:28:40 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:28:40 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:28:40 PM	Tube furnace set to 200
7/28/2011	3:29:10 PM	H2 valve closed
7/28/2011	3:29:10 PM	BCl3 valve closed
7/28/2011	3:29:10 PM	PH3 valve closed
7/28/2011	3:29:10 PM	SiCl4 pre valve closed
7/28/2011	3:29:10 PM	SiCl4 post valve closed
7/28/2011	3:29:10 PM	Bypass valve closed
7/28/2011	3:29:10 PM	Bubbler valve closed
7/28/2011	3:29:10 PM	Helium valve opened
7/28/2011	3:29:10 PM	Main Vac valve opened
7/28/2011	3:29:10 PM	Helium MFC set to  20.000000
7/28/2011	3:29:10 PM	H2 MFC set to  0.000000
7/28/2011	3:29:10 PM	BCl3 MFC set to  0.000000
7/28/2011	3:29:10 PM	PHl3 MFC set to  0.000000
7/28/2011	3:29:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:29:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:29:11 PM	Tube furnace set to 200
7/28/2011	3:29:41 PM	Helium valve closed
7/28/2011	3:29:41 PM	H2 valve closed
7/28/2011	3:29:41 PM	BCl3 valve closed
7/28/2011	3:29:41 PM	PH3 valve closed
7/28/2011	3:29:41 PM	SiCl4 pre valve closed
7/28/2011	3:29:41 PM	SiCl4 post valve closed
7/28/2011	3:29:41 PM	Bypass valve closed
7/28/2011	3:29:41 PM	Bubbler valve closed
7/28/2011	3:29:41 PM	Main Vac valve opened
7/28/2011	3:29:41 PM	Helium MFC set to  0.000000
7/28/2011	3:29:41 PM	H2 MFC set to  0.000000
7/28/2011	3:29:41 PM	BCl3 MFC set to  0.000000
7/28/2011	3:29:41 PM	PHl3 MFC set to  0.000000
7/28/2011	3:29:41 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:29:41 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:29:41 PM	Tube furnace set to 200
7/28/2011	3:30:11 PM	H2 valve closed
7/28/2011	3:30:11 PM	BCl3 valve closed
7/28/2011	3:30:11 PM	PH3 valve closed
7/28/2011	3:30:11 PM	SiCl4 pre valve closed
7/28/2011	3:30:11 PM	SiCl4 post valve closed
7/28/2011	3:30:11 PM	Bypass valve closed
7/28/2011	3:30:11 PM	Bubbler valve closed
7/28/2011	3:30:11 PM	Helium valve opened
7/28/2011	3:30:11 PM	Main Vac valve opened
7/28/2011	3:30:11 PM	Helium MFC set to  20.000000
7/28/2011	3:30:11 PM	H2 MFC set to  0.000000
7/28/2011	3:30:11 PM	BCl3 MFC set to  0.000000
7/28/2011	3:30:11 PM	PHl3 MFC set to  0.000000
7/28/2011	3:30:11 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:30:11 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:30:11 PM	Tube furnace set to 200
7/28/2011	3:30:41 PM	Helium valve closed
7/28/2011	3:30:41 PM	H2 valve closed
7/28/2011	3:30:41 PM	BCl3 valve closed
7/28/2011	3:30:41 PM	PH3 valve closed
7/28/2011	3:30:41 PM	SiCl4 pre valve closed
7/28/2011	3:30:41 PM	SiCl4 post valve closed
7/28/2011	3:30:41 PM	Bypass valve closed
7/28/2011	3:30:41 PM	Bubbler valve closed
7/28/2011	3:30:41 PM	Main Vac valve opened
7/28/2011	3:30:41 PM	Helium MFC set to  0.000000
7/28/2011	3:30:41 PM	H2 MFC set to  0.000000
7/28/2011	3:30:41 PM	BCl3 MFC set to  0.000000
7/28/2011	3:30:41 PM	PHl3 MFC set to  0.000000
7/28/2011	3:30:41 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:30:41 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:30:41 PM	Tube furnace set to 200
7/28/2011	3:31:11 PM	H2 valve closed
7/28/2011	3:31:11 PM	BCl3 valve closed
7/28/2011	3:31:11 PM	PH3 valve closed
7/28/2011	3:31:11 PM	SiCl4 pre valve closed
7/28/2011	3:31:11 PM	SiCl4 post valve closed
7/28/2011	3:31:11 PM	Bypass valve closed
7/28/2011	3:31:11 PM	Bubbler valve closed
7/28/2011	3:31:11 PM	Helium valve opened
7/28/2011	3:31:11 PM	Main Vac valve opened
7/28/2011	3:31:11 PM	Helium MFC set to  20.000000
7/28/2011	3:31:11 PM	H2 MFC set to  0.000000
7/28/2011	3:31:11 PM	BCl3 MFC set to  0.000000
7/28/2011	3:31:11 PM	PHl3 MFC set to  0.000000
7/28/2011	3:31:11 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:31:11 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:31:11 PM	Tube furnace set to 200
7/28/2011	3:31:41 PM	Helium valve closed
7/28/2011	3:31:41 PM	H2 valve closed
7/28/2011	3:31:41 PM	BCl3 valve closed
7/28/2011	3:31:41 PM	PH3 valve closed
7/28/2011	3:31:41 PM	SiCl4 pre valve closed
7/28/2011	3:31:41 PM	SiCl4 post valve closed
7/28/2011	3:31:41 PM	Bypass valve closed
7/28/2011	3:31:41 PM	Bubbler valve closed
7/28/2011	3:31:41 PM	Main Vac valve opened
7/28/2011	3:31:41 PM	Helium MFC set to  0.000000
7/28/2011	3:31:41 PM	H2 MFC set to  0.000000
7/28/2011	3:31:41 PM	BCl3 MFC set to  0.000000
7/28/2011	3:31:41 PM	PHl3 MFC set to  0.000000
7/28/2011	3:31:41 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:31:41 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:31:42 PM	Tube furnace set to 200
7/28/2011	3:32:12 PM	H2 valve closed
7/28/2011	3:32:12 PM	BCl3 valve closed
7/28/2011	3:32:12 PM	PH3 valve closed
7/28/2011	3:32:12 PM	SiCl4 pre valve closed
7/28/2011	3:32:12 PM	SiCl4 post valve closed
7/28/2011	3:32:12 PM	Bypass valve closed
7/28/2011	3:32:12 PM	Bubbler valve closed
7/28/2011	3:32:12 PM	Helium valve opened
7/28/2011	3:32:12 PM	Main Vac valve opened
7/28/2011	3:32:12 PM	Helium MFC set to  20.000000
7/28/2011	3:32:12 PM	H2 MFC set to  0.000000
7/28/2011	3:32:12 PM	BCl3 MFC set to  0.000000
7/28/2011	3:32:12 PM	PHl3 MFC set to  0.000000
7/28/2011	3:32:12 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:32:12 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:32:12 PM	Tube furnace set to 200
7/28/2011	3:32:42 PM	Helium valve closed
7/28/2011	3:32:42 PM	H2 valve closed
7/28/2011	3:32:42 PM	BCl3 valve closed
7/28/2011	3:32:42 PM	PH3 valve closed
7/28/2011	3:32:42 PM	SiCl4 pre valve closed
7/28/2011	3:32:42 PM	SiCl4 post valve closed
7/28/2011	3:32:42 PM	Bypass valve closed
7/28/2011	3:32:42 PM	Bubbler valve closed
7/28/2011	3:32:42 PM	Main Vac valve opened
7/28/2011	3:32:42 PM	Helium MFC set to  0.000000
7/28/2011	3:32:42 PM	H2 MFC set to  0.000000
7/28/2011	3:32:42 PM	BCl3 MFC set to  0.000000
7/28/2011	3:32:42 PM	PHl3 MFC set to  0.000000
7/28/2011	3:32:42 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:32:42 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:32:42 PM	Tube furnace set to 0
7/28/2011	3:32:43 PM	Run finished at 3:32 PM
7/28/2011	3:34:57 PM	Main Vac valve closed
7/28/2011	3:35:04 PM	Main Vac valve opened
7/28/2011	3:35:44 PM	Recipe started at 3:35 PM
7/28/2011	3:35:44 PM	Helium valve closed
7/28/2011	3:35:44 PM	H2 valve closed
7/28/2011	3:35:44 PM	BCl3 valve closed
7/28/2011	3:35:44 PM	PH3 valve closed
7/28/2011	3:35:44 PM	SiCl4 pre valve closed
7/28/2011	3:35:44 PM	SiCl4 post valve closed
7/28/2011	3:35:44 PM	Main Vac valve closed
7/28/2011	3:35:44 PM	Bypass valve closed
7/28/2011	3:35:44 PM	Bubbler valve closed
7/28/2011	3:35:44 PM	Helium MFC set to  0.000000
7/28/2011	3:35:44 PM	H2 MFC set to  0.000000
7/28/2011	3:35:44 PM	BCl3 MFC set to  0.000000
7/28/2011	3:35:44 PM	PHl3 MFC set to  0.000000
7/28/2011	3:35:44 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:35:44 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:35:44 PM	Tube furnace set to 0
7/28/2011	3:35:47 PM	Helium valve closed
7/28/2011	3:35:47 PM	BCl3 valve closed
7/28/2011	3:35:47 PM	PH3 valve closed
7/28/2011	3:35:47 PM	SiCl4 pre valve closed
7/28/2011	3:35:47 PM	SiCl4 post valve closed
7/28/2011	3:35:47 PM	Main Vac valve closed
7/28/2011	3:35:47 PM	Bypass valve closed
7/28/2011	3:35:47 PM	Bubbler valve closed
7/28/2011	3:35:47 PM	H2 valve opened
7/28/2011	3:35:47 PM	Helium MFC set to  0.000000
7/28/2011	3:35:47 PM	H2 MFC set to  500.000000
7/28/2011	3:35:47 PM	BCl3 MFC set to  0.000000
7/28/2011	3:35:47 PM	PHl3 MFC set to  0.000000
7/28/2011	3:35:47 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:35:47 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:35:47 PM	Tube furnace set to 0
7/28/2011	3:36:52 PM	Helium valve closed
7/28/2011	3:36:52 PM	BCl3 valve closed
7/28/2011	3:36:52 PM	PH3 valve closed
7/28/2011	3:36:52 PM	SiCl4 pre valve closed
7/28/2011	3:36:52 PM	SiCl4 post valve closed
7/28/2011	3:36:52 PM	Main Vac valve closed
7/28/2011	3:36:52 PM	Bypass valve closed
7/28/2011	3:36:52 PM	H2 valve opened
7/28/2011	3:36:52 PM	Bubbler valve opened
7/28/2011	3:36:52 PM	Helium MFC set to  0.000000
7/28/2011	3:36:52 PM	H2 MFC set to  500.000000
7/28/2011	3:36:52 PM	BCl3 MFC set to  0.000000
7/28/2011	3:36:52 PM	PHl3 MFC set to  0.000000
7/28/2011	3:36:52 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:36:52 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:36:52 PM	Tube furnace set to 0
7/28/2011	3:36:53 PM	Helium valve closed
7/28/2011	3:36:53 PM	BCl3 valve closed
7/28/2011	3:36:53 PM	PH3 valve closed
7/28/2011	3:36:53 PM	SiCl4 pre valve closed
7/28/2011	3:36:53 PM	SiCl4 post valve closed
7/28/2011	3:36:53 PM	Main Vac valve closed
7/28/2011	3:36:53 PM	Bypass valve closed
7/28/2011	3:36:53 PM	H2 valve opened
7/28/2011	3:36:53 PM	Bubbler valve opened
7/28/2011	3:36:53 PM	Helium MFC set to  0.000000
7/28/2011	3:36:53 PM	H2 MFC set to  500.000000
7/28/2011	3:36:53 PM	BCl3 MFC set to  0.000000
7/28/2011	3:36:53 PM	PHl3 MFC set to  0.000000
7/28/2011	3:36:53 PM	SiCl4 MFC set to  0.000000
7/28/2011	3:36:53 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:36:54 PM	Tube furnace set to 1000
7/28/2011	3:56:53 PM	Helium valve closed
7/28/2011	3:56:53 PM	PH3 valve closed
7/28/2011	3:56:53 PM	Main Vac valve closed
7/28/2011	3:56:54 PM	Bypass valve closed
7/28/2011	3:56:54 PM	H2 valve opened
7/28/2011	3:56:54 PM	BCl3 valve opened
7/28/2011	3:56:54 PM	SiCl4 pre valve opened
7/28/2011	3:56:54 PM	SiCl4 post valve opened
7/28/2011	3:56:54 PM	Bubbler valve opened
7/28/2011	3:56:54 PM	Helium MFC set to  0.000000
7/28/2011	3:56:54 PM	H2 MFC set to  500.000000
7/28/2011	3:56:54 PM	BCl3 MFC set to  2.500000
7/28/2011	3:56:54 PM	PHl3 MFC set to  0.000000
7/28/2011	3:56:54 PM	SiCl4 MFC set to  50.000000
7/28/2011	3:56:54 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	3:56:54 PM	Tube furnace set to 1000
7/28/2011	4:12:54 PM	Helium valve closed
7/28/2011	4:12:54 PM	BCl3 valve closed
7/28/2011	4:12:54 PM	PH3 valve closed
7/28/2011	4:12:54 PM	SiCl4 pre valve closed
7/28/2011	4:12:54 PM	SiCl4 post valve closed
7/28/2011	4:12:54 PM	Main Vac valve closed
7/28/2011	4:12:54 PM	Bypass valve closed
7/28/2011	4:12:54 PM	H2 valve opened
7/28/2011	4:12:54 PM	Bubbler valve opened
7/28/2011	4:12:54 PM	Helium MFC set to  0.000000
7/28/2011	4:12:54 PM	H2 MFC set to  500.000000
7/28/2011	4:12:54 PM	BCl3 MFC set to  0.000000
7/28/2011	4:12:54 PM	PHl3 MFC set to  0.000000
7/28/2011	4:12:54 PM	SiCl4 MFC set to  0.000000
7/28/2011	4:12:54 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	4:12:54 PM	Tube furnace set to 750
7/28/2011	4:17:54 PM	H2 valve closed
7/28/2011	4:17:54 PM	BCl3 valve closed
7/28/2011	4:17:54 PM	PH3 valve closed
7/28/2011	4:17:54 PM	SiCl4 pre valve closed
7/28/2011	4:17:54 PM	SiCl4 post valve closed
7/28/2011	4:17:54 PM	Main Vac valve closed
7/28/2011	4:17:54 PM	Bypass valve closed
7/28/2011	4:17:54 PM	Helium valve opened
7/28/2011	4:17:54 PM	Bubbler valve opened
7/28/2011	4:17:54 PM	Helium MFC set to  500.000000
7/28/2011	4:17:54 PM	H2 MFC set to  0.000000
7/28/2011	4:17:54 PM	BCl3 MFC set to  0.000000
7/28/2011	4:17:54 PM	PHl3 MFC set to  0.000000
7/28/2011	4:17:54 PM	SiCl4 MFC set to  0.000000
7/28/2011	4:17:54 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	4:17:54 PM	Tube furnace set to 0
7/28/2011	4:37:54 PM	Helium valve closed
7/28/2011	4:37:54 PM	H2 valve closed
7/28/2011	4:37:54 PM	BCl3 valve closed
7/28/2011	4:37:54 PM	PH3 valve closed
7/28/2011	4:37:54 PM	SiCl4 pre valve closed
7/28/2011	4:37:54 PM	SiCl4 post valve closed
7/28/2011	4:37:54 PM	Main Vac valve closed
7/28/2011	4:37:54 PM	Bypass valve closed
7/28/2011	4:37:54 PM	Bubbler valve closed
7/28/2011	4:37:54 PM	Helium MFC set to  0.000000
7/28/2011	4:37:54 PM	H2 MFC set to  0.000000
7/28/2011	4:37:54 PM	BCl3 MFC set to  0.000000
7/28/2011	4:37:54 PM	PHl3 MFC set to  0.000000
7/28/2011	4:37:54 PM	SiCl4 MFC set to  0.000000
7/28/2011	4:37:54 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	4:37:54 PM	Tube furnace set to 0
7/28/2011	4:37:55 PM	Run finished at 4:37 PM
7/28/2011	6:38:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2011	6:38:52 PM	Recipe started at 6:38 PM
7/28/2011	6:38:52 PM	Helium valve closed
7/28/2011	6:38:52 PM	H2 valve closed
7/28/2011	6:38:52 PM	BCl3 valve closed
7/28/2011	6:38:52 PM	PH3 valve closed
7/28/2011	6:38:52 PM	SiCl4 pre valve closed
7/28/2011	6:38:52 PM	SiCl4 post valve closed
7/28/2011	6:38:52 PM	Main Vac valve closed
7/28/2011	6:38:52 PM	Bypass valve closed
7/28/2011	6:38:52 PM	Bubbler valve closed
7/28/2011	6:38:52 PM	Helium MFC set to  0.000000
7/28/2011	6:38:52 PM	H2 MFC set to  0.000000
7/28/2011	6:38:52 PM	BCl3 MFC set to  0.000000
7/28/2011	6:38:52 PM	PHl3 MFC set to  0.000000
7/28/2011	6:38:52 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:38:52 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:38:52 PM	Tube furnace set to 0
7/28/2011	6:38:55 PM	H2 valve closed
7/28/2011	6:38:55 PM	BCl3 valve closed
7/28/2011	6:38:55 PM	PH3 valve closed
7/28/2011	6:38:55 PM	SiCl4 pre valve closed
7/28/2011	6:38:55 PM	SiCl4 post valve closed
7/28/2011	6:38:55 PM	Main Vac valve closed
7/28/2011	6:38:55 PM	Bypass valve closed
7/28/2011	6:38:55 PM	Bubbler valve closed
7/28/2011	6:38:55 PM	Helium valve opened
7/28/2011	6:38:55 PM	Helium MFC set to  500.000000
7/28/2011	6:38:55 PM	H2 MFC set to  0.000000
7/28/2011	6:38:55 PM	BCl3 MFC set to  0.000000
7/28/2011	6:38:55 PM	PHl3 MFC set to  0.000000
7/28/2011	6:38:55 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:38:55 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:38:55 PM	Tube furnace set to 0
7/28/2011	6:39:00 PM	Helium valve closed
7/28/2011	6:39:00 PM	H2 valve closed
7/28/2011	6:39:00 PM	BCl3 valve closed
7/28/2011	6:39:00 PM	PH3 valve closed
7/28/2011	6:39:00 PM	SiCl4 pre valve closed
7/28/2011	6:39:00 PM	SiCl4 post valve closed
7/28/2011	6:39:00 PM	Main Vac valve closed
7/28/2011	6:39:00 PM	Bypass valve closed
7/28/2011	6:39:00 PM	Bubbler valve closed
7/28/2011	6:39:00 PM	Helium MFC set to  0.000000
7/28/2011	6:39:00 PM	H2 MFC set to  0.000000
7/28/2011	6:39:00 PM	BCl3 MFC set to  0.000000
7/28/2011	6:39:00 PM	PHl3 MFC set to  0.000000
7/28/2011	6:39:00 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:39:00 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:39:00 PM	Tube furnace set to 0
7/28/2011	6:39:01 PM	Run finished at 6:39 PM
7/28/2011	6:39:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/28/2011	6:45:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	6:45:10 PM	Recipe started at 6:45 PM
7/28/2011	6:45:10 PM	Helium valve closed
7/28/2011	6:45:10 PM	H2 valve closed
7/28/2011	6:45:10 PM	BCl3 valve closed
7/28/2011	6:45:10 PM	PH3 valve closed
7/28/2011	6:45:10 PM	SiCl4 pre valve closed
7/28/2011	6:45:10 PM	SiCl4 post valve closed
7/28/2011	6:45:10 PM	Main Vac valve closed
7/28/2011	6:45:10 PM	Bubbler valve closed
7/28/2011	6:45:10 PM	Bypass valve opened
7/28/2011	6:45:10 PM	Helium MFC set to  0.000000
7/28/2011	6:45:10 PM	H2 MFC set to  0.000000
7/28/2011	6:45:10 PM	BCl3 MFC set to  0.000000
7/28/2011	6:45:10 PM	PHl3 MFC set to  0.000000
7/28/2011	6:45:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:45:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:45:11 PM	Tube furnace set to 0
7/28/2011	6:46:18 PM	Helium valve closed
7/28/2011	6:46:18 PM	H2 valve closed
7/28/2011	6:46:18 PM	BCl3 valve closed
7/28/2011	6:46:18 PM	PH3 valve closed
7/28/2011	6:46:18 PM	SiCl4 pre valve closed
7/28/2011	6:46:18 PM	SiCl4 post valve closed
7/28/2011	6:46:18 PM	Main Vac valve closed
7/28/2011	6:46:18 PM	Bubbler valve closed
7/28/2011	6:46:18 PM	Bypass valve opened
7/28/2011	6:46:18 PM	Helium MFC set to  0.000000
7/28/2011	6:46:18 PM	H2 MFC set to  0.000000
7/28/2011	6:46:18 PM	BCl3 MFC set to  0.000000
7/28/2011	6:46:18 PM	PHl3 MFC set to  0.000000
7/28/2011	6:46:18 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:46:18 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:46:18 PM	Tube furnace set to 0
7/28/2011	6:47:18 PM	Helium valve closed
7/28/2011	6:47:18 PM	H2 valve closed
7/28/2011	6:47:18 PM	BCl3 valve closed
7/28/2011	6:47:18 PM	PH3 valve closed
7/28/2011	6:47:18 PM	SiCl4 pre valve closed
7/28/2011	6:47:18 PM	SiCl4 post valve closed
7/28/2011	6:47:18 PM	Bypass valve closed
7/28/2011	6:47:18 PM	Bubbler valve closed
7/28/2011	6:47:18 PM	Main Vac valve opened
7/28/2011	6:47:18 PM	Helium MFC set to  0.000000
7/28/2011	6:47:18 PM	H2 MFC set to  0.000000
7/28/2011	6:47:18 PM	BCl3 MFC set to  0.000000
7/28/2011	6:47:18 PM	PHl3 MFC set to  0.000000
7/28/2011	6:47:18 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:47:18 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:47:18 PM	Tube furnace set to 0
7/28/2011	6:47:19 PM	Run finished at 6:47 PM
7/28/2011	6:47:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	6:53:58 PM	Tube furnace set to 350
7/28/2011	6:56:02 PM	Recipe started at 6:55 PM
7/28/2011	6:56:02 PM	Helium valve closed
7/28/2011	6:56:02 PM	H2 valve closed
7/28/2011	6:56:02 PM	BCl3 valve closed
7/28/2011	6:56:02 PM	PH3 valve closed
7/28/2011	6:56:02 PM	SiCl4 pre valve closed
7/28/2011	6:56:02 PM	SiCl4 post valve closed
7/28/2011	6:56:02 PM	Bypass valve closed
7/28/2011	6:56:02 PM	Bubbler valve closed
7/28/2011	6:56:02 PM	Main Vac valve opened
7/28/2011	6:56:02 PM	Helium MFC set to  0.000000
7/28/2011	6:56:02 PM	H2 MFC set to  0.000000
7/28/2011	6:56:02 PM	BCl3 MFC set to  0.000000
7/28/2011	6:56:02 PM	PHl3 MFC set to  0.000000
7/28/2011	6:56:02 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:56:02 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:56:02 PM	Tube furnace set to 0
7/28/2011	6:56:32 PM	H2 valve closed
7/28/2011	6:56:32 PM	BCl3 valve closed
7/28/2011	6:56:32 PM	PH3 valve closed
7/28/2011	6:56:32 PM	SiCl4 pre valve closed
7/28/2011	6:56:32 PM	SiCl4 post valve closed
7/28/2011	6:56:32 PM	Bypass valve closed
7/28/2011	6:56:32 PM	Bubbler valve closed
7/28/2011	6:56:32 PM	Helium valve opened
7/28/2011	6:56:32 PM	Main Vac valve opened
7/28/2011	6:56:32 PM	Helium MFC set to  20.000000
7/28/2011	6:56:32 PM	H2 MFC set to  0.000000
7/28/2011	6:56:32 PM	BCl3 MFC set to  0.000000
7/28/2011	6:56:32 PM	PHl3 MFC set to  0.000000
7/28/2011	6:56:32 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:56:32 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:56:32 PM	Tube furnace set to 0
7/28/2011	6:57:02 PM	Helium valve closed
7/28/2011	6:57:02 PM	H2 valve closed
7/28/2011	6:57:02 PM	BCl3 valve closed
7/28/2011	6:57:03 PM	PH3 valve closed
7/28/2011	6:57:03 PM	SiCl4 pre valve closed
7/28/2011	6:57:03 PM	SiCl4 post valve closed
7/28/2011	6:57:03 PM	Bypass valve closed
7/28/2011	6:57:03 PM	Bubbler valve closed
7/28/2011	6:57:03 PM	Main Vac valve opened
7/28/2011	6:57:03 PM	Helium MFC set to  0.000000
7/28/2011	6:57:03 PM	H2 MFC set to  0.000000
7/28/2011	6:57:03 PM	BCl3 MFC set to  0.000000
7/28/2011	6:57:03 PM	PHl3 MFC set to  0.000000
7/28/2011	6:57:03 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:57:03 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:57:03 PM	Tube furnace set to 0
7/28/2011	6:57:33 PM	H2 valve closed
7/28/2011	6:57:33 PM	BCl3 valve closed
7/28/2011	6:57:33 PM	PH3 valve closed
7/28/2011	6:57:33 PM	SiCl4 pre valve closed
7/28/2011	6:57:33 PM	SiCl4 post valve closed
7/28/2011	6:57:33 PM	Bypass valve closed
7/28/2011	6:57:33 PM	Bubbler valve closed
7/28/2011	6:57:33 PM	Helium valve opened
7/28/2011	6:57:33 PM	Main Vac valve opened
7/28/2011	6:57:33 PM	Helium MFC set to  20.000000
7/28/2011	6:57:33 PM	H2 MFC set to  0.000000
7/28/2011	6:57:33 PM	BCl3 MFC set to  0.000000
7/28/2011	6:57:33 PM	PHl3 MFC set to  0.000000
7/28/2011	6:57:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:57:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:57:33 PM	Tube furnace set to 0
7/28/2011	6:58:03 PM	Helium valve closed
7/28/2011	6:58:03 PM	H2 valve closed
7/28/2011	6:58:03 PM	BCl3 valve closed
7/28/2011	6:58:03 PM	PH3 valve closed
7/28/2011	6:58:03 PM	SiCl4 pre valve closed
7/28/2011	6:58:03 PM	SiCl4 post valve closed
7/28/2011	6:58:03 PM	Bypass valve closed
7/28/2011	6:58:03 PM	Bubbler valve closed
7/28/2011	6:58:03 PM	Main Vac valve opened
7/28/2011	6:58:03 PM	Helium MFC set to  0.000000
7/28/2011	6:58:03 PM	H2 MFC set to  0.000000
7/28/2011	6:58:03 PM	BCl3 MFC set to  0.000000
7/28/2011	6:58:03 PM	PHl3 MFC set to  0.000000
7/28/2011	6:58:03 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:58:03 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:58:03 PM	Tube furnace set to 0
7/28/2011	6:58:33 PM	H2 valve closed
7/28/2011	6:58:33 PM	BCl3 valve closed
7/28/2011	6:58:33 PM	PH3 valve closed
7/28/2011	6:58:33 PM	SiCl4 pre valve closed
7/28/2011	6:58:33 PM	SiCl4 post valve closed
7/28/2011	6:58:33 PM	Bypass valve closed
7/28/2011	6:58:33 PM	Bubbler valve closed
7/28/2011	6:58:33 PM	Helium valve opened
7/28/2011	6:58:33 PM	Main Vac valve opened
7/28/2011	6:58:33 PM	Helium MFC set to  20.000000
7/28/2011	6:58:33 PM	H2 MFC set to  0.000000
7/28/2011	6:58:33 PM	BCl3 MFC set to  0.000000
7/28/2011	6:58:33 PM	PHl3 MFC set to  0.000000
7/28/2011	6:58:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:58:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:58:33 PM	Tube furnace set to 0
7/28/2011	6:59:03 PM	Helium valve closed
7/28/2011	6:59:03 PM	H2 valve closed
7/28/2011	6:59:03 PM	BCl3 valve closed
7/28/2011	6:59:03 PM	PH3 valve closed
7/28/2011	6:59:03 PM	SiCl4 pre valve closed
7/28/2011	6:59:03 PM	SiCl4 post valve closed
7/28/2011	6:59:03 PM	Bypass valve closed
7/28/2011	6:59:03 PM	Bubbler valve closed
7/28/2011	6:59:03 PM	Main Vac valve opened
7/28/2011	6:59:03 PM	Helium MFC set to  0.000000
7/28/2011	6:59:03 PM	H2 MFC set to  0.000000
7/28/2011	6:59:03 PM	BCl3 MFC set to  0.000000
7/28/2011	6:59:03 PM	PHl3 MFC set to  0.000000
7/28/2011	6:59:03 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:59:03 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:59:03 PM	Tube furnace set to 0
7/28/2011	6:59:33 PM	H2 valve closed
7/28/2011	6:59:33 PM	BCl3 valve closed
7/28/2011	6:59:33 PM	PH3 valve closed
7/28/2011	6:59:33 PM	SiCl4 pre valve closed
7/28/2011	6:59:33 PM	SiCl4 post valve closed
7/28/2011	6:59:33 PM	Bypass valve closed
7/28/2011	6:59:33 PM	Bubbler valve closed
7/28/2011	6:59:33 PM	Helium valve opened
7/28/2011	6:59:33 PM	Main Vac valve opened
7/28/2011	6:59:33 PM	Helium MFC set to  20.000000
7/28/2011	6:59:33 PM	H2 MFC set to  0.000000
7/28/2011	6:59:34 PM	BCl3 MFC set to  0.000000
7/28/2011	6:59:34 PM	PHl3 MFC set to  0.000000
7/28/2011	6:59:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	6:59:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	6:59:34 PM	Tube furnace set to 0
7/28/2011	7:00:04 PM	Helium valve closed
7/28/2011	7:00:04 PM	H2 valve closed
7/28/2011	7:00:04 PM	BCl3 valve closed
7/28/2011	7:00:04 PM	PH3 valve closed
7/28/2011	7:00:04 PM	SiCl4 pre valve closed
7/28/2011	7:00:04 PM	SiCl4 post valve closed
7/28/2011	7:00:04 PM	Bypass valve closed
7/28/2011	7:00:04 PM	Bubbler valve closed
7/28/2011	7:00:04 PM	Main Vac valve opened
7/28/2011	7:00:04 PM	Helium MFC set to  0.000000
7/28/2011	7:00:04 PM	H2 MFC set to  0.000000
7/28/2011	7:00:04 PM	BCl3 MFC set to  0.000000
7/28/2011	7:00:04 PM	PHl3 MFC set to  0.000000
7/28/2011	7:00:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:00:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:00:04 PM	Tube furnace set to 0
7/28/2011	7:00:34 PM	H2 valve closed
7/28/2011	7:00:34 PM	BCl3 valve closed
7/28/2011	7:00:34 PM	PH3 valve closed
7/28/2011	7:00:34 PM	SiCl4 pre valve closed
7/28/2011	7:00:34 PM	SiCl4 post valve closed
7/28/2011	7:00:34 PM	Bypass valve closed
7/28/2011	7:00:34 PM	Bubbler valve closed
7/28/2011	7:00:34 PM	Helium valve opened
7/28/2011	7:00:34 PM	Main Vac valve opened
7/28/2011	7:00:34 PM	Helium MFC set to  20.000000
7/28/2011	7:00:34 PM	H2 MFC set to  0.000000
7/28/2011	7:00:34 PM	BCl3 MFC set to  0.000000
7/28/2011	7:00:34 PM	PHl3 MFC set to  0.000000
7/28/2011	7:00:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:00:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:00:34 PM	Tube furnace set to 0
7/28/2011	7:01:04 PM	Helium valve closed
7/28/2011	7:01:04 PM	H2 valve closed
7/28/2011	7:01:04 PM	BCl3 valve closed
7/28/2011	7:01:04 PM	PH3 valve closed
7/28/2011	7:01:04 PM	SiCl4 pre valve closed
7/28/2011	7:01:04 PM	SiCl4 post valve closed
7/28/2011	7:01:04 PM	Bypass valve closed
7/28/2011	7:01:04 PM	Bubbler valve closed
7/28/2011	7:01:04 PM	Main Vac valve opened
7/28/2011	7:01:04 PM	Helium MFC set to  0.000000
7/28/2011	7:01:04 PM	H2 MFC set to  0.000000
7/28/2011	7:01:04 PM	BCl3 MFC set to  0.000000
7/28/2011	7:01:04 PM	PHl3 MFC set to  0.000000
7/28/2011	7:01:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:01:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:01:04 PM	Tube furnace set to 0
7/28/2011	7:01:34 PM	H2 valve closed
7/28/2011	7:01:34 PM	BCl3 valve closed
7/28/2011	7:01:34 PM	PH3 valve closed
7/28/2011	7:01:34 PM	SiCl4 pre valve closed
7/28/2011	7:01:34 PM	SiCl4 post valve closed
7/28/2011	7:01:34 PM	Bypass valve closed
7/28/2011	7:01:34 PM	Bubbler valve closed
7/28/2011	7:01:34 PM	Helium valve opened
7/28/2011	7:01:34 PM	Main Vac valve opened
7/28/2011	7:01:34 PM	Helium MFC set to  20.000000
7/28/2011	7:01:34 PM	H2 MFC set to  0.000000
7/28/2011	7:01:34 PM	BCl3 MFC set to  0.000000
7/28/2011	7:01:34 PM	PHl3 MFC set to  0.000000
7/28/2011	7:01:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:01:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:01:34 PM	Tube furnace set to 0
7/28/2011	7:02:04 PM	Helium valve closed
7/28/2011	7:02:04 PM	H2 valve closed
7/28/2011	7:02:04 PM	BCl3 valve closed
7/28/2011	7:02:04 PM	PH3 valve closed
7/28/2011	7:02:04 PM	SiCl4 pre valve closed
7/28/2011	7:02:04 PM	SiCl4 post valve closed
7/28/2011	7:02:04 PM	Bypass valve closed
7/28/2011	7:02:04 PM	Bubbler valve closed
7/28/2011	7:02:04 PM	Main Vac valve opened
7/28/2011	7:02:04 PM	Helium MFC set to  0.000000
7/28/2011	7:02:04 PM	H2 MFC set to  0.000000
7/28/2011	7:02:04 PM	BCl3 MFC set to  0.000000
7/28/2011	7:02:04 PM	PHl3 MFC set to  0.000000
7/28/2011	7:02:04 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:02:04 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:02:05 PM	Tube furnace set to 0
7/28/2011	7:02:35 PM	H2 valve closed
7/28/2011	7:02:35 PM	BCl3 valve closed
7/28/2011	7:02:35 PM	PH3 valve closed
7/28/2011	7:02:35 PM	SiCl4 pre valve closed
7/28/2011	7:02:35 PM	SiCl4 post valve closed
7/28/2011	7:02:35 PM	Bypass valve closed
7/28/2011	7:02:35 PM	Bubbler valve closed
7/28/2011	7:02:35 PM	Helium valve opened
7/28/2011	7:02:35 PM	Main Vac valve opened
7/28/2011	7:02:35 PM	Helium MFC set to  20.000000
7/28/2011	7:02:35 PM	H2 MFC set to  0.000000
7/28/2011	7:02:35 PM	BCl3 MFC set to  0.000000
7/28/2011	7:02:35 PM	PHl3 MFC set to  0.000000
7/28/2011	7:02:35 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:02:35 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:02:35 PM	Tube furnace set to 0
7/28/2011	7:03:05 PM	Helium valve closed
7/28/2011	7:03:05 PM	H2 valve closed
7/28/2011	7:03:05 PM	BCl3 valve closed
7/28/2011	7:03:05 PM	PH3 valve closed
7/28/2011	7:03:05 PM	SiCl4 pre valve closed
7/28/2011	7:03:05 PM	SiCl4 post valve closed
7/28/2011	7:03:05 PM	Bypass valve closed
7/28/2011	7:03:05 PM	Bubbler valve closed
7/28/2011	7:03:05 PM	Main Vac valve opened
7/28/2011	7:03:05 PM	Helium MFC set to  0.000000
7/28/2011	7:03:05 PM	H2 MFC set to  0.000000
7/28/2011	7:03:05 PM	BCl3 MFC set to  0.000000
7/28/2011	7:03:05 PM	PHl3 MFC set to  0.000000
7/28/2011	7:03:05 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:03:05 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:03:05 PM	Tube furnace set to 0
7/28/2011	7:03:35 PM	H2 valve closed
7/28/2011	7:03:35 PM	BCl3 valve closed
7/28/2011	7:03:35 PM	PH3 valve closed
7/28/2011	7:03:35 PM	SiCl4 pre valve closed
7/28/2011	7:03:35 PM	SiCl4 post valve closed
7/28/2011	7:03:35 PM	Bypass valve closed
7/28/2011	7:03:35 PM	Bubbler valve closed
7/28/2011	7:03:35 PM	Helium valve opened
7/28/2011	7:03:35 PM	Main Vac valve opened
7/28/2011	7:03:35 PM	Helium MFC set to  20.000000
7/28/2011	7:03:35 PM	H2 MFC set to  0.000000
7/28/2011	7:03:35 PM	BCl3 MFC set to  0.000000
7/28/2011	7:03:35 PM	PHl3 MFC set to  0.000000
7/28/2011	7:03:35 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:03:35 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:03:35 PM	Tube furnace set to 0
7/28/2011	7:04:05 PM	Helium valve closed
7/28/2011	7:04:05 PM	H2 valve closed
7/28/2011	7:04:05 PM	BCl3 valve closed
7/28/2011	7:04:05 PM	PH3 valve closed
7/28/2011	7:04:05 PM	SiCl4 pre valve closed
7/28/2011	7:04:05 PM	SiCl4 post valve closed
7/28/2011	7:04:05 PM	Bypass valve closed
7/28/2011	7:04:05 PM	Bubbler valve closed
7/28/2011	7:04:05 PM	Main Vac valve opened
7/28/2011	7:04:05 PM	Helium MFC set to  0.000000
7/28/2011	7:04:05 PM	H2 MFC set to  0.000000
7/28/2011	7:04:05 PM	BCl3 MFC set to  0.000000
7/28/2011	7:04:05 PM	PHl3 MFC set to  0.000000
7/28/2011	7:04:05 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:04:05 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:04:05 PM	Tube furnace set to 0
7/28/2011	7:04:35 PM	H2 valve closed
7/28/2011	7:04:35 PM	BCl3 valve closed
7/28/2011	7:04:35 PM	PH3 valve closed
7/28/2011	7:04:35 PM	SiCl4 pre valve closed
7/28/2011	7:04:35 PM	SiCl4 post valve closed
7/28/2011	7:04:35 PM	Bypass valve closed
7/28/2011	7:04:35 PM	Bubbler valve closed
7/28/2011	7:04:35 PM	Helium valve opened
7/28/2011	7:04:35 PM	Main Vac valve opened
7/28/2011	7:04:35 PM	Helium MFC set to  20.000000
7/28/2011	7:04:35 PM	H2 MFC set to  0.000000
7/28/2011	7:04:35 PM	BCl3 MFC set to  0.000000
7/28/2011	7:04:35 PM	PHl3 MFC set to  0.000000
7/28/2011	7:04:35 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:04:35 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:04:36 PM	Tube furnace set to 0
7/28/2011	7:05:06 PM	Helium valve closed
7/28/2011	7:05:06 PM	H2 valve closed
7/28/2011	7:05:06 PM	BCl3 valve closed
7/28/2011	7:05:06 PM	PH3 valve closed
7/28/2011	7:05:06 PM	SiCl4 pre valve closed
7/28/2011	7:05:06 PM	SiCl4 post valve closed
7/28/2011	7:05:06 PM	Bypass valve closed
7/28/2011	7:05:06 PM	Bubbler valve closed
7/28/2011	7:05:06 PM	Main Vac valve opened
7/28/2011	7:05:06 PM	Helium MFC set to  0.000000
7/28/2011	7:05:06 PM	H2 MFC set to  0.000000
7/28/2011	7:05:06 PM	BCl3 MFC set to  0.000000
7/28/2011	7:05:06 PM	PHl3 MFC set to  0.000000
7/28/2011	7:05:06 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:05:06 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:05:06 PM	Tube furnace set to 200
7/28/2011	7:05:36 PM	H2 valve closed
7/28/2011	7:05:36 PM	BCl3 valve closed
7/28/2011	7:05:36 PM	PH3 valve closed
7/28/2011	7:05:36 PM	SiCl4 pre valve closed
7/28/2011	7:05:36 PM	SiCl4 post valve closed
7/28/2011	7:05:36 PM	Bypass valve closed
7/28/2011	7:05:36 PM	Bubbler valve closed
7/28/2011	7:05:36 PM	Helium valve opened
7/28/2011	7:05:36 PM	Main Vac valve opened
7/28/2011	7:05:36 PM	Helium MFC set to  20.000000
7/28/2011	7:05:36 PM	H2 MFC set to  0.000000
7/28/2011	7:05:36 PM	BCl3 MFC set to  0.000000
7/28/2011	7:05:36 PM	PHl3 MFC set to  0.000000
7/28/2011	7:05:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:05:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:05:36 PM	Tube furnace set to 200
7/28/2011	7:06:06 PM	Helium valve closed
7/28/2011	7:06:06 PM	H2 valve closed
7/28/2011	7:06:06 PM	BCl3 valve closed
7/28/2011	7:06:06 PM	PH3 valve closed
7/28/2011	7:06:06 PM	SiCl4 pre valve closed
7/28/2011	7:06:06 PM	SiCl4 post valve closed
7/28/2011	7:06:06 PM	Bypass valve closed
7/28/2011	7:06:06 PM	Bubbler valve closed
7/28/2011	7:06:06 PM	Main Vac valve opened
7/28/2011	7:06:06 PM	Helium MFC set to  0.000000
7/28/2011	7:06:06 PM	H2 MFC set to  0.000000
7/28/2011	7:06:06 PM	BCl3 MFC set to  0.000000
7/28/2011	7:06:06 PM	PHl3 MFC set to  0.000000
7/28/2011	7:06:06 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:06:06 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:06:06 PM	Tube furnace set to 200
7/28/2011	7:06:36 PM	H2 valve closed
7/28/2011	7:06:36 PM	BCl3 valve closed
7/28/2011	7:06:36 PM	PH3 valve closed
7/28/2011	7:06:36 PM	SiCl4 pre valve closed
7/28/2011	7:06:36 PM	SiCl4 post valve closed
7/28/2011	7:06:36 PM	Bypass valve closed
7/28/2011	7:06:36 PM	Bubbler valve closed
7/28/2011	7:06:36 PM	Helium valve opened
7/28/2011	7:06:36 PM	Main Vac valve opened
7/28/2011	7:06:36 PM	Helium MFC set to  20.000000
7/28/2011	7:06:36 PM	H2 MFC set to  0.000000
7/28/2011	7:06:36 PM	BCl3 MFC set to  0.000000
7/28/2011	7:06:36 PM	PHl3 MFC set to  0.000000
7/28/2011	7:06:36 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:06:36 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:06:36 PM	Tube furnace set to 200
7/28/2011	7:07:07 PM	Helium valve closed
7/28/2011	7:07:07 PM	H2 valve closed
7/28/2011	7:07:07 PM	BCl3 valve closed
7/28/2011	7:07:07 PM	PH3 valve closed
7/28/2011	7:07:07 PM	SiCl4 pre valve closed
7/28/2011	7:07:07 PM	SiCl4 post valve closed
7/28/2011	7:07:07 PM	Bypass valve closed
7/28/2011	7:07:07 PM	Bubbler valve closed
7/28/2011	7:07:07 PM	Main Vac valve opened
7/28/2011	7:07:07 PM	Helium MFC set to  0.000000
7/28/2011	7:07:07 PM	H2 MFC set to  0.000000
7/28/2011	7:07:07 PM	BCl3 MFC set to  0.000000
7/28/2011	7:07:07 PM	PHl3 MFC set to  0.000000
7/28/2011	7:07:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:07:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:07:07 PM	Tube furnace set to 200
7/28/2011	7:07:37 PM	H2 valve closed
7/28/2011	7:07:37 PM	BCl3 valve closed
7/28/2011	7:07:37 PM	PH3 valve closed
7/28/2011	7:07:37 PM	SiCl4 pre valve closed
7/28/2011	7:07:37 PM	SiCl4 post valve closed
7/28/2011	7:07:37 PM	Bypass valve closed
7/28/2011	7:07:37 PM	Bubbler valve closed
7/28/2011	7:07:37 PM	Helium valve opened
7/28/2011	7:07:37 PM	Main Vac valve opened
7/28/2011	7:07:37 PM	Helium MFC set to  20.000000
7/28/2011	7:07:37 PM	H2 MFC set to  0.000000
7/28/2011	7:07:37 PM	BCl3 MFC set to  0.000000
7/28/2011	7:07:37 PM	PHl3 MFC set to  0.000000
7/28/2011	7:07:37 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:07:37 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:07:37 PM	Tube furnace set to 200
7/28/2011	7:08:07 PM	Helium valve closed
7/28/2011	7:08:07 PM	H2 valve closed
7/28/2011	7:08:07 PM	BCl3 valve closed
7/28/2011	7:08:07 PM	PH3 valve closed
7/28/2011	7:08:07 PM	SiCl4 pre valve closed
7/28/2011	7:08:07 PM	SiCl4 post valve closed
7/28/2011	7:08:07 PM	Bypass valve closed
7/28/2011	7:08:07 PM	Bubbler valve closed
7/28/2011	7:08:07 PM	Main Vac valve opened
7/28/2011	7:08:07 PM	Helium MFC set to  0.000000
7/28/2011	7:08:07 PM	H2 MFC set to  0.000000
7/28/2011	7:08:07 PM	BCl3 MFC set to  0.000000
7/28/2011	7:08:07 PM	PHl3 MFC set to  0.000000
7/28/2011	7:08:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:08:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:08:07 PM	Tube furnace set to 200
7/28/2011	7:08:37 PM	H2 valve closed
7/28/2011	7:08:37 PM	BCl3 valve closed
7/28/2011	7:08:37 PM	PH3 valve closed
7/28/2011	7:08:37 PM	SiCl4 pre valve closed
7/28/2011	7:08:37 PM	SiCl4 post valve closed
7/28/2011	7:08:37 PM	Bypass valve closed
7/28/2011	7:08:37 PM	Bubbler valve closed
7/28/2011	7:08:37 PM	Helium valve opened
7/28/2011	7:08:37 PM	Main Vac valve opened
7/28/2011	7:08:37 PM	Helium MFC set to  20.000000
7/28/2011	7:08:37 PM	H2 MFC set to  0.000000
7/28/2011	7:08:37 PM	BCl3 MFC set to  0.000000
7/28/2011	7:08:37 PM	PHl3 MFC set to  0.000000
7/28/2011	7:08:37 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:08:37 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:08:37 PM	Tube furnace set to 200
7/28/2011	7:09:07 PM	Helium valve closed
7/28/2011	7:09:07 PM	H2 valve closed
7/28/2011	7:09:07 PM	BCl3 valve closed
7/28/2011	7:09:07 PM	PH3 valve closed
7/28/2011	7:09:07 PM	SiCl4 pre valve closed
7/28/2011	7:09:07 PM	SiCl4 post valve closed
7/28/2011	7:09:07 PM	Bypass valve closed
7/28/2011	7:09:07 PM	Bubbler valve closed
7/28/2011	7:09:07 PM	Main Vac valve opened
7/28/2011	7:09:07 PM	Helium MFC set to  0.000000
7/28/2011	7:09:07 PM	H2 MFC set to  0.000000
7/28/2011	7:09:07 PM	BCl3 MFC set to  0.000000
7/28/2011	7:09:07 PM	PHl3 MFC set to  0.000000
7/28/2011	7:09:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:09:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:09:08 PM	Tube furnace set to 200
7/28/2011	7:09:38 PM	H2 valve closed
7/28/2011	7:09:38 PM	BCl3 valve closed
7/28/2011	7:09:38 PM	PH3 valve closed
7/28/2011	7:09:38 PM	SiCl4 pre valve closed
7/28/2011	7:09:38 PM	SiCl4 post valve closed
7/28/2011	7:09:38 PM	Bypass valve closed
7/28/2011	7:09:38 PM	Bubbler valve closed
7/28/2011	7:09:38 PM	Helium valve opened
7/28/2011	7:09:38 PM	Main Vac valve opened
7/28/2011	7:09:38 PM	Helium MFC set to  20.000000
7/28/2011	7:09:38 PM	H2 MFC set to  0.000000
7/28/2011	7:09:38 PM	BCl3 MFC set to  0.000000
7/28/2011	7:09:38 PM	PHl3 MFC set to  0.000000
7/28/2011	7:09:38 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:09:38 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:09:38 PM	Tube furnace set to 200
7/28/2011	7:10:08 PM	Helium valve closed
7/28/2011	7:10:08 PM	H2 valve closed
7/28/2011	7:10:08 PM	BCl3 valve closed
7/28/2011	7:10:08 PM	PH3 valve closed
7/28/2011	7:10:08 PM	SiCl4 pre valve closed
7/28/2011	7:10:08 PM	SiCl4 post valve closed
7/28/2011	7:10:08 PM	Bypass valve closed
7/28/2011	7:10:08 PM	Bubbler valve closed
7/28/2011	7:10:08 PM	Main Vac valve opened
7/28/2011	7:10:08 PM	Helium MFC set to  0.000000
7/28/2011	7:10:08 PM	H2 MFC set to  0.000000
7/28/2011	7:10:08 PM	BCl3 MFC set to  0.000000
7/28/2011	7:10:08 PM	PHl3 MFC set to  0.000000
7/28/2011	7:10:08 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:10:08 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:10:08 PM	Tube furnace set to 200
7/28/2011	7:10:38 PM	H2 valve closed
7/28/2011	7:10:38 PM	BCl3 valve closed
7/28/2011	7:10:38 PM	PH3 valve closed
7/28/2011	7:10:38 PM	SiCl4 pre valve closed
7/28/2011	7:10:38 PM	SiCl4 post valve closed
7/28/2011	7:10:38 PM	Bypass valve closed
7/28/2011	7:10:38 PM	Bubbler valve closed
7/28/2011	7:10:38 PM	Helium valve opened
7/28/2011	7:10:38 PM	Main Vac valve opened
7/28/2011	7:10:38 PM	Helium MFC set to  20.000000
7/28/2011	7:10:38 PM	H2 MFC set to  0.000000
7/28/2011	7:10:38 PM	BCl3 MFC set to  0.000000
7/28/2011	7:10:38 PM	PHl3 MFC set to  0.000000
7/28/2011	7:10:38 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:10:38 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:10:38 PM	Tube furnace set to 200
7/28/2011	7:11:08 PM	Helium valve closed
7/28/2011	7:11:08 PM	H2 valve closed
7/28/2011	7:11:08 PM	BCl3 valve closed
7/28/2011	7:11:08 PM	PH3 valve closed
7/28/2011	7:11:08 PM	SiCl4 pre valve closed
7/28/2011	7:11:08 PM	SiCl4 post valve closed
7/28/2011	7:11:08 PM	Bypass valve closed
7/28/2011	7:11:08 PM	Bubbler valve closed
7/28/2011	7:11:08 PM	Main Vac valve opened
7/28/2011	7:11:08 PM	Helium MFC set to  0.000000
7/28/2011	7:11:08 PM	H2 MFC set to  0.000000
7/28/2011	7:11:08 PM	BCl3 MFC set to  0.000000
7/28/2011	7:11:08 PM	PHl3 MFC set to  0.000000
7/28/2011	7:11:08 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:11:08 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:11:08 PM	Tube furnace set to 0
7/28/2011	7:11:09 PM	Run finished at 7:11 PM
7/28/2011	7:28:44 PM	Main Vac valve closed
7/28/2011	7:28:52 PM	Main Vac valve opened
7/28/2011	7:29:25 PM	Recipe started at 7:29 PM
7/28/2011	7:29:25 PM	Helium valve closed
7/28/2011	7:29:25 PM	H2 valve closed
7/28/2011	7:29:25 PM	BCl3 valve closed
7/28/2011	7:29:25 PM	PH3 valve closed
7/28/2011	7:29:25 PM	SiCl4 pre valve closed
7/28/2011	7:29:25 PM	SiCl4 post valve closed
7/28/2011	7:29:25 PM	Main Vac valve closed
7/28/2011	7:29:25 PM	Bypass valve closed
7/28/2011	7:29:25 PM	Bubbler valve closed
7/28/2011	7:29:25 PM	Helium MFC set to  0.000000
7/28/2011	7:29:25 PM	H2 MFC set to  0.000000
7/28/2011	7:29:25 PM	BCl3 MFC set to  0.000000
7/28/2011	7:29:25 PM	PHl3 MFC set to  0.000000
7/28/2011	7:29:25 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:29:25 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:29:25 PM	Tube furnace set to 0
7/28/2011	7:29:28 PM	Helium valve closed
7/28/2011	7:29:28 PM	BCl3 valve closed
7/28/2011	7:29:28 PM	PH3 valve closed
7/28/2011	7:29:28 PM	SiCl4 pre valve closed
7/28/2011	7:29:28 PM	SiCl4 post valve closed
7/28/2011	7:29:28 PM	Main Vac valve closed
7/28/2011	7:29:28 PM	Bypass valve closed
7/28/2011	7:29:28 PM	Bubbler valve closed
7/28/2011	7:29:28 PM	H2 valve opened
7/28/2011	7:29:28 PM	Helium MFC set to  0.000000
7/28/2011	7:29:28 PM	H2 MFC set to  500.000000
7/28/2011	7:29:28 PM	BCl3 MFC set to  0.000000
7/28/2011	7:29:28 PM	PHl3 MFC set to  0.000000
7/28/2011	7:29:28 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:29:28 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:29:28 PM	Tube furnace set to 0
7/28/2011	7:30:32 PM	Helium valve closed
7/28/2011	7:30:32 PM	BCl3 valve closed
7/28/2011	7:30:32 PM	PH3 valve closed
7/28/2011	7:30:32 PM	SiCl4 pre valve closed
7/28/2011	7:30:32 PM	SiCl4 post valve closed
7/28/2011	7:30:32 PM	Main Vac valve closed
7/28/2011	7:30:32 PM	Bypass valve closed
7/28/2011	7:30:32 PM	H2 valve opened
7/28/2011	7:30:32 PM	Bubbler valve opened
7/28/2011	7:30:32 PM	Helium MFC set to  0.000000
7/28/2011	7:30:32 PM	H2 MFC set to  500.000000
7/28/2011	7:30:32 PM	BCl3 MFC set to  0.000000
7/28/2011	7:30:32 PM	PHl3 MFC set to  0.000000
7/28/2011	7:30:32 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:30:32 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:30:32 PM	Tube furnace set to 0
7/28/2011	7:30:33 PM	Helium valve closed
7/28/2011	7:30:33 PM	BCl3 valve closed
7/28/2011	7:30:33 PM	PH3 valve closed
7/28/2011	7:30:33 PM	SiCl4 pre valve closed
7/28/2011	7:30:33 PM	SiCl4 post valve closed
7/28/2011	7:30:33 PM	Main Vac valve closed
7/28/2011	7:30:33 PM	Bypass valve closed
7/28/2011	7:30:33 PM	H2 valve opened
7/28/2011	7:30:33 PM	Bubbler valve opened
7/28/2011	7:30:33 PM	Helium MFC set to  0.000000
7/28/2011	7:30:33 PM	H2 MFC set to  500.000000
7/28/2011	7:30:33 PM	BCl3 MFC set to  0.000000
7/28/2011	7:30:33 PM	PHl3 MFC set to  0.000000
7/28/2011	7:30:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	7:30:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:30:33 PM	Tube furnace set to 1000
7/28/2011	7:50:33 PM	Helium valve closed
7/28/2011	7:50:33 PM	PH3 valve closed
7/28/2011	7:50:33 PM	Main Vac valve closed
7/28/2011	7:50:33 PM	Bypass valve closed
7/28/2011	7:50:33 PM	H2 valve opened
7/28/2011	7:50:33 PM	BCl3 valve opened
7/28/2011	7:50:33 PM	SiCl4 pre valve opened
7/28/2011	7:50:33 PM	SiCl4 post valve opened
7/28/2011	7:50:33 PM	Bubbler valve opened
7/28/2011	7:50:33 PM	Helium MFC set to  0.000000
7/28/2011	7:50:33 PM	H2 MFC set to  500.000000
7/28/2011	7:50:33 PM	BCl3 MFC set to  3.000000
7/28/2011	7:50:33 PM	PHl3 MFC set to  0.000000
7/28/2011	7:50:33 PM	SiCl4 MFC set to  50.000000
7/28/2011	7:50:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	7:50:33 PM	Tube furnace set to 1000
7/28/2011	8:06:33 PM	Helium valve closed
7/28/2011	8:06:33 PM	BCl3 valve closed
7/28/2011	8:06:33 PM	PH3 valve closed
7/28/2011	8:06:33 PM	SiCl4 pre valve closed
7/28/2011	8:06:33 PM	SiCl4 post valve closed
7/28/2011	8:06:33 PM	Main Vac valve closed
7/28/2011	8:06:33 PM	Bypass valve closed
7/28/2011	8:06:33 PM	H2 valve opened
7/28/2011	8:06:33 PM	Bubbler valve opened
7/28/2011	8:06:33 PM	Helium MFC set to  0.000000
7/28/2011	8:06:33 PM	H2 MFC set to  500.000000
7/28/2011	8:06:33 PM	BCl3 MFC set to  0.000000
7/28/2011	8:06:33 PM	PHl3 MFC set to  0.000000
7/28/2011	8:06:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:06:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:06:33 PM	Tube furnace set to 750
7/28/2011	8:11:33 PM	H2 valve closed
7/28/2011	8:11:33 PM	BCl3 valve closed
7/28/2011	8:11:33 PM	PH3 valve closed
7/28/2011	8:11:33 PM	SiCl4 pre valve closed
7/28/2011	8:11:33 PM	SiCl4 post valve closed
7/28/2011	8:11:33 PM	Main Vac valve closed
7/28/2011	8:11:33 PM	Bypass valve closed
7/28/2011	8:11:33 PM	Helium valve opened
7/28/2011	8:11:33 PM	Bubbler valve opened
7/28/2011	8:11:33 PM	Helium MFC set to  500.000000
7/28/2011	8:11:33 PM	H2 MFC set to  0.000000
7/28/2011	8:11:33 PM	BCl3 MFC set to  0.000000
7/28/2011	8:11:33 PM	PHl3 MFC set to  0.000000
7/28/2011	8:11:33 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:11:33 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:11:34 PM	Tube furnace set to 0
7/28/2011	8:31:33 PM	Helium valve closed
7/28/2011	8:31:33 PM	H2 valve closed
7/28/2011	8:31:33 PM	BCl3 valve closed
7/28/2011	8:31:33 PM	PH3 valve closed
7/28/2011	8:31:33 PM	SiCl4 pre valve closed
7/28/2011	8:31:33 PM	SiCl4 post valve closed
7/28/2011	8:31:33 PM	Main Vac valve closed
7/28/2011	8:31:33 PM	Bypass valve closed
7/28/2011	8:31:33 PM	Bubbler valve closed
7/28/2011	8:31:33 PM	Helium MFC set to  0.000000
7/28/2011	8:31:33 PM	H2 MFC set to  0.000000
7/28/2011	8:31:34 PM	BCl3 MFC set to  0.000000
7/28/2011	8:31:34 PM	PHl3 MFC set to  0.000000
7/28/2011	8:31:34 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:31:34 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:31:34 PM	Tube furnace set to 0
7/28/2011	8:31:35 PM	Run finished at 8:31 PM
7/28/2011	8:39:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	8:39:59 PM	Recipe started at 8:39 PM
7/28/2011	8:39:59 PM	Helium valve closed
7/28/2011	8:39:59 PM	H2 valve closed
7/28/2011	8:39:59 PM	BCl3 valve closed
7/28/2011	8:39:59 PM	PH3 valve closed
7/28/2011	8:39:59 PM	SiCl4 pre valve closed
7/28/2011	8:39:59 PM	SiCl4 post valve closed
7/28/2011	8:39:59 PM	Main Vac valve closed
7/28/2011	8:39:59 PM	Bubbler valve closed
7/28/2011	8:39:59 PM	Bypass valve opened
7/28/2011	8:39:59 PM	Helium MFC set to  0.000000
7/28/2011	8:39:59 PM	H2 MFC set to  0.000000
7/28/2011	8:39:59 PM	BCl3 MFC set to  0.000000
7/28/2011	8:39:59 PM	PHl3 MFC set to  0.000000
7/28/2011	8:39:59 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:39:59 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:39:59 PM	Tube furnace set to 0
7/28/2011	8:41:02 PM	Helium valve closed
7/28/2011	8:41:02 PM	H2 valve closed
7/28/2011	8:41:02 PM	BCl3 valve closed
7/28/2011	8:41:02 PM	PH3 valve closed
7/28/2011	8:41:02 PM	SiCl4 pre valve closed
7/28/2011	8:41:02 PM	SiCl4 post valve closed
7/28/2011	8:41:02 PM	Main Vac valve closed
7/28/2011	8:41:02 PM	Bubbler valve closed
7/28/2011	8:41:02 PM	Bypass valve opened
7/28/2011	8:41:02 PM	Helium MFC set to  0.000000
7/28/2011	8:41:02 PM	H2 MFC set to  0.000000
7/28/2011	8:41:02 PM	BCl3 MFC set to  0.000000
7/28/2011	8:41:02 PM	PHl3 MFC set to  0.000000
7/28/2011	8:41:02 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:41:02 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:41:02 PM	Tube furnace set to 0
7/28/2011	8:42:02 PM	Helium valve closed
7/28/2011	8:42:02 PM	H2 valve closed
7/28/2011	8:42:02 PM	BCl3 valve closed
7/28/2011	8:42:02 PM	PH3 valve closed
7/28/2011	8:42:02 PM	SiCl4 pre valve closed
7/28/2011	8:42:02 PM	SiCl4 post valve closed
7/28/2011	8:42:02 PM	Bypass valve closed
7/28/2011	8:42:02 PM	Bubbler valve closed
7/28/2011	8:42:02 PM	Main Vac valve opened
7/28/2011	8:42:02 PM	Helium MFC set to  0.000000
7/28/2011	8:42:02 PM	H2 MFC set to  0.000000
7/28/2011	8:42:02 PM	BCl3 MFC set to  0.000000
7/28/2011	8:42:02 PM	PHl3 MFC set to  0.000000
7/28/2011	8:42:02 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:42:02 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:42:03 PM	Tube furnace set to 0
7/28/2011	8:42:04 PM	Run finished at 8:42 PM
7/28/2011	8:42:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	8:42:39 PM	Recipe started at 8:42 PM
7/28/2011	8:42:39 PM	Helium valve closed
7/28/2011	8:42:39 PM	H2 valve closed
7/28/2011	8:42:39 PM	BCl3 valve closed
7/28/2011	8:42:39 PM	PH3 valve closed
7/28/2011	8:42:39 PM	SiCl4 pre valve closed
7/28/2011	8:42:39 PM	SiCl4 post valve closed
7/28/2011	8:42:39 PM	Bypass valve closed
7/28/2011	8:42:39 PM	Bubbler valve closed
7/28/2011	8:42:39 PM	Main Vac valve opened
7/28/2011	8:42:39 PM	Helium MFC set to  0.000000
7/28/2011	8:42:39 PM	H2 MFC set to  0.000000
7/28/2011	8:42:39 PM	BCl3 MFC set to  0.000000
7/28/2011	8:42:39 PM	PHl3 MFC set to  0.000000
7/28/2011	8:42:39 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:42:39 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:42:39 PM	Tube furnace set to 0
7/28/2011	8:43:09 PM	H2 valve closed
7/28/2011	8:43:09 PM	BCl3 valve closed
7/28/2011	8:43:09 PM	PH3 valve closed
7/28/2011	8:43:09 PM	SiCl4 pre valve closed
7/28/2011	8:43:09 PM	SiCl4 post valve closed
7/28/2011	8:43:09 PM	Bypass valve closed
7/28/2011	8:43:09 PM	Bubbler valve closed
7/28/2011	8:43:09 PM	Helium valve opened
7/28/2011	8:43:09 PM	Main Vac valve opened
7/28/2011	8:43:09 PM	Helium MFC set to  20.000000
7/28/2011	8:43:09 PM	H2 MFC set to  0.000000
7/28/2011	8:43:09 PM	BCl3 MFC set to  0.000000
7/28/2011	8:43:09 PM	PHl3 MFC set to  0.000000
7/28/2011	8:43:09 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:43:09 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:43:09 PM	Tube furnace set to 0
7/28/2011	8:43:39 PM	Helium valve closed
7/28/2011	8:43:39 PM	H2 valve closed
7/28/2011	8:43:39 PM	BCl3 valve closed
7/28/2011	8:43:39 PM	PH3 valve closed
7/28/2011	8:43:39 PM	SiCl4 pre valve closed
7/28/2011	8:43:39 PM	SiCl4 post valve closed
7/28/2011	8:43:39 PM	Bypass valve closed
7/28/2011	8:43:39 PM	Bubbler valve closed
7/28/2011	8:43:39 PM	Main Vac valve opened
7/28/2011	8:43:39 PM	Helium MFC set to  0.000000
7/28/2011	8:43:39 PM	H2 MFC set to  0.000000
7/28/2011	8:43:39 PM	BCl3 MFC set to  0.000000
7/28/2011	8:43:39 PM	PHl3 MFC set to  0.000000
7/28/2011	8:43:39 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:43:39 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:43:39 PM	Tube furnace set to 0
7/28/2011	8:44:09 PM	H2 valve closed
7/28/2011	8:44:09 PM	BCl3 valve closed
7/28/2011	8:44:09 PM	PH3 valve closed
7/28/2011	8:44:09 PM	SiCl4 pre valve closed
7/28/2011	8:44:09 PM	SiCl4 post valve closed
7/28/2011	8:44:09 PM	Bypass valve closed
7/28/2011	8:44:09 PM	Bubbler valve closed
7/28/2011	8:44:09 PM	Helium valve opened
7/28/2011	8:44:09 PM	Main Vac valve opened
7/28/2011	8:44:09 PM	Helium MFC set to  20.000000
7/28/2011	8:44:09 PM	H2 MFC set to  0.000000
7/28/2011	8:44:09 PM	BCl3 MFC set to  0.000000
7/28/2011	8:44:09 PM	PHl3 MFC set to  0.000000
7/28/2011	8:44:09 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:44:09 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:44:10 PM	Tube furnace set to 0
7/28/2011	8:44:40 PM	Helium valve closed
7/28/2011	8:44:40 PM	H2 valve closed
7/28/2011	8:44:40 PM	BCl3 valve closed
7/28/2011	8:44:40 PM	PH3 valve closed
7/28/2011	8:44:40 PM	SiCl4 pre valve closed
7/28/2011	8:44:40 PM	SiCl4 post valve closed
7/28/2011	8:44:40 PM	Bypass valve closed
7/28/2011	8:44:40 PM	Bubbler valve closed
7/28/2011	8:44:40 PM	Main Vac valve opened
7/28/2011	8:44:40 PM	Helium MFC set to  0.000000
7/28/2011	8:44:40 PM	H2 MFC set to  0.000000
7/28/2011	8:44:40 PM	BCl3 MFC set to  0.000000
7/28/2011	8:44:40 PM	PHl3 MFC set to  0.000000
7/28/2011	8:44:40 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:44:40 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:44:40 PM	Tube furnace set to 0
7/28/2011	8:45:10 PM	H2 valve closed
7/28/2011	8:45:10 PM	BCl3 valve closed
7/28/2011	8:45:10 PM	PH3 valve closed
7/28/2011	8:45:10 PM	SiCl4 pre valve closed
7/28/2011	8:45:10 PM	SiCl4 post valve closed
7/28/2011	8:45:10 PM	Bypass valve closed
7/28/2011	8:45:10 PM	Bubbler valve closed
7/28/2011	8:45:10 PM	Helium valve opened
7/28/2011	8:45:10 PM	Main Vac valve opened
7/28/2011	8:45:10 PM	Helium MFC set to  20.000000
7/28/2011	8:45:10 PM	H2 MFC set to  0.000000
7/28/2011	8:45:10 PM	BCl3 MFC set to  0.000000
7/28/2011	8:45:10 PM	PHl3 MFC set to  0.000000
7/28/2011	8:45:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:45:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:45:10 PM	Tube furnace set to 0
7/28/2011	8:45:40 PM	Helium valve closed
7/28/2011	8:45:40 PM	H2 valve closed
7/28/2011	8:45:40 PM	BCl3 valve closed
7/28/2011	8:45:40 PM	PH3 valve closed
7/28/2011	8:45:40 PM	SiCl4 pre valve closed
7/28/2011	8:45:40 PM	SiCl4 post valve closed
7/28/2011	8:45:40 PM	Bypass valve closed
7/28/2011	8:45:40 PM	Bubbler valve closed
7/28/2011	8:45:40 PM	Main Vac valve opened
7/28/2011	8:45:40 PM	Helium MFC set to  0.000000
7/28/2011	8:45:40 PM	H2 MFC set to  0.000000
7/28/2011	8:45:40 PM	BCl3 MFC set to  0.000000
7/28/2011	8:45:40 PM	PHl3 MFC set to  0.000000
7/28/2011	8:45:40 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:45:40 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:45:40 PM	Tube furnace set to 0
7/28/2011	8:46:10 PM	H2 valve closed
7/28/2011	8:46:10 PM	BCl3 valve closed
7/28/2011	8:46:10 PM	PH3 valve closed
7/28/2011	8:46:10 PM	SiCl4 pre valve closed
7/28/2011	8:46:10 PM	SiCl4 post valve closed
7/28/2011	8:46:10 PM	Bypass valve closed
7/28/2011	8:46:10 PM	Bubbler valve closed
7/28/2011	8:46:10 PM	Helium valve opened
7/28/2011	8:46:10 PM	Main Vac valve opened
7/28/2011	8:46:10 PM	Helium MFC set to  20.000000
7/28/2011	8:46:10 PM	H2 MFC set to  0.000000
7/28/2011	8:46:10 PM	BCl3 MFC set to  0.000000
7/28/2011	8:46:10 PM	PHl3 MFC set to  0.000000
7/28/2011	8:46:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:46:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:46:10 PM	Tube furnace set to 0
7/28/2011	8:46:40 PM	Helium valve closed
7/28/2011	8:46:40 PM	H2 valve closed
7/28/2011	8:46:40 PM	BCl3 valve closed
7/28/2011	8:46:40 PM	PH3 valve closed
7/28/2011	8:46:40 PM	SiCl4 pre valve closed
7/28/2011	8:46:40 PM	SiCl4 post valve closed
7/28/2011	8:46:40 PM	Bypass valve closed
7/28/2011	8:46:40 PM	Bubbler valve closed
7/28/2011	8:46:40 PM	Main Vac valve opened
7/28/2011	8:46:40 PM	Helium MFC set to  0.000000
7/28/2011	8:46:40 PM	H2 MFC set to  0.000000
7/28/2011	8:46:40 PM	BCl3 MFC set to  0.000000
7/28/2011	8:46:40 PM	PHl3 MFC set to  0.000000
7/28/2011	8:46:40 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:46:40 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:46:41 PM	Tube furnace set to 0
7/28/2011	8:47:11 PM	H2 valve closed
7/28/2011	8:47:11 PM	BCl3 valve closed
7/28/2011	8:47:11 PM	PH3 valve closed
7/28/2011	8:47:11 PM	SiCl4 pre valve closed
7/28/2011	8:47:11 PM	SiCl4 post valve closed
7/28/2011	8:47:11 PM	Bypass valve closed
7/28/2011	8:47:11 PM	Bubbler valve closed
7/28/2011	8:47:11 PM	Helium valve opened
7/28/2011	8:47:11 PM	Main Vac valve opened
7/28/2011	8:47:11 PM	Helium MFC set to  20.000000
7/28/2011	8:47:11 PM	H2 MFC set to  0.000000
7/28/2011	8:47:11 PM	BCl3 MFC set to  0.000000
7/28/2011	8:47:11 PM	PHl3 MFC set to  0.000000
7/28/2011	8:47:11 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:47:11 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:47:11 PM	Tube furnace set to 0
7/28/2011	8:47:41 PM	Helium valve closed
7/28/2011	8:47:41 PM	H2 valve closed
7/28/2011	8:47:41 PM	BCl3 valve closed
7/28/2011	8:47:41 PM	PH3 valve closed
7/28/2011	8:47:41 PM	SiCl4 pre valve closed
7/28/2011	8:47:41 PM	SiCl4 post valve closed
7/28/2011	8:47:41 PM	Bypass valve closed
7/28/2011	8:47:41 PM	Bubbler valve closed
7/28/2011	8:47:41 PM	Main Vac valve opened
7/28/2011	8:47:41 PM	Helium MFC set to  0.000000
7/28/2011	8:47:41 PM	H2 MFC set to  0.000000
7/28/2011	8:47:41 PM	BCl3 MFC set to  0.000000
7/28/2011	8:47:41 PM	PHl3 MFC set to  0.000000
7/28/2011	8:47:41 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:47:41 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:47:41 PM	Tube furnace set to 0
7/28/2011	8:48:11 PM	H2 valve closed
7/28/2011	8:48:11 PM	BCl3 valve closed
7/28/2011	8:48:11 PM	PH3 valve closed
7/28/2011	8:48:11 PM	SiCl4 pre valve closed
7/28/2011	8:48:11 PM	SiCl4 post valve closed
7/28/2011	8:48:11 PM	Bypass valve closed
7/28/2011	8:48:11 PM	Bubbler valve closed
7/28/2011	8:48:11 PM	Helium valve opened
7/28/2011	8:48:11 PM	Main Vac valve opened
7/28/2011	8:48:11 PM	Helium MFC set to  20.000000
7/28/2011	8:48:11 PM	H2 MFC set to  0.000000
7/28/2011	8:48:11 PM	BCl3 MFC set to  0.000000
7/28/2011	8:48:11 PM	PHl3 MFC set to  0.000000
7/28/2011	8:48:11 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:48:11 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:48:11 PM	Tube furnace set to 0
7/28/2011	8:48:41 PM	Helium valve closed
7/28/2011	8:48:41 PM	H2 valve closed
7/28/2011	8:48:41 PM	BCl3 valve closed
7/28/2011	8:48:41 PM	PH3 valve closed
7/28/2011	8:48:41 PM	SiCl4 pre valve closed
7/28/2011	8:48:41 PM	SiCl4 post valve closed
7/28/2011	8:48:41 PM	Bypass valve closed
7/28/2011	8:48:41 PM	Bubbler valve closed
7/28/2011	8:48:41 PM	Main Vac valve opened
7/28/2011	8:48:41 PM	Helium MFC set to  0.000000
7/28/2011	8:48:41 PM	H2 MFC set to  0.000000
7/28/2011	8:48:41 PM	BCl3 MFC set to  0.000000
7/28/2011	8:48:41 PM	PHl3 MFC set to  0.000000
7/28/2011	8:48:41 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:48:41 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:48:41 PM	Tube furnace set to 0
7/28/2011	8:49:11 PM	H2 valve closed
7/28/2011	8:49:11 PM	BCl3 valve closed
7/28/2011	8:49:11 PM	PH3 valve closed
7/28/2011	8:49:11 PM	SiCl4 pre valve closed
7/28/2011	8:49:11 PM	SiCl4 post valve closed
7/28/2011	8:49:11 PM	Bypass valve closed
7/28/2011	8:49:11 PM	Bubbler valve closed
7/28/2011	8:49:11 PM	Helium valve opened
7/28/2011	8:49:11 PM	Main Vac valve opened
7/28/2011	8:49:11 PM	Helium MFC set to  20.000000
7/28/2011	8:49:12 PM	H2 MFC set to  0.000000
7/28/2011	8:49:12 PM	BCl3 MFC set to  0.000000
7/28/2011	8:49:12 PM	PHl3 MFC set to  0.000000
7/28/2011	8:49:12 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:49:12 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:49:12 PM	Tube furnace set to 0
7/28/2011	8:49:42 PM	Helium valve closed
7/28/2011	8:49:42 PM	H2 valve closed
7/28/2011	8:49:42 PM	BCl3 valve closed
7/28/2011	8:49:42 PM	PH3 valve closed
7/28/2011	8:49:42 PM	SiCl4 pre valve closed
7/28/2011	8:49:42 PM	SiCl4 post valve closed
7/28/2011	8:49:42 PM	Bypass valve closed
7/28/2011	8:49:42 PM	Bubbler valve closed
7/28/2011	8:49:42 PM	Main Vac valve opened
7/28/2011	8:49:42 PM	Helium MFC set to  0.000000
7/28/2011	8:49:42 PM	H2 MFC set to  0.000000
7/28/2011	8:49:42 PM	BCl3 MFC set to  0.000000
7/28/2011	8:49:42 PM	PHl3 MFC set to  0.000000
7/28/2011	8:49:42 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:49:42 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:49:42 PM	Tube furnace set to 0
7/28/2011	8:50:12 PM	H2 valve closed
7/28/2011	8:50:12 PM	BCl3 valve closed
7/28/2011	8:50:12 PM	PH3 valve closed
7/28/2011	8:50:12 PM	SiCl4 pre valve closed
7/28/2011	8:50:12 PM	SiCl4 post valve closed
7/28/2011	8:50:12 PM	Bypass valve closed
7/28/2011	8:50:12 PM	Bubbler valve closed
7/28/2011	8:50:12 PM	Helium valve opened
7/28/2011	8:50:12 PM	Main Vac valve opened
7/28/2011	8:50:12 PM	Helium MFC set to  20.000000
7/28/2011	8:50:12 PM	H2 MFC set to  0.000000
7/28/2011	8:50:12 PM	BCl3 MFC set to  0.000000
7/28/2011	8:50:12 PM	PHl3 MFC set to  0.000000
7/28/2011	8:50:12 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:50:12 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:50:12 PM	Tube furnace set to 0
7/28/2011	8:50:42 PM	Helium valve closed
7/28/2011	8:50:42 PM	H2 valve closed
7/28/2011	8:50:42 PM	BCl3 valve closed
7/28/2011	8:50:42 PM	PH3 valve closed
7/28/2011	8:50:42 PM	SiCl4 pre valve closed
7/28/2011	8:50:42 PM	SiCl4 post valve closed
7/28/2011	8:50:42 PM	Bypass valve closed
7/28/2011	8:50:42 PM	Bubbler valve closed
7/28/2011	8:50:42 PM	Main Vac valve opened
7/28/2011	8:50:42 PM	Helium MFC set to  0.000000
7/28/2011	8:50:42 PM	H2 MFC set to  0.000000
7/28/2011	8:50:42 PM	BCl3 MFC set to  0.000000
7/28/2011	8:50:42 PM	PHl3 MFC set to  0.000000
7/28/2011	8:50:42 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:50:42 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:50:42 PM	Tube furnace set to 0
7/28/2011	8:51:12 PM	H2 valve closed
7/28/2011	8:51:12 PM	BCl3 valve closed
7/28/2011	8:51:12 PM	PH3 valve closed
7/28/2011	8:51:12 PM	SiCl4 pre valve closed
7/28/2011	8:51:12 PM	SiCl4 post valve closed
7/28/2011	8:51:12 PM	Bypass valve closed
7/28/2011	8:51:12 PM	Bubbler valve closed
7/28/2011	8:51:12 PM	Helium valve opened
7/28/2011	8:51:12 PM	Main Vac valve opened
7/28/2011	8:51:12 PM	Helium MFC set to  20.000000
7/28/2011	8:51:12 PM	H2 MFC set to  0.000000
7/28/2011	8:51:12 PM	BCl3 MFC set to  0.000000
7/28/2011	8:51:12 PM	PHl3 MFC set to  0.000000
7/28/2011	8:51:12 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:51:12 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:51:13 PM	Tube furnace set to 0
7/28/2011	8:51:43 PM	Helium valve closed
7/28/2011	8:51:43 PM	H2 valve closed
7/28/2011	8:51:43 PM	BCl3 valve closed
7/28/2011	8:51:43 PM	PH3 valve closed
7/28/2011	8:51:43 PM	SiCl4 pre valve closed
7/28/2011	8:51:43 PM	SiCl4 post valve closed
7/28/2011	8:51:43 PM	Bypass valve closed
7/28/2011	8:51:43 PM	Bubbler valve closed
7/28/2011	8:51:43 PM	Main Vac valve opened
7/28/2011	8:51:43 PM	Helium MFC set to  0.000000
7/28/2011	8:51:43 PM	H2 MFC set to  0.000000
7/28/2011	8:51:43 PM	BCl3 MFC set to  0.000000
7/28/2011	8:51:43 PM	PHl3 MFC set to  0.000000
7/28/2011	8:51:43 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:51:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:51:43 PM	Tube furnace set to 200
7/28/2011	8:52:13 PM	H2 valve closed
7/28/2011	8:52:13 PM	BCl3 valve closed
7/28/2011	8:52:13 PM	PH3 valve closed
7/28/2011	8:52:13 PM	SiCl4 pre valve closed
7/28/2011	8:52:13 PM	SiCl4 post valve closed
7/28/2011	8:52:13 PM	Bypass valve closed
7/28/2011	8:52:13 PM	Bubbler valve closed
7/28/2011	8:52:13 PM	Helium valve opened
7/28/2011	8:52:13 PM	Main Vac valve opened
7/28/2011	8:52:13 PM	Helium MFC set to  20.000000
7/28/2011	8:52:13 PM	H2 MFC set to  0.000000
7/28/2011	8:52:13 PM	BCl3 MFC set to  0.000000
7/28/2011	8:52:13 PM	PHl3 MFC set to  0.000000
7/28/2011	8:52:13 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:52:13 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:52:13 PM	Tube furnace set to 200
7/28/2011	8:52:43 PM	Helium valve closed
7/28/2011	8:52:43 PM	H2 valve closed
7/28/2011	8:52:43 PM	BCl3 valve closed
7/28/2011	8:52:43 PM	PH3 valve closed
7/28/2011	8:52:43 PM	SiCl4 pre valve closed
7/28/2011	8:52:43 PM	SiCl4 post valve closed
7/28/2011	8:52:43 PM	Bypass valve closed
7/28/2011	8:52:43 PM	Bubbler valve closed
7/28/2011	8:52:43 PM	Main Vac valve opened
7/28/2011	8:52:43 PM	Helium MFC set to  0.000000
7/28/2011	8:52:43 PM	H2 MFC set to  0.000000
7/28/2011	8:52:43 PM	BCl3 MFC set to  0.000000
7/28/2011	8:52:43 PM	PHl3 MFC set to  0.000000
7/28/2011	8:52:43 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:52:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:52:43 PM	Tube furnace set to 200
7/28/2011	8:53:13 PM	H2 valve closed
7/28/2011	8:53:13 PM	BCl3 valve closed
7/28/2011	8:53:13 PM	PH3 valve closed
7/28/2011	8:53:13 PM	SiCl4 pre valve closed
7/28/2011	8:53:13 PM	SiCl4 post valve closed
7/28/2011	8:53:13 PM	Bypass valve closed
7/28/2011	8:53:13 PM	Bubbler valve closed
7/28/2011	8:53:13 PM	Helium valve opened
7/28/2011	8:53:13 PM	Main Vac valve opened
7/28/2011	8:53:13 PM	Helium MFC set to  20.000000
7/28/2011	8:53:13 PM	H2 MFC set to  0.000000
7/28/2011	8:53:13 PM	BCl3 MFC set to  0.000000
7/28/2011	8:53:13 PM	PHl3 MFC set to  0.000000
7/28/2011	8:53:13 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:53:13 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:53:13 PM	Tube furnace set to 200
7/28/2011	8:53:43 PM	Helium valve closed
7/28/2011	8:53:43 PM	H2 valve closed
7/28/2011	8:53:43 PM	BCl3 valve closed
7/28/2011	8:53:43 PM	PH3 valve closed
7/28/2011	8:53:43 PM	SiCl4 pre valve closed
7/28/2011	8:53:43 PM	SiCl4 post valve closed
7/28/2011	8:53:43 PM	Bypass valve closed
7/28/2011	8:53:43 PM	Bubbler valve closed
7/28/2011	8:53:43 PM	Main Vac valve opened
7/28/2011	8:53:43 PM	Helium MFC set to  0.000000
7/28/2011	8:53:43 PM	H2 MFC set to  0.000000
7/28/2011	8:53:43 PM	BCl3 MFC set to  0.000000
7/28/2011	8:53:43 PM	PHl3 MFC set to  0.000000
7/28/2011	8:53:43 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:53:43 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:53:44 PM	Tube furnace set to 200
7/28/2011	8:54:14 PM	H2 valve closed
7/28/2011	8:54:14 PM	BCl3 valve closed
7/28/2011	8:54:14 PM	PH3 valve closed
7/28/2011	8:54:14 PM	SiCl4 pre valve closed
7/28/2011	8:54:14 PM	SiCl4 post valve closed
7/28/2011	8:54:14 PM	Bypass valve closed
7/28/2011	8:54:14 PM	Bubbler valve closed
7/28/2011	8:54:14 PM	Helium valve opened
7/28/2011	8:54:14 PM	Main Vac valve opened
7/28/2011	8:54:14 PM	Helium MFC set to  20.000000
7/28/2011	8:54:14 PM	H2 MFC set to  0.000000
7/28/2011	8:54:14 PM	BCl3 MFC set to  0.000000
7/28/2011	8:54:14 PM	PHl3 MFC set to  0.000000
7/28/2011	8:54:14 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:54:14 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:54:14 PM	Tube furnace set to 200
7/28/2011	8:54:44 PM	Helium valve closed
7/28/2011	8:54:44 PM	H2 valve closed
7/28/2011	8:54:44 PM	BCl3 valve closed
7/28/2011	8:54:44 PM	PH3 valve closed
7/28/2011	8:54:44 PM	SiCl4 pre valve closed
7/28/2011	8:54:44 PM	SiCl4 post valve closed
7/28/2011	8:54:44 PM	Bypass valve closed
7/28/2011	8:54:44 PM	Bubbler valve closed
7/28/2011	8:54:44 PM	Main Vac valve opened
7/28/2011	8:54:44 PM	Helium MFC set to  0.000000
7/28/2011	8:54:44 PM	H2 MFC set to  0.000000
7/28/2011	8:54:44 PM	BCl3 MFC set to  0.000000
7/28/2011	8:54:44 PM	PHl3 MFC set to  0.000000
7/28/2011	8:54:44 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:54:44 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:54:44 PM	Tube furnace set to 200
7/28/2011	8:55:14 PM	H2 valve closed
7/28/2011	8:55:14 PM	BCl3 valve closed
7/28/2011	8:55:14 PM	PH3 valve closed
7/28/2011	8:55:14 PM	SiCl4 pre valve closed
7/28/2011	8:55:14 PM	SiCl4 post valve closed
7/28/2011	8:55:14 PM	Bypass valve closed
7/28/2011	8:55:14 PM	Bubbler valve closed
7/28/2011	8:55:14 PM	Helium valve opened
7/28/2011	8:55:14 PM	Main Vac valve opened
7/28/2011	8:55:14 PM	Helium MFC set to  20.000000
7/28/2011	8:55:14 PM	H2 MFC set to  0.000000
7/28/2011	8:55:14 PM	BCl3 MFC set to  0.000000
7/28/2011	8:55:14 PM	PHl3 MFC set to  0.000000
7/28/2011	8:55:14 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:55:14 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:55:14 PM	Tube furnace set to 200
7/28/2011	8:55:44 PM	Helium valve closed
7/28/2011	8:55:44 PM	H2 valve closed
7/28/2011	8:55:44 PM	BCl3 valve closed
7/28/2011	8:55:44 PM	PH3 valve closed
7/28/2011	8:55:44 PM	SiCl4 pre valve closed
7/28/2011	8:55:44 PM	SiCl4 post valve closed
7/28/2011	8:55:44 PM	Bypass valve closed
7/28/2011	8:55:44 PM	Bubbler valve closed
7/28/2011	8:55:44 PM	Main Vac valve opened
7/28/2011	8:55:44 PM	Helium MFC set to  0.000000
7/28/2011	8:55:44 PM	H2 MFC set to  0.000000
7/28/2011	8:55:44 PM	BCl3 MFC set to  0.000000
7/28/2011	8:55:44 PM	PHl3 MFC set to  0.000000
7/28/2011	8:55:44 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:55:44 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:55:44 PM	Tube furnace set to 200
7/28/2011	8:56:15 PM	H2 valve closed
7/28/2011	8:56:15 PM	BCl3 valve closed
7/28/2011	8:56:15 PM	PH3 valve closed
7/28/2011	8:56:15 PM	SiCl4 pre valve closed
7/28/2011	8:56:15 PM	SiCl4 post valve closed
7/28/2011	8:56:15 PM	Bypass valve closed
7/28/2011	8:56:15 PM	Bubbler valve closed
7/28/2011	8:56:15 PM	Helium valve opened
7/28/2011	8:56:15 PM	Main Vac valve opened
7/28/2011	8:56:15 PM	Helium MFC set to  20.000000
7/28/2011	8:56:15 PM	H2 MFC set to  0.000000
7/28/2011	8:56:15 PM	BCl3 MFC set to  0.000000
7/28/2011	8:56:15 PM	PHl3 MFC set to  0.000000
7/28/2011	8:56:15 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:56:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:56:15 PM	Tube furnace set to 200
7/28/2011	8:56:45 PM	Helium valve closed
7/28/2011	8:56:45 PM	H2 valve closed
7/28/2011	8:56:45 PM	BCl3 valve closed
7/28/2011	8:56:45 PM	PH3 valve closed
7/28/2011	8:56:45 PM	SiCl4 pre valve closed
7/28/2011	8:56:45 PM	SiCl4 post valve closed
7/28/2011	8:56:45 PM	Bypass valve closed
7/28/2011	8:56:45 PM	Bubbler valve closed
7/28/2011	8:56:45 PM	Main Vac valve opened
7/28/2011	8:56:45 PM	Helium MFC set to  0.000000
7/28/2011	8:56:45 PM	H2 MFC set to  0.000000
7/28/2011	8:56:45 PM	BCl3 MFC set to  0.000000
7/28/2011	8:56:45 PM	PHl3 MFC set to  0.000000
7/28/2011	8:56:45 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:56:45 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:56:45 PM	Tube furnace set to 200
7/28/2011	8:57:15 PM	H2 valve closed
7/28/2011	8:57:15 PM	BCl3 valve closed
7/28/2011	8:57:15 PM	PH3 valve closed
7/28/2011	8:57:15 PM	SiCl4 pre valve closed
7/28/2011	8:57:15 PM	SiCl4 post valve closed
7/28/2011	8:57:15 PM	Bypass valve closed
7/28/2011	8:57:15 PM	Bubbler valve closed
7/28/2011	8:57:15 PM	Helium valve opened
7/28/2011	8:57:15 PM	Main Vac valve opened
7/28/2011	8:57:15 PM	Helium MFC set to  20.000000
7/28/2011	8:57:15 PM	H2 MFC set to  0.000000
7/28/2011	8:57:15 PM	BCl3 MFC set to  0.000000
7/28/2011	8:57:15 PM	PHl3 MFC set to  0.000000
7/28/2011	8:57:15 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:57:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:57:15 PM	Tube furnace set to 200
7/28/2011	8:57:45 PM	Helium valve closed
7/28/2011	8:57:45 PM	H2 valve closed
7/28/2011	8:57:45 PM	BCl3 valve closed
7/28/2011	8:57:45 PM	PH3 valve closed
7/28/2011	8:57:45 PM	SiCl4 pre valve closed
7/28/2011	8:57:45 PM	SiCl4 post valve closed
7/28/2011	8:57:45 PM	Bypass valve closed
7/28/2011	8:57:45 PM	Bubbler valve closed
7/28/2011	8:57:45 PM	Main Vac valve opened
7/28/2011	8:57:45 PM	Helium MFC set to  0.000000
7/28/2011	8:57:45 PM	H2 MFC set to  0.000000
7/28/2011	8:57:45 PM	BCl3 MFC set to  0.000000
7/28/2011	8:57:45 PM	PHl3 MFC set to  0.000000
7/28/2011	8:57:45 PM	SiCl4 MFC set to  0.000000
7/28/2011	8:57:45 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	8:57:45 PM	Tube furnace set to 0
7/28/2011	8:57:46 PM	Run finished at 8:57 PM
7/28/2011	9:16:21 PM	Recipe started at 9:16 PM
7/28/2011	9:16:21 PM	Helium valve closed
7/28/2011	9:16:21 PM	H2 valve closed
7/28/2011	9:16:21 PM	BCl3 valve closed
7/28/2011	9:16:21 PM	PH3 valve closed
7/28/2011	9:16:21 PM	SiCl4 pre valve closed
7/28/2011	9:16:21 PM	SiCl4 post valve closed
7/28/2011	9:16:21 PM	Main Vac valve closed
7/28/2011	9:16:21 PM	Bypass valve closed
7/28/2011	9:16:21 PM	Bubbler valve closed
7/28/2011	9:16:21 PM	Helium MFC set to  0.000000
7/28/2011	9:16:21 PM	H2 MFC set to  0.000000
7/28/2011	9:16:21 PM	BCl3 MFC set to  0.000000
7/28/2011	9:16:21 PM	PHl3 MFC set to  0.000000
7/28/2011	9:16:21 PM	SiCl4 MFC set to  0.000000
7/28/2011	9:16:21 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:16:21 PM	Tube furnace set to 0
7/28/2011	9:16:24 PM	Helium valve closed
7/28/2011	9:16:24 PM	BCl3 valve closed
7/28/2011	9:16:24 PM	PH3 valve closed
7/28/2011	9:16:24 PM	SiCl4 pre valve closed
7/28/2011	9:16:24 PM	SiCl4 post valve closed
7/28/2011	9:16:24 PM	Main Vac valve closed
7/28/2011	9:16:24 PM	Bypass valve closed
7/28/2011	9:16:24 PM	Bubbler valve closed
7/28/2011	9:16:24 PM	H2 valve opened
7/28/2011	9:16:24 PM	Helium MFC set to  0.000000
7/28/2011	9:16:24 PM	H2 MFC set to  500.000000
7/28/2011	9:16:24 PM	BCl3 MFC set to  0.000000
7/28/2011	9:16:24 PM	PHl3 MFC set to  0.000000
7/28/2011	9:16:24 PM	SiCl4 MFC set to  0.000000
7/28/2011	9:16:24 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:16:25 PM	Tube furnace set to 0
7/28/2011	9:17:28 PM	Helium valve closed
7/28/2011	9:17:28 PM	BCl3 valve closed
7/28/2011	9:17:28 PM	PH3 valve closed
7/28/2011	9:17:28 PM	SiCl4 pre valve closed
7/28/2011	9:17:28 PM	SiCl4 post valve closed
7/28/2011	9:17:28 PM	Main Vac valve closed
7/28/2011	9:17:28 PM	Bypass valve closed
7/28/2011	9:17:28 PM	H2 valve opened
7/28/2011	9:17:28 PM	Bubbler valve opened
7/28/2011	9:17:28 PM	Helium MFC set to  0.000000
7/28/2011	9:17:28 PM	H2 MFC set to  500.000000
7/28/2011	9:17:28 PM	BCl3 MFC set to  0.000000
7/28/2011	9:17:28 PM	PHl3 MFC set to  0.000000
7/28/2011	9:17:28 PM	SiCl4 MFC set to  0.000000
7/28/2011	9:17:28 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:17:28 PM	Tube furnace set to 0
7/28/2011	9:17:29 PM	Helium valve closed
7/28/2011	9:17:29 PM	BCl3 valve closed
7/28/2011	9:17:29 PM	PH3 valve closed
7/28/2011	9:17:29 PM	SiCl4 pre valve closed
7/28/2011	9:17:29 PM	SiCl4 post valve closed
7/28/2011	9:17:29 PM	Main Vac valve closed
7/28/2011	9:17:29 PM	Bypass valve closed
7/28/2011	9:17:29 PM	H2 valve opened
7/28/2011	9:17:29 PM	Bubbler valve opened
7/28/2011	9:17:29 PM	Helium MFC set to  0.000000
7/28/2011	9:17:29 PM	H2 MFC set to  500.000000
7/28/2011	9:17:29 PM	BCl3 MFC set to  0.000000
7/28/2011	9:17:29 PM	PHl3 MFC set to  0.000000
7/28/2011	9:17:29 PM	SiCl4 MFC set to  0.000000
7/28/2011	9:17:29 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:17:29 PM	Tube furnace set to 1000
7/28/2011	9:37:29 PM	Helium valve closed
7/28/2011	9:37:29 PM	PH3 valve closed
7/28/2011	9:37:29 PM	Main Vac valve closed
7/28/2011	9:37:29 PM	Bypass valve closed
7/28/2011	9:37:29 PM	H2 valve opened
7/28/2011	9:37:29 PM	BCl3 valve opened
7/28/2011	9:37:29 PM	SiCl4 pre valve opened
7/28/2011	9:37:29 PM	SiCl4 post valve opened
7/28/2011	9:37:30 PM	Bubbler valve opened
7/28/2011	9:37:30 PM	Helium MFC set to  0.000000
7/28/2011	9:37:30 PM	H2 MFC set to  500.000000
7/28/2011	9:37:30 PM	BCl3 MFC set to  2.500000
7/28/2011	9:37:30 PM	PHl3 MFC set to  0.000000
7/28/2011	9:37:30 PM	SiCl4 MFC set to  50.000000
7/28/2011	9:37:30 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:37:30 PM	Tube furnace set to 1000
7/28/2011	9:50:30 PM	Helium valve closed
7/28/2011	9:50:30 PM	BCl3 valve closed
7/28/2011	9:50:30 PM	Main Vac valve closed
7/28/2011	9:50:30 PM	Bypass valve closed
7/28/2011	9:50:30 PM	H2 valve opened
7/28/2011	9:50:30 PM	PH3 valve opened
7/28/2011	9:50:30 PM	SiCl4 pre valve opened
7/28/2011	9:50:30 PM	SiCl4 post valve opened
7/28/2011	9:50:30 PM	Bubbler valve opened
7/28/2011	9:50:30 PM	Helium MFC set to  0.000000
7/28/2011	9:50:30 PM	H2 MFC set to  500.000000
7/28/2011	9:50:30 PM	BCl3 MFC set to  0.000000
7/28/2011	9:50:30 PM	PHl3 MFC set to  15.000000
7/28/2011	9:50:30 PM	SiCl4 MFC set to  50.000000
7/28/2011	9:50:30 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:50:30 PM	Tube furnace set to 1000
7/28/2011	9:53:30 PM	Helium valve closed
7/28/2011	9:53:30 PM	BCl3 valve closed
7/28/2011	9:53:30 PM	PH3 valve closed
7/28/2011	9:53:30 PM	SiCl4 pre valve closed
7/28/2011	9:53:30 PM	SiCl4 post valve closed
7/28/2011	9:53:30 PM	Main Vac valve closed
7/28/2011	9:53:30 PM	Bypass valve closed
7/28/2011	9:53:30 PM	H2 valve opened
7/28/2011	9:53:30 PM	Bubbler valve opened
7/28/2011	9:53:30 PM	Helium MFC set to  0.000000
7/28/2011	9:53:30 PM	H2 MFC set to  500.000000
7/28/2011	9:53:30 PM	BCl3 MFC set to  0.000000
7/28/2011	9:53:30 PM	PHl3 MFC set to  0.000000
7/28/2011	9:53:30 PM	SiCl4 MFC set to  0.000000
7/28/2011	9:53:30 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:53:30 PM	Tube furnace set to 750
7/28/2011	9:58:30 PM	H2 valve closed
7/28/2011	9:58:30 PM	BCl3 valve closed
7/28/2011	9:58:30 PM	PH3 valve closed
7/28/2011	9:58:30 PM	SiCl4 pre valve closed
7/28/2011	9:58:30 PM	SiCl4 post valve closed
7/28/2011	9:58:30 PM	Main Vac valve closed
7/28/2011	9:58:30 PM	Bypass valve closed
7/28/2011	9:58:30 PM	Helium valve opened
7/28/2011	9:58:30 PM	Bubbler valve opened
7/28/2011	9:58:30 PM	Helium MFC set to  500.000000
7/28/2011	9:58:30 PM	H2 MFC set to  0.000000
7/28/2011	9:58:30 PM	BCl3 MFC set to  0.000000
7/28/2011	9:58:30 PM	PHl3 MFC set to  0.000000
7/28/2011	9:58:30 PM	SiCl4 MFC set to  0.000000
7/28/2011	9:58:30 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	9:58:30 PM	Tube furnace set to 0
7/28/2011	10:18:30 PM	Helium valve closed
7/28/2011	10:18:30 PM	H2 valve closed
7/28/2011	10:18:30 PM	BCl3 valve closed
7/28/2011	10:18:30 PM	PH3 valve closed
7/28/2011	10:18:30 PM	SiCl4 pre valve closed
7/28/2011	10:18:30 PM	SiCl4 post valve closed
7/28/2011	10:18:30 PM	Main Vac valve closed
7/28/2011	10:18:30 PM	Bypass valve closed
7/28/2011	10:18:30 PM	Bubbler valve closed
7/28/2011	10:18:30 PM	Helium MFC set to  0.000000
7/28/2011	10:18:30 PM	H2 MFC set to  0.000000
7/28/2011	10:18:30 PM	BCl3 MFC set to  0.000000
7/28/2011	10:18:30 PM	PHl3 MFC set to  0.000000
7/28/2011	10:18:30 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:18:30 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:18:30 PM	Tube furnace set to 0
7/28/2011	10:18:31 PM	Run finished at 10:18 PM
7/28/2011	10:32:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	10:32:52 PM	Recipe started at 10:32 PM
7/28/2011	10:32:52 PM	Helium valve closed
7/28/2011	10:32:52 PM	H2 valve closed
7/28/2011	10:32:52 PM	BCl3 valve closed
7/28/2011	10:32:52 PM	PH3 valve closed
7/28/2011	10:32:52 PM	SiCl4 pre valve closed
7/28/2011	10:32:52 PM	SiCl4 post valve closed
7/28/2011	10:32:52 PM	Main Vac valve closed
7/28/2011	10:32:52 PM	Bubbler valve closed
7/28/2011	10:32:52 PM	Bypass valve opened
7/28/2011	10:32:52 PM	Helium MFC set to  0.000000
7/28/2011	10:32:52 PM	H2 MFC set to  0.000000
7/28/2011	10:32:52 PM	BCl3 MFC set to  0.000000
7/28/2011	10:32:52 PM	PHl3 MFC set to  0.000000
7/28/2011	10:32:52 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:32:52 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:32:52 PM	Tube furnace set to 0
7/28/2011	10:33:57 PM	Helium valve closed
7/28/2011	10:33:57 PM	H2 valve closed
7/28/2011	10:33:57 PM	BCl3 valve closed
7/28/2011	10:33:57 PM	PH3 valve closed
7/28/2011	10:33:57 PM	SiCl4 pre valve closed
7/28/2011	10:33:57 PM	SiCl4 post valve closed
7/28/2011	10:33:57 PM	Main Vac valve closed
7/28/2011	10:33:57 PM	Bubbler valve closed
7/28/2011	10:33:57 PM	Bypass valve opened
7/28/2011	10:33:57 PM	Helium MFC set to  0.000000
7/28/2011	10:33:57 PM	H2 MFC set to  0.000000
7/28/2011	10:33:57 PM	BCl3 MFC set to  0.000000
7/28/2011	10:33:57 PM	PHl3 MFC set to  0.000000
7/28/2011	10:33:57 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:33:57 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:33:57 PM	Tube furnace set to 0
7/28/2011	10:34:57 PM	Helium valve closed
7/28/2011	10:34:57 PM	H2 valve closed
7/28/2011	10:34:57 PM	BCl3 valve closed
7/28/2011	10:34:57 PM	PH3 valve closed
7/28/2011	10:34:57 PM	SiCl4 pre valve closed
7/28/2011	10:34:57 PM	SiCl4 post valve closed
7/28/2011	10:34:57 PM	Bypass valve closed
7/28/2011	10:34:57 PM	Bubbler valve closed
7/28/2011	10:34:57 PM	Main Vac valve opened
7/28/2011	10:34:57 PM	Helium MFC set to  0.000000
7/28/2011	10:34:57 PM	H2 MFC set to  0.000000
7/28/2011	10:34:57 PM	BCl3 MFC set to  0.000000
7/28/2011	10:34:57 PM	PHl3 MFC set to  0.000000
7/28/2011	10:34:57 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:34:57 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:34:57 PM	Tube furnace set to 0
7/28/2011	10:34:58 PM	Run finished at 10:34 PM
7/28/2011	10:34:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/28/2011	10:35:52 PM	Recipe started at 10:35 PM
7/28/2011	10:35:52 PM	Helium valve closed
7/28/2011	10:35:52 PM	H2 valve closed
7/28/2011	10:35:52 PM	BCl3 valve closed
7/28/2011	10:35:52 PM	PH3 valve closed
7/28/2011	10:35:52 PM	SiCl4 pre valve closed
7/28/2011	10:35:52 PM	SiCl4 post valve closed
7/28/2011	10:35:52 PM	Bypass valve closed
7/28/2011	10:35:52 PM	Bubbler valve closed
7/28/2011	10:35:52 PM	Main Vac valve opened
7/28/2011	10:35:52 PM	Helium MFC set to  0.000000
7/28/2011	10:35:52 PM	H2 MFC set to  0.000000
7/28/2011	10:35:52 PM	BCl3 MFC set to  0.000000
7/28/2011	10:35:52 PM	PHl3 MFC set to  0.000000
7/28/2011	10:35:52 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:35:52 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:35:53 PM	Tube furnace set to 0
7/28/2011	10:36:23 PM	H2 valve closed
7/28/2011	10:36:23 PM	BCl3 valve closed
7/28/2011	10:36:23 PM	PH3 valve closed
7/28/2011	10:36:23 PM	SiCl4 pre valve closed
7/28/2011	10:36:23 PM	SiCl4 post valve closed
7/28/2011	10:36:23 PM	Bypass valve closed
7/28/2011	10:36:23 PM	Bubbler valve closed
7/28/2011	10:36:23 PM	Helium valve opened
7/28/2011	10:36:23 PM	Main Vac valve opened
7/28/2011	10:36:23 PM	Helium MFC set to  20.000000
7/28/2011	10:36:23 PM	H2 MFC set to  0.000000
7/28/2011	10:36:23 PM	BCl3 MFC set to  0.000000
7/28/2011	10:36:23 PM	PHl3 MFC set to  0.000000
7/28/2011	10:36:23 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:36:23 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:36:23 PM	Tube furnace set to 0
7/28/2011	10:36:53 PM	Helium valve closed
7/28/2011	10:36:53 PM	H2 valve closed
7/28/2011	10:36:53 PM	BCl3 valve closed
7/28/2011	10:36:53 PM	PH3 valve closed
7/28/2011	10:36:53 PM	SiCl4 pre valve closed
7/28/2011	10:36:53 PM	SiCl4 post valve closed
7/28/2011	10:36:53 PM	Bypass valve closed
7/28/2011	10:36:53 PM	Bubbler valve closed
7/28/2011	10:36:53 PM	Main Vac valve opened
7/28/2011	10:36:53 PM	Helium MFC set to  0.000000
7/28/2011	10:36:53 PM	H2 MFC set to  0.000000
7/28/2011	10:36:53 PM	BCl3 MFC set to  0.000000
7/28/2011	10:36:53 PM	PHl3 MFC set to  0.000000
7/28/2011	10:36:53 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:36:53 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:36:53 PM	Tube furnace set to 0
7/28/2011	10:37:23 PM	H2 valve closed
7/28/2011	10:37:23 PM	BCl3 valve closed
7/28/2011	10:37:23 PM	PH3 valve closed
7/28/2011	10:37:23 PM	SiCl4 pre valve closed
7/28/2011	10:37:23 PM	SiCl4 post valve closed
7/28/2011	10:37:23 PM	Bypass valve closed
7/28/2011	10:37:23 PM	Bubbler valve closed
7/28/2011	10:37:23 PM	Helium valve opened
7/28/2011	10:37:23 PM	Main Vac valve opened
7/28/2011	10:37:23 PM	Helium MFC set to  20.000000
7/28/2011	10:37:23 PM	H2 MFC set to  0.000000
7/28/2011	10:37:23 PM	BCl3 MFC set to  0.000000
7/28/2011	10:37:23 PM	PHl3 MFC set to  0.000000
7/28/2011	10:37:23 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:37:23 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:37:23 PM	Tube furnace set to 0
7/28/2011	10:37:53 PM	Helium valve closed
7/28/2011	10:37:53 PM	H2 valve closed
7/28/2011	10:37:53 PM	BCl3 valve closed
7/28/2011	10:37:53 PM	PH3 valve closed
7/28/2011	10:37:53 PM	SiCl4 pre valve closed
7/28/2011	10:37:53 PM	SiCl4 post valve closed
7/28/2011	10:37:53 PM	Bypass valve closed
7/28/2011	10:37:53 PM	Bubbler valve closed
7/28/2011	10:37:53 PM	Main Vac valve opened
7/28/2011	10:37:53 PM	Helium MFC set to  0.000000
7/28/2011	10:37:53 PM	H2 MFC set to  0.000000
7/28/2011	10:37:53 PM	BCl3 MFC set to  0.000000
7/28/2011	10:37:53 PM	PHl3 MFC set to  0.000000
7/28/2011	10:37:53 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:37:53 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:37:53 PM	Tube furnace set to 0
7/28/2011	10:38:23 PM	H2 valve closed
7/28/2011	10:38:23 PM	BCl3 valve closed
7/28/2011	10:38:23 PM	PH3 valve closed
7/28/2011	10:38:23 PM	SiCl4 pre valve closed
7/28/2011	10:38:23 PM	SiCl4 post valve closed
7/28/2011	10:38:23 PM	Bypass valve closed
7/28/2011	10:38:23 PM	Bubbler valve closed
7/28/2011	10:38:23 PM	Helium valve opened
7/28/2011	10:38:23 PM	Main Vac valve opened
7/28/2011	10:38:23 PM	Helium MFC set to  20.000000
7/28/2011	10:38:23 PM	H2 MFC set to  0.000000
7/28/2011	10:38:23 PM	BCl3 MFC set to  0.000000
7/28/2011	10:38:23 PM	PHl3 MFC set to  0.000000
7/28/2011	10:38:23 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:38:23 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:38:24 PM	Tube furnace set to 0
7/28/2011	10:38:54 PM	Helium valve closed
7/28/2011	10:38:54 PM	H2 valve closed
7/28/2011	10:38:54 PM	BCl3 valve closed
7/28/2011	10:38:54 PM	PH3 valve closed
7/28/2011	10:38:54 PM	SiCl4 pre valve closed
7/28/2011	10:38:54 PM	SiCl4 post valve closed
7/28/2011	10:38:54 PM	Bypass valve closed
7/28/2011	10:38:54 PM	Bubbler valve closed
7/28/2011	10:38:54 PM	Main Vac valve opened
7/28/2011	10:38:54 PM	Helium MFC set to  0.000000
7/28/2011	10:38:54 PM	H2 MFC set to  0.000000
7/28/2011	10:38:54 PM	BCl3 MFC set to  0.000000
7/28/2011	10:38:54 PM	PHl3 MFC set to  0.000000
7/28/2011	10:38:54 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:38:54 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:38:54 PM	Tube furnace set to 0
7/28/2011	10:39:24 PM	H2 valve closed
7/28/2011	10:39:24 PM	BCl3 valve closed
7/28/2011	10:39:24 PM	PH3 valve closed
7/28/2011	10:39:24 PM	SiCl4 pre valve closed
7/28/2011	10:39:24 PM	SiCl4 post valve closed
7/28/2011	10:39:24 PM	Bypass valve closed
7/28/2011	10:39:24 PM	Bubbler valve closed
7/28/2011	10:39:24 PM	Helium valve opened
7/28/2011	10:39:24 PM	Main Vac valve opened
7/28/2011	10:39:24 PM	Helium MFC set to  20.000000
7/28/2011	10:39:24 PM	H2 MFC set to  0.000000
7/28/2011	10:39:24 PM	BCl3 MFC set to  0.000000
7/28/2011	10:39:24 PM	PHl3 MFC set to  0.000000
7/28/2011	10:39:24 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:39:24 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:39:24 PM	Tube furnace set to 0
7/28/2011	10:39:54 PM	Helium valve closed
7/28/2011	10:39:54 PM	H2 valve closed
7/28/2011	10:39:54 PM	BCl3 valve closed
7/28/2011	10:39:54 PM	PH3 valve closed
7/28/2011	10:39:54 PM	SiCl4 pre valve closed
7/28/2011	10:39:54 PM	SiCl4 post valve closed
7/28/2011	10:39:54 PM	Bypass valve closed
7/28/2011	10:39:54 PM	Bubbler valve closed
7/28/2011	10:39:54 PM	Main Vac valve opened
7/28/2011	10:39:54 PM	Helium MFC set to  0.000000
7/28/2011	10:39:54 PM	H2 MFC set to  0.000000
7/28/2011	10:39:54 PM	BCl3 MFC set to  0.000000
7/28/2011	10:39:54 PM	PHl3 MFC set to  0.000000
7/28/2011	10:39:54 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:39:54 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:39:54 PM	Tube furnace set to 0
7/28/2011	10:40:24 PM	H2 valve closed
7/28/2011	10:40:24 PM	BCl3 valve closed
7/28/2011	10:40:24 PM	PH3 valve closed
7/28/2011	10:40:24 PM	SiCl4 pre valve closed
7/28/2011	10:40:24 PM	SiCl4 post valve closed
7/28/2011	10:40:24 PM	Bypass valve closed
7/28/2011	10:40:24 PM	Bubbler valve closed
7/28/2011	10:40:24 PM	Helium valve opened
7/28/2011	10:40:24 PM	Main Vac valve opened
7/28/2011	10:40:24 PM	Helium MFC set to  20.000000
7/28/2011	10:40:24 PM	H2 MFC set to  0.000000
7/28/2011	10:40:24 PM	BCl3 MFC set to  0.000000
7/28/2011	10:40:24 PM	PHl3 MFC set to  0.000000
7/28/2011	10:40:24 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:40:24 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:40:24 PM	Tube furnace set to 0
7/28/2011	10:40:55 PM	Helium valve closed
7/28/2011	10:40:55 PM	H2 valve closed
7/28/2011	10:40:55 PM	BCl3 valve closed
7/28/2011	10:40:55 PM	PH3 valve closed
7/28/2011	10:40:55 PM	SiCl4 pre valve closed
7/28/2011	10:40:55 PM	SiCl4 post valve closed
7/28/2011	10:40:55 PM	Bypass valve closed
7/28/2011	10:40:55 PM	Bubbler valve closed
7/28/2011	10:40:55 PM	Main Vac valve opened
7/28/2011	10:40:55 PM	Helium MFC set to  0.000000
7/28/2011	10:40:55 PM	H2 MFC set to  0.000000
7/28/2011	10:40:55 PM	BCl3 MFC set to  0.000000
7/28/2011	10:40:55 PM	PHl3 MFC set to  0.000000
7/28/2011	10:40:55 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:40:55 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:40:55 PM	Tube furnace set to 0
7/28/2011	10:41:25 PM	H2 valve closed
7/28/2011	10:41:25 PM	BCl3 valve closed
7/28/2011	10:41:25 PM	PH3 valve closed
7/28/2011	10:41:25 PM	SiCl4 pre valve closed
7/28/2011	10:41:25 PM	SiCl4 post valve closed
7/28/2011	10:41:25 PM	Bypass valve closed
7/28/2011	10:41:25 PM	Bubbler valve closed
7/28/2011	10:41:25 PM	Helium valve opened
7/28/2011	10:41:25 PM	Main Vac valve opened
7/28/2011	10:41:25 PM	Helium MFC set to  20.000000
7/28/2011	10:41:25 PM	H2 MFC set to  0.000000
7/28/2011	10:41:25 PM	BCl3 MFC set to  0.000000
7/28/2011	10:41:25 PM	PHl3 MFC set to  0.000000
7/28/2011	10:41:25 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:41:25 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:41:25 PM	Tube furnace set to 0
7/28/2011	10:41:55 PM	Helium valve closed
7/28/2011	10:41:55 PM	H2 valve closed
7/28/2011	10:41:55 PM	BCl3 valve closed
7/28/2011	10:41:55 PM	PH3 valve closed
7/28/2011	10:41:55 PM	SiCl4 pre valve closed
7/28/2011	10:41:55 PM	SiCl4 post valve closed
7/28/2011	10:41:55 PM	Bypass valve closed
7/28/2011	10:41:55 PM	Bubbler valve closed
7/28/2011	10:41:55 PM	Main Vac valve opened
7/28/2011	10:41:55 PM	Helium MFC set to  0.000000
7/28/2011	10:41:55 PM	H2 MFC set to  0.000000
7/28/2011	10:41:55 PM	BCl3 MFC set to  0.000000
7/28/2011	10:41:55 PM	PHl3 MFC set to  0.000000
7/28/2011	10:41:55 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:41:55 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:41:55 PM	Tube furnace set to 0
7/28/2011	10:42:25 PM	H2 valve closed
7/28/2011	10:42:25 PM	BCl3 valve closed
7/28/2011	10:42:25 PM	PH3 valve closed
7/28/2011	10:42:25 PM	SiCl4 pre valve closed
7/28/2011	10:42:25 PM	SiCl4 post valve closed
7/28/2011	10:42:25 PM	Bypass valve closed
7/28/2011	10:42:25 PM	Bubbler valve closed
7/28/2011	10:42:25 PM	Helium valve opened
7/28/2011	10:42:25 PM	Main Vac valve opened
7/28/2011	10:42:25 PM	Helium MFC set to  20.000000
7/28/2011	10:42:25 PM	H2 MFC set to  0.000000
7/28/2011	10:42:25 PM	BCl3 MFC set to  0.000000
7/28/2011	10:42:25 PM	PHl3 MFC set to  0.000000
7/28/2011	10:42:25 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:42:25 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:42:25 PM	Tube furnace set to 0
7/28/2011	10:42:55 PM	Helium valve closed
7/28/2011	10:42:55 PM	H2 valve closed
7/28/2011	10:42:55 PM	BCl3 valve closed
7/28/2011	10:42:55 PM	PH3 valve closed
7/28/2011	10:42:55 PM	SiCl4 pre valve closed
7/28/2011	10:42:55 PM	SiCl4 post valve closed
7/28/2011	10:42:55 PM	Bypass valve closed
7/28/2011	10:42:55 PM	Bubbler valve closed
7/28/2011	10:42:55 PM	Main Vac valve opened
7/28/2011	10:42:55 PM	Helium MFC set to  0.000000
7/28/2011	10:42:55 PM	H2 MFC set to  0.000000
7/28/2011	10:42:55 PM	BCl3 MFC set to  0.000000
7/28/2011	10:42:55 PM	PHl3 MFC set to  0.000000
7/28/2011	10:42:55 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:42:55 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:42:56 PM	Tube furnace set to 0
7/28/2011	10:43:26 PM	H2 valve closed
7/28/2011	10:43:26 PM	BCl3 valve closed
7/28/2011	10:43:26 PM	PH3 valve closed
7/28/2011	10:43:26 PM	SiCl4 pre valve closed
7/28/2011	10:43:26 PM	SiCl4 post valve closed
7/28/2011	10:43:26 PM	Bypass valve closed
7/28/2011	10:43:26 PM	Bubbler valve closed
7/28/2011	10:43:26 PM	Helium valve opened
7/28/2011	10:43:26 PM	Main Vac valve opened
7/28/2011	10:43:26 PM	Helium MFC set to  20.000000
7/28/2011	10:43:26 PM	H2 MFC set to  0.000000
7/28/2011	10:43:26 PM	BCl3 MFC set to  0.000000
7/28/2011	10:43:26 PM	PHl3 MFC set to  0.000000
7/28/2011	10:43:26 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:43:26 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:43:26 PM	Tube furnace set to 0
7/28/2011	10:43:56 PM	Helium valve closed
7/28/2011	10:43:56 PM	H2 valve closed
7/28/2011	10:43:56 PM	BCl3 valve closed
7/28/2011	10:43:56 PM	PH3 valve closed
7/28/2011	10:43:56 PM	SiCl4 pre valve closed
7/28/2011	10:43:56 PM	SiCl4 post valve closed
7/28/2011	10:43:56 PM	Bypass valve closed
7/28/2011	10:43:56 PM	Bubbler valve closed
7/28/2011	10:43:56 PM	Main Vac valve opened
7/28/2011	10:43:56 PM	Helium MFC set to  0.000000
7/28/2011	10:43:56 PM	H2 MFC set to  0.000000
7/28/2011	10:43:56 PM	BCl3 MFC set to  0.000000
7/28/2011	10:43:56 PM	PHl3 MFC set to  0.000000
7/28/2011	10:43:56 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:43:56 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:43:56 PM	Tube furnace set to 0
7/28/2011	10:44:26 PM	H2 valve closed
7/28/2011	10:44:26 PM	BCl3 valve closed
7/28/2011	10:44:26 PM	PH3 valve closed
7/28/2011	10:44:26 PM	SiCl4 pre valve closed
7/28/2011	10:44:26 PM	SiCl4 post valve closed
7/28/2011	10:44:26 PM	Bypass valve closed
7/28/2011	10:44:26 PM	Bubbler valve closed
7/28/2011	10:44:26 PM	Helium valve opened
7/28/2011	10:44:26 PM	Main Vac valve opened
7/28/2011	10:44:26 PM	Helium MFC set to  20.000000
7/28/2011	10:44:26 PM	H2 MFC set to  0.000000
7/28/2011	10:44:26 PM	BCl3 MFC set to  0.000000
7/28/2011	10:44:26 PM	PHl3 MFC set to  0.000000
7/28/2011	10:44:26 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:44:26 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:44:26 PM	Tube furnace set to 0
7/28/2011	10:44:56 PM	Helium valve closed
7/28/2011	10:44:56 PM	H2 valve closed
7/28/2011	10:44:56 PM	BCl3 valve closed
7/28/2011	10:44:56 PM	PH3 valve closed
7/28/2011	10:44:56 PM	SiCl4 pre valve closed
7/28/2011	10:44:56 PM	SiCl4 post valve closed
7/28/2011	10:44:56 PM	Bypass valve closed
7/28/2011	10:44:56 PM	Bubbler valve closed
7/28/2011	10:44:56 PM	Main Vac valve opened
7/28/2011	10:44:56 PM	Helium MFC set to  0.000000
7/28/2011	10:44:56 PM	H2 MFC set to  0.000000
7/28/2011	10:44:56 PM	BCl3 MFC set to  0.000000
7/28/2011	10:44:56 PM	PHl3 MFC set to  0.000000
7/28/2011	10:44:56 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:44:56 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:44:56 PM	Tube furnace set to 200
7/28/2011	10:45:26 PM	H2 valve closed
7/28/2011	10:45:26 PM	BCl3 valve closed
7/28/2011	10:45:26 PM	PH3 valve closed
7/28/2011	10:45:26 PM	SiCl4 pre valve closed
7/28/2011	10:45:26 PM	SiCl4 post valve closed
7/28/2011	10:45:26 PM	Bypass valve closed
7/28/2011	10:45:26 PM	Bubbler valve closed
7/28/2011	10:45:26 PM	Helium valve opened
7/28/2011	10:45:26 PM	Main Vac valve opened
7/28/2011	10:45:26 PM	Helium MFC set to  20.000000
7/28/2011	10:45:26 PM	H2 MFC set to  0.000000
7/28/2011	10:45:26 PM	BCl3 MFC set to  0.000000
7/28/2011	10:45:26 PM	PHl3 MFC set to  0.000000
7/28/2011	10:45:26 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:45:26 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:45:27 PM	Tube furnace set to 200
7/28/2011	10:45:57 PM	Helium valve closed
7/28/2011	10:45:57 PM	H2 valve closed
7/28/2011	10:45:57 PM	BCl3 valve closed
7/28/2011	10:45:57 PM	PH3 valve closed
7/28/2011	10:45:57 PM	SiCl4 pre valve closed
7/28/2011	10:45:57 PM	SiCl4 post valve closed
7/28/2011	10:45:57 PM	Bypass valve closed
7/28/2011	10:45:57 PM	Bubbler valve closed
7/28/2011	10:45:57 PM	Main Vac valve opened
7/28/2011	10:45:57 PM	Helium MFC set to  0.000000
7/28/2011	10:45:57 PM	H2 MFC set to  0.000000
7/28/2011	10:45:57 PM	BCl3 MFC set to  0.000000
7/28/2011	10:45:57 PM	PHl3 MFC set to  0.000000
7/28/2011	10:45:57 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:45:57 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:45:57 PM	Tube furnace set to 200
7/28/2011	10:46:27 PM	H2 valve closed
7/28/2011	10:46:27 PM	BCl3 valve closed
7/28/2011	10:46:27 PM	PH3 valve closed
7/28/2011	10:46:27 PM	SiCl4 pre valve closed
7/28/2011	10:46:27 PM	SiCl4 post valve closed
7/28/2011	10:46:27 PM	Bypass valve closed
7/28/2011	10:46:27 PM	Bubbler valve closed
7/28/2011	10:46:27 PM	Helium valve opened
7/28/2011	10:46:27 PM	Main Vac valve opened
7/28/2011	10:46:27 PM	Helium MFC set to  20.000000
7/28/2011	10:46:27 PM	H2 MFC set to  0.000000
7/28/2011	10:46:27 PM	BCl3 MFC set to  0.000000
7/28/2011	10:46:27 PM	PHl3 MFC set to  0.000000
7/28/2011	10:46:27 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:46:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:46:27 PM	Tube furnace set to 200
7/28/2011	10:46:57 PM	Helium valve closed
7/28/2011	10:46:57 PM	H2 valve closed
7/28/2011	10:46:57 PM	BCl3 valve closed
7/28/2011	10:46:57 PM	PH3 valve closed
7/28/2011	10:46:57 PM	SiCl4 pre valve closed
7/28/2011	10:46:57 PM	SiCl4 post valve closed
7/28/2011	10:46:57 PM	Bypass valve closed
7/28/2011	10:46:57 PM	Bubbler valve closed
7/28/2011	10:46:57 PM	Main Vac valve opened
7/28/2011	10:46:57 PM	Helium MFC set to  0.000000
7/28/2011	10:46:57 PM	H2 MFC set to  0.000000
7/28/2011	10:46:57 PM	BCl3 MFC set to  0.000000
7/28/2011	10:46:57 PM	PHl3 MFC set to  0.000000
7/28/2011	10:46:57 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:46:57 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:46:57 PM	Tube furnace set to 200
7/28/2011	10:47:27 PM	H2 valve closed
7/28/2011	10:47:27 PM	BCl3 valve closed
7/28/2011	10:47:27 PM	PH3 valve closed
7/28/2011	10:47:27 PM	SiCl4 pre valve closed
7/28/2011	10:47:27 PM	SiCl4 post valve closed
7/28/2011	10:47:27 PM	Bypass valve closed
7/28/2011	10:47:27 PM	Bubbler valve closed
7/28/2011	10:47:27 PM	Helium valve opened
7/28/2011	10:47:27 PM	Main Vac valve opened
7/28/2011	10:47:27 PM	Helium MFC set to  20.000000
7/28/2011	10:47:27 PM	H2 MFC set to  0.000000
7/28/2011	10:47:27 PM	BCl3 MFC set to  0.000000
7/28/2011	10:47:27 PM	PHl3 MFC set to  0.000000
7/28/2011	10:47:27 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:47:27 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:47:28 PM	Tube furnace set to 200
7/28/2011	10:47:58 PM	Helium valve closed
7/28/2011	10:47:58 PM	H2 valve closed
7/28/2011	10:47:58 PM	BCl3 valve closed
7/28/2011	10:47:58 PM	PH3 valve closed
7/28/2011	10:47:58 PM	SiCl4 pre valve closed
7/28/2011	10:47:58 PM	SiCl4 post valve closed
7/28/2011	10:47:58 PM	Bypass valve closed
7/28/2011	10:47:58 PM	Bubbler valve closed
7/28/2011	10:47:58 PM	Main Vac valve opened
7/28/2011	10:47:58 PM	Helium MFC set to  0.000000
7/28/2011	10:47:58 PM	H2 MFC set to  0.000000
7/28/2011	10:47:58 PM	BCl3 MFC set to  0.000000
7/28/2011	10:47:58 PM	PHl3 MFC set to  0.000000
7/28/2011	10:47:58 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:47:58 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:47:58 PM	Tube furnace set to 200
7/28/2011	10:48:28 PM	H2 valve closed
7/28/2011	10:48:28 PM	BCl3 valve closed
7/28/2011	10:48:28 PM	PH3 valve closed
7/28/2011	10:48:28 PM	SiCl4 pre valve closed
7/28/2011	10:48:28 PM	SiCl4 post valve closed
7/28/2011	10:48:28 PM	Bypass valve closed
7/28/2011	10:48:28 PM	Bubbler valve closed
7/28/2011	10:48:28 PM	Helium valve opened
7/28/2011	10:48:28 PM	Main Vac valve opened
7/28/2011	10:48:28 PM	Helium MFC set to  20.000000
7/28/2011	10:48:28 PM	H2 MFC set to  0.000000
7/28/2011	10:48:28 PM	BCl3 MFC set to  0.000000
7/28/2011	10:48:28 PM	PHl3 MFC set to  0.000000
7/28/2011	10:48:28 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:48:28 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:48:28 PM	Tube furnace set to 200
7/28/2011	10:48:58 PM	Helium valve closed
7/28/2011	10:48:58 PM	H2 valve closed
7/28/2011	10:48:58 PM	BCl3 valve closed
7/28/2011	10:48:58 PM	PH3 valve closed
7/28/2011	10:48:58 PM	SiCl4 pre valve closed
7/28/2011	10:48:58 PM	SiCl4 post valve closed
7/28/2011	10:48:58 PM	Bypass valve closed
7/28/2011	10:48:58 PM	Bubbler valve closed
7/28/2011	10:48:58 PM	Main Vac valve opened
7/28/2011	10:48:58 PM	Helium MFC set to  0.000000
7/28/2011	10:48:58 PM	H2 MFC set to  0.000000
7/28/2011	10:48:58 PM	BCl3 MFC set to  0.000000
7/28/2011	10:48:58 PM	PHl3 MFC set to  0.000000
7/28/2011	10:48:58 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:48:58 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:48:58 PM	Tube furnace set to 200
7/28/2011	10:49:28 PM	H2 valve closed
7/28/2011	10:49:28 PM	BCl3 valve closed
7/28/2011	10:49:28 PM	PH3 valve closed
7/28/2011	10:49:28 PM	SiCl4 pre valve closed
7/28/2011	10:49:28 PM	SiCl4 post valve closed
7/28/2011	10:49:28 PM	Bypass valve closed
7/28/2011	10:49:28 PM	Bubbler valve closed
7/28/2011	10:49:28 PM	Helium valve opened
7/28/2011	10:49:28 PM	Main Vac valve opened
7/28/2011	10:49:28 PM	Helium MFC set to  20.000000
7/28/2011	10:49:28 PM	H2 MFC set to  0.000000
7/28/2011	10:49:28 PM	BCl3 MFC set to  0.000000
7/28/2011	10:49:28 PM	PHl3 MFC set to  0.000000
7/28/2011	10:49:28 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:49:28 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:49:28 PM	Tube furnace set to 200
7/28/2011	10:49:58 PM	Helium valve closed
7/28/2011	10:49:58 PM	H2 valve closed
7/28/2011	10:49:58 PM	BCl3 valve closed
7/28/2011	10:49:58 PM	PH3 valve closed
7/28/2011	10:49:58 PM	SiCl4 pre valve closed
7/28/2011	10:49:58 PM	SiCl4 post valve closed
7/28/2011	10:49:58 PM	Bypass valve closed
7/28/2011	10:49:58 PM	Bubbler valve closed
7/28/2011	10:49:58 PM	Main Vac valve opened
7/28/2011	10:49:58 PM	Helium MFC set to  0.000000
7/28/2011	10:49:58 PM	H2 MFC set to  0.000000
7/28/2011	10:49:58 PM	BCl3 MFC set to  0.000000
7/28/2011	10:49:58 PM	PHl3 MFC set to  0.000000
7/28/2011	10:49:58 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:49:58 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:49:59 PM	Tube furnace set to 200
7/28/2011	10:50:29 PM	H2 valve closed
7/28/2011	10:50:29 PM	BCl3 valve closed
7/28/2011	10:50:29 PM	PH3 valve closed
7/28/2011	10:50:29 PM	SiCl4 pre valve closed
7/28/2011	10:50:29 PM	SiCl4 post valve closed
7/28/2011	10:50:29 PM	Bypass valve closed
7/28/2011	10:50:29 PM	Bubbler valve closed
7/28/2011	10:50:29 PM	Helium valve opened
7/28/2011	10:50:29 PM	Main Vac valve opened
7/28/2011	10:50:29 PM	Helium MFC set to  20.000000
7/28/2011	10:50:29 PM	H2 MFC set to  0.000000
7/28/2011	10:50:29 PM	BCl3 MFC set to  0.000000
7/28/2011	10:50:29 PM	PHl3 MFC set to  0.000000
7/28/2011	10:50:29 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:50:29 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:50:29 PM	Tube furnace set to 200
7/28/2011	10:50:59 PM	Helium valve closed
7/28/2011	10:50:59 PM	H2 valve closed
7/28/2011	10:50:59 PM	BCl3 valve closed
7/28/2011	10:50:59 PM	PH3 valve closed
7/28/2011	10:50:59 PM	SiCl4 pre valve closed
7/28/2011	10:50:59 PM	SiCl4 post valve closed
7/28/2011	10:50:59 PM	Bypass valve closed
7/28/2011	10:50:59 PM	Bubbler valve closed
7/28/2011	10:50:59 PM	Main Vac valve opened
7/28/2011	10:50:59 PM	Helium MFC set to  0.000000
7/28/2011	10:50:59 PM	H2 MFC set to  0.000000
7/28/2011	10:50:59 PM	BCl3 MFC set to  0.000000
7/28/2011	10:50:59 PM	PHl3 MFC set to  0.000000
7/28/2011	10:50:59 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:50:59 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:50:59 PM	Tube furnace set to 0
7/28/2011	10:51:00 PM	Run finished at 10:51 PM
7/28/2011	10:54:07 PM	Recipe started at 10:54 PM
7/28/2011	10:54:07 PM	Helium valve closed
7/28/2011	10:54:07 PM	H2 valve closed
7/28/2011	10:54:07 PM	BCl3 valve closed
7/28/2011	10:54:07 PM	PH3 valve closed
7/28/2011	10:54:07 PM	SiCl4 pre valve closed
7/28/2011	10:54:07 PM	SiCl4 post valve closed
7/28/2011	10:54:07 PM	Main Vac valve closed
7/28/2011	10:54:07 PM	Bypass valve closed
7/28/2011	10:54:07 PM	Bubbler valve closed
7/28/2011	10:54:07 PM	Helium MFC set to  0.000000
7/28/2011	10:54:07 PM	H2 MFC set to  0.000000
7/28/2011	10:54:07 PM	BCl3 MFC set to  0.000000
7/28/2011	10:54:07 PM	PHl3 MFC set to  0.000000
7/28/2011	10:54:07 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:54:07 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:54:07 PM	Tube furnace set to 0
7/28/2011	10:54:10 PM	Helium valve closed
7/28/2011	10:54:10 PM	BCl3 valve closed
7/28/2011	10:54:10 PM	PH3 valve closed
7/28/2011	10:54:10 PM	SiCl4 pre valve closed
7/28/2011	10:54:10 PM	SiCl4 post valve closed
7/28/2011	10:54:10 PM	Main Vac valve closed
7/28/2011	10:54:10 PM	Bypass valve closed
7/28/2011	10:54:10 PM	Bubbler valve closed
7/28/2011	10:54:10 PM	H2 valve opened
7/28/2011	10:54:10 PM	Helium MFC set to  0.000000
7/28/2011	10:54:10 PM	H2 MFC set to  500.000000
7/28/2011	10:54:10 PM	BCl3 MFC set to  0.000000
7/28/2011	10:54:10 PM	PHl3 MFC set to  0.000000
7/28/2011	10:54:10 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:54:10 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:54:10 PM	Tube furnace set to 0
7/28/2011	10:55:13 PM	Helium valve closed
7/28/2011	10:55:13 PM	BCl3 valve closed
7/28/2011	10:55:13 PM	PH3 valve closed
7/28/2011	10:55:13 PM	SiCl4 pre valve closed
7/28/2011	10:55:13 PM	SiCl4 post valve closed
7/28/2011	10:55:13 PM	Main Vac valve closed
7/28/2011	10:55:13 PM	Bypass valve closed
7/28/2011	10:55:13 PM	H2 valve opened
7/28/2011	10:55:13 PM	Bubbler valve opened
7/28/2011	10:55:13 PM	Helium MFC set to  0.000000
7/28/2011	10:55:13 PM	H2 MFC set to  500.000000
7/28/2011	10:55:13 PM	BCl3 MFC set to  0.000000
7/28/2011	10:55:13 PM	PHl3 MFC set to  0.000000
7/28/2011	10:55:13 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:55:13 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:55:14 PM	Tube furnace set to 0
7/28/2011	10:55:15 PM	Helium valve closed
7/28/2011	10:55:15 PM	BCl3 valve closed
7/28/2011	10:55:15 PM	PH3 valve closed
7/28/2011	10:55:15 PM	SiCl4 pre valve closed
7/28/2011	10:55:15 PM	SiCl4 post valve closed
7/28/2011	10:55:15 PM	Main Vac valve closed
7/28/2011	10:55:15 PM	Bypass valve closed
7/28/2011	10:55:15 PM	H2 valve opened
7/28/2011	10:55:15 PM	Bubbler valve opened
7/28/2011	10:55:15 PM	Helium MFC set to  0.000000
7/28/2011	10:55:15 PM	H2 MFC set to  500.000000
7/28/2011	10:55:15 PM	BCl3 MFC set to  0.000000
7/28/2011	10:55:15 PM	PHl3 MFC set to  0.000000
7/28/2011	10:55:15 PM	SiCl4 MFC set to  0.000000
7/28/2011	10:55:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	10:55:15 PM	Tube furnace set to 1000
7/28/2011	11:15:15 PM	Helium valve closed
7/28/2011	11:15:15 PM	PH3 valve closed
7/28/2011	11:15:15 PM	Main Vac valve closed
7/28/2011	11:15:15 PM	Bypass valve closed
7/28/2011	11:15:15 PM	H2 valve opened
7/28/2011	11:15:15 PM	BCl3 valve opened
7/28/2011	11:15:15 PM	SiCl4 pre valve opened
7/28/2011	11:15:15 PM	SiCl4 post valve opened
7/28/2011	11:15:15 PM	Bubbler valve opened
7/28/2011	11:15:15 PM	Helium MFC set to  0.000000
7/28/2011	11:15:15 PM	H2 MFC set to  500.000000
7/28/2011	11:15:15 PM	BCl3 MFC set to  2.500000
7/28/2011	11:15:15 PM	PHl3 MFC set to  0.000000
7/28/2011	11:15:15 PM	SiCl4 MFC set to  50.000000
7/28/2011	11:15:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:15:15 PM	Tube furnace set to 1000
7/28/2011	11:29:15 PM	Helium valve closed
7/28/2011	11:29:15 PM	BCl3 valve closed
7/28/2011	11:29:15 PM	Main Vac valve closed
7/28/2011	11:29:15 PM	Bypass valve closed
7/28/2011	11:29:15 PM	H2 valve opened
7/28/2011	11:29:15 PM	PH3 valve opened
7/28/2011	11:29:15 PM	SiCl4 pre valve opened
7/28/2011	11:29:15 PM	SiCl4 post valve opened
7/28/2011	11:29:15 PM	Bubbler valve opened
7/28/2011	11:29:15 PM	Helium MFC set to  0.000000
7/28/2011	11:29:15 PM	H2 MFC set to  500.000000
7/28/2011	11:29:15 PM	BCl3 MFC set to  0.000000
7/28/2011	11:29:15 PM	PHl3 MFC set to  20.000000
7/28/2011	11:29:15 PM	SiCl4 MFC set to  50.000000
7/28/2011	11:29:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:29:15 PM	Tube furnace set to 1000
7/28/2011	11:31:15 PM	Helium valve closed
7/28/2011	11:31:15 PM	BCl3 valve closed
7/28/2011	11:31:15 PM	PH3 valve closed
7/28/2011	11:31:15 PM	SiCl4 pre valve closed
7/28/2011	11:31:15 PM	SiCl4 post valve closed
7/28/2011	11:31:15 PM	Main Vac valve closed
7/28/2011	11:31:15 PM	Bypass valve closed
7/28/2011	11:31:15 PM	H2 valve opened
7/28/2011	11:31:15 PM	Bubbler valve opened
7/28/2011	11:31:15 PM	Helium MFC set to  0.000000
7/28/2011	11:31:15 PM	H2 MFC set to  500.000000
7/28/2011	11:31:15 PM	BCl3 MFC set to  0.000000
7/28/2011	11:31:15 PM	PHl3 MFC set to  0.000000
7/28/2011	11:31:15 PM	SiCl4 MFC set to  0.000000
7/28/2011	11:31:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:31:15 PM	Tube furnace set to 750
7/28/2011	11:36:15 PM	H2 valve closed
7/28/2011	11:36:15 PM	BCl3 valve closed
7/28/2011	11:36:15 PM	PH3 valve closed
7/28/2011	11:36:15 PM	SiCl4 pre valve closed
7/28/2011	11:36:15 PM	SiCl4 post valve closed
7/28/2011	11:36:15 PM	Main Vac valve closed
7/28/2011	11:36:15 PM	Bypass valve closed
7/28/2011	11:36:15 PM	Helium valve opened
7/28/2011	11:36:15 PM	Bubbler valve opened
7/28/2011	11:36:15 PM	Helium MFC set to  500.000000
7/28/2011	11:36:15 PM	H2 MFC set to  0.000000
7/28/2011	11:36:15 PM	BCl3 MFC set to  0.000000
7/28/2011	11:36:15 PM	PHl3 MFC set to  0.000000
7/28/2011	11:36:15 PM	SiCl4 MFC set to  0.000000
7/28/2011	11:36:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:36:15 PM	Tube furnace set to 0
7/28/2011	11:56:15 PM	Helium valve closed
7/28/2011	11:56:15 PM	H2 valve closed
7/28/2011	11:56:15 PM	BCl3 valve closed
7/28/2011	11:56:15 PM	PH3 valve closed
7/28/2011	11:56:15 PM	SiCl4 pre valve closed
7/28/2011	11:56:15 PM	SiCl4 post valve closed
7/28/2011	11:56:15 PM	Main Vac valve closed
7/28/2011	11:56:15 PM	Bypass valve closed
7/28/2011	11:56:15 PM	Bubbler valve closed
7/28/2011	11:56:15 PM	Helium MFC set to  0.000000
7/28/2011	11:56:15 PM	H2 MFC set to  0.000000
7/28/2011	11:56:15 PM	BCl3 MFC set to  0.000000
7/28/2011	11:56:15 PM	PHl3 MFC set to  0.000000
7/28/2011	11:56:15 PM	SiCl4 MFC set to  0.000000
7/28/2011	11:56:15 PM	Bypass solenoid MFC set to  0.000000
7/28/2011	11:56:16 PM	Tube furnace set to 0
7/28/2011	11:56:17 PM	Run finished at 11:56 PM
